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Wilke, M.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U.	Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering	Artikel Article	2010