Dörr, N.

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Dörr, N.
 

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1Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental two-dimensional roof tile-shaped mode.pdf.jpgPatocka, F. ; Schneider, M.; Dörr, N. ; Schneidhofer, C. ; Schmid, U.Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel2019