Journal of Micromechanics and Microengineering

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

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Author:  Schmid, Ulrich

Results 1-17 of 17 (Search time: 0.015 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Schmid, U ; Krötz, G ; Schmitt-Landsiedel, D A Volumetric Flow Sensor for Automotive Injection SystemsArtikel Article2008
2Wang, W B ; Fu, Y Q ; Chen, J J ; Xuan, W P ; Chen, J K ; Wang, X Z ; Mayrhofer, P ; Duan, P F ; Bittner, A ; Schmid, U ; Luo, J K AlScN thin film based surface acoustic wave devices with enhanced microfluidic performanceArtikel Article 2016
3Ruiz-Díez, V ; Manzaneque, T ; Hernando-García, J ; Ababneh, A ; Kucera, M ; Schmid, U ; Seidel, H ; Sánchez-Rojas, J L Design and characterization of AlN-based in-plane microplate resonatorsArtikel Article2013
4Sökmen, Ü ; Stranz, A ; Waag, A ; Ababneh, A ; Seidel, H ; Schmid, U ; Peiner, E Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applicationsArtikel Article2010
5Stöber, L ; Konrath, J P ; Krivec, S ; Patocka, F ; Schwarz, S ; Bittner, A ; Schneider, M ; Schmid, U Impact of sputter deposition parameters on molybdenum nitride thin film propertiesArtikel Article2015
6Sanchez-Rojas, J L ; Hernando, J ; Donoso, A ; Bellido, J C ; Manzaneque, T ; Ababneh, A ; Seidel, H ; Schmid, U Modal optimization and filtering in piezoelectric microplate resonatorsArtikel Article2010
7Aguinsky, Luiz Felipe ; Wachter, Georg ; Manstetten, Paul ; Rodrigues, Frâncio ; Trupke, Michael ; Schmid, Ulrich ; Hössinger, Andreas ; Weinbub, Josef Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity ResonatorsArtikel Article 2021
8Ruiz-Díez, V ; Hernando-García, J ; Toledo, J ; Manzaneque, T ; Kucera, M ; Pfusterschmied, G ; Schmid, U ; Sánchez-Rojas, J L Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid MediaArtikel Article 2016
9Ruiz-Díez, V ; Hernando-García, J ; Manzaneque, T ; Kucera, M ; Schmid, U ; Sánchez-Rojas, J L Modelling out-of-plane and in-plane resonant modes of microplates in liquid mediaArtikel Article2015
10Toledo, J ; Manzaneque, T ; Ruiz-Díez, V ; Kucera, M ; Pfusterschmied, G ; Wistrela, E ; Schmid, U ; Sánchez-Rojas, J L Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquidsArtikel Article 2016
11Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019
12Kucera, M ; Manzaneque, T ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loopArtikel Article2013
13Manzaneque, T ; Hernando-García, J ; Ababneh, A ; Schwarz, P ; Seidel, H ; Schmid, U ; Sánchez-Rojas, J L Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loopArtikel Article2011
14Pfusterschmied, G ; Weinmann, C ; Schneider, M ; Platz, D ; Shen, Naijian ; Sader, J ; Schmid, U Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquidsArtikel Article 2020
15Dorfmeister Manuel - 2019 - Switching performance of bistable membranes...pdf.jpgDorfmeister, Manuel ; Kössl, Bernhard ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Switching performance of bistable membranes activated with integrated piezoelectric thin film transducersArticle Artikel Oct-2019
16Pfusterschmied, G ; Kucera, M ; Wistrela, E ; Manzaneque, T ; Ruiz-Díez, V ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquidsArtikel Article2015
17Platz, Daniel ; Schmid, Ulrich Vibrational Modes in MEMS ResonatorsArtikel Article 2019