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Boer, Peter de

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		Preview	Author(s)	Title	Type	Issue Date
	1		Biebl, Fabian ; Glawar, Robert ; Jalali, Anahid ; Ansari, Fazel ; Haslhofer, Bernhard ; Boer, Peter de ; Sihn, Wilfried	A conceptual model to enable prescriptive maintenance for etching equipment in semiconductor manufacturing	Konferenzbeitrag Inproceedings	2020