Proceedings of the 18#^{th} Plansee Seminar 2013

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Proceedings of the 18#^{th} Plansee Seminar 2013
 

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Author:  Sabitzer, Corinna

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1Sabitzer, Corinna ; Paulitsch, Jörg Ulrich ; Polcik, Peter ; Arndt, Mirjam ; Rachbauer, Richard ; Mayrhofer, Paul Heinz Reactive and non-reactive sputter deposition of metallic, intermetallic and ceramic target materials to prepare Al-Cr-N coatingsKonferenzbeitrag Inproceedings2013