15th Int. Conference on TXRF and related methods

Event name
15th Int. Conference on TXRF and related methods
 
Event type
Event for scientific audience
 
Start date
23-09-2013
End date
26-09-2013
 
Location
Osaka, Japan
Country
 
Solo Exhibition
Solo Exhibition
Event format Veranstaltungsformat
On Site

Publications Publikationen

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Author:  Giubertoni, D.

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PreviewAuthor(s)TitleTypeIssue Date
1Pepponi, Giancarlo ; Meirer, F. ; Brigidi, Fabio ; Demenev, E. ; Giubertoni, D. ; Gennaro, S. ; Bersani, M. ; Ingerle, D. ; Streli, Christina ; Steinhauser, Georg ; Mehta, A. ; Pianetta, P. ; Vishwanath, V. ; Foad, M.A. GIXRF and GEXRF analysis of PIII ultra shallow arsenic profiles in SiliconPräsentation Presentation2013
2Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2013