Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

Event name
Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
 
Event type
Event for scientific audience
 
Start date
26-01-2015
End date
28-01-2015
 
Location
Bologna, Italy
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Filter:
Author:  Filipovic, Lado

Results 1-2 of 2 (Search time: 0.005 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Manstetten, Paul ; Filipovic, Lado ; Hössinger, Andreas ; Weinbub, Josef ; Selberherr, Siegfried Modeling Neutral Particle Flux in High Aspect Ratio Holes using a One-Dimensional Radiosity ApproachKonferenzbeitrag Inproceedings 2016
2Klemenschits, Xaver ; Selberherr, Siegfried ; Filipovic, Lado Unified Feature Scale Model for Etching in SF6 and Cl Plasma ChemistriesKonferenzbeitrag Inproceedings 2018