Journal of Microelectromechanical Systems

Title Titel

e-ISSN

1941-0158

ISSN

1057-7157

Publisher Herausgeber

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

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Access Type: Open Access

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		Preview	Author(s)	Title	Type	Issue Date
	1		Moll, Philipp ; Pfusterschmied, Georg ; Schneider, Michael ; Dorfmeister, Manuel ; Knafl, Sebastian ; Wanzenböck, Heinz ; Schmid, Ulrich	Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids	Article Artikel	Jun-2022