SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences

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Description

Event name
SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences
 
Event type
Event for scientific audience
 
Start date
17-04-2024
End date
19-04-2024
 
Location
Vienna
Country
Austria
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Filipovic, Lado ; Reiter, Tobias Multi-Scale Model for High Aspect Ratio TiN Etching in a Cl₂/Ar Inductively Coupled PlasmaInproceedings Konferenzbeitrag2024