Title Titel
Applied Surface Science
 
e-ISSN
1873-5584
 
ISSN
0169-4332
 
Publisher Herausgeber
ELSEVIER
 
Publisher's Address Herausgeber Adresse
RADARWEG 29, AMSTERDAM, Netherlands, 1043 NX
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Author:  Bethge, O.

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PreviewAuthor(s)TitleTypeIssue Date
1Zimmermann, C. ; Bethge, O. ; Winkler, K. ; Lutzer, B. ; Bertagnolli, E. Improving the ALD-grown Y2O3/Ge interface quality bysurface and annealing treatmentsArtikel Article 2016
2Bethge, O. ; Henkel, Christoph ; Abermann, S. ; Pozzovivo, G. ; Stoeger-Pollach, M. ; Werner, W.S.M. ; Smoliner, J. ; Bertagnolli, E. Stability of La₂O₃ and GeO₂ passivated Ge surfaces during ALD of ZrO₂ high-k dielectricArtikel Article 2012
3Abermann, S. ; Henkel, C. ; Bethge, O. ; Pozzovivo, G. ; Klang, P. ; Bertagnolli, E. Stabilization of a very high- k crystalline ZrO 2 phase by post deposition annealing of atomic layer deposited ZrO 2 /La 2 O 3 dielectrics on germaniumArtikel Article2010