SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences: Book of Abstracts

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		Preview	Author(s)	Title	Type	Issue Date
	1		Filipovic, Lado ; Reiter, Tobias	Multi-Scale Model for High Aspect Ratio TiN Etching in a Cl₂/Ar Inductively Coupled Plasma	Inproceedings Konferenzbeitrag	2024