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Full name Familienname, Vorname
Farahani, M.
 
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1Farahani, M. ; Kozák, T. ; Pajdarová, A. D. ; Bahr, A. ; Riedl, H. ; Zeman, P. Understanding ion and atom fluxes during high-power impulse magnetron sputtering deposition of NbCₓ, films from a compound targetArticle Artikel Nov-2023