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Emminger, Stefan

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TU Wien

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		Preview	Author(s)	Title	Type	Issue Date
	1		Kanellopulos, Kostas ; West, Robert G ; Emminger, Stefan ; Martini, Paolo ; Sauer, Markus ; Foelske, Annette ; Schmid, Silvan	Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing	Article Artikel	30-Aug-2024