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Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M.; Dörr, N. ; Schneidhofer, C. ; Schmid, U.Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019