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wang, zhongrui

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		Preview	Author(s)	Title	Type	Issue Date
	1		Hu, Ziyi ; Li, Junjie ; Chen, Rui ; Shang, Dashan ; Wei, Yayi ; Wang, Zhongrui ; Li, Ling ; Filipovic, Lado	A Two-Step Dry Etching Model for Non-Uniform Etching Profile in Gate-All-Around Field-Effect Transistor Manufacturing	Article Artikel	19-Dec-2024