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Eickhoff, M.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Schmid, U. ; Eickhoff, M. ; Richter, Ch. ; Krötz, G. ; Schmitt-Landsiedel, D.	Etching Characteristics and Mechanical Properties of a-SiC:H Thin Films	Artikel Article	2001