Kinetic Monte Carlo studies of Smart Cut technology in Si; code modification and calibration of IMSIL for H and He implantations in GaN

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Primary Data

Project Acronym Projekt Kurzbezeichnung
Simulation von Smart Cut
 
Project Title (de) Projekttitel (de)
Kinetic Monte Carlo studies of Smart Cut technology in Si; code modification and calibration of IMSIL for H and He implantations in GaN
 
Consortium Coordinator Koordinator des Konsortiums
Principal Investigator Projektleiter_in
 
Status
CLOSED