18th International Vacuum Congress (IVC-18)

Event name
18th International Vacuum Congress (IVC-18)
 
Event type
Event for scientific audience
 
Start date
26-08-2010
Location
Beijing/China
Country
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Filter:
Author:  VanAeken, K.

Results 1-1 of 1 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Horkel, Maximilian ; Eisenmenger-Sittner, Christoph ; Quirchmair, M. ; VanAeken, K. ; Depla, D. ; Mahieu, S. ; Leroy, W.P. Determination of the nascent angular distribution of sputtered particles during reactive and non-reactive magnetron sputteringPräsentation Presentation2010