Journal of Micromechanics and Microengineering

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

Filter:
Author:  Keplinger, F

Results 1-4 of 4 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Riesch, C ; Reichel, E K ; Jachimowicz, A ; Schalko, J ; Hudek, P ; Jakoby, B ; Keplinger, F A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readoutArtikel Article 2009
2Dabsch Alexander - 2017 - MEMS cantilever based magnetic field gradient sensor.pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz MEMS cantilever based magnetic field gradient sensorArticle Artikel May-2017
3Dabsch, Alexander ; Rosenberg, Christoph ; Klug, Patrick ; Stifter, Michael ; Keplinger, Franz Multiaxial resonant MEMS force sensorArtikel Article 2018
4Dabsch Alexander - 2018 - Temperature dependency of silicon structures for...pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz Temperature dependency of silicon structures for magnetic field gradient sensingArticle Artikel Feb-2018