Proceedings of the ASPE 2025 Annual Meeting

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978-1-887706-62-9

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Results 1-1 of 1 (Search time: 0.002 seconds).

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		Preview	Author(s)	Title	Type	Issue Date
	1		Pechgraber, Daniel ; Heumesser, Florian ; Csencsics, Ernst ; Schitter, Georg	Decoupling Adaptation of a 3-DoF Dual-Stage Positioning System for High-Precision Optical Inline Metrology	Inproceedings Konferenzbeitrag	2025