Full name Familienname, Vorname

Wei, Yayi

Main Affiliation Organisationszuordnung

Chinese Academy of Sciences

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		Preview	Author(s)	Title	Type	Issue Date
	1		Hu, Ziyi ; Li, Junjie ; Chen, Rui ; Shang, Dashan ; Wei, Yayi ; Wang, Zhongrui ; Li, Ling ; Filipovic, Lado	A Two-Step Dry Etching Model for Non-Uniform Etching Profile in Gate-All-Around Field-Effect Transistor Manufacturing	Article Artikel	19-Dec-2024
	2		Shao, Hua ; Reiter, Tobias ; Chen, Rui ; Li, Junjie ; Hu, Ziyi ; Wei, Yayi ; Li, Ling ; Filipovic, Lado	Loading Effect during SiGe/Si Stack Selective Isotropic Etching for Gate-All-Around Transistors	Article Artikel	26-Nov-2024