SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences: Book of Abstracts

Book title Buchtitel
SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences: Book of Abstracts
 

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PreviewAuthor(s)TitleTypeIssue Date
1Filipovic, Lado ; Reiter, Tobias Multi-Scale Model for High Aspect Ratio TiN Etching in a Cl₂/Ar Inductively Coupled PlasmaInproceedings Konferenzbeitrag2024