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van Beurden, Martijn

Contributing Publications Mitbeteiligte Publikationen

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		Preview	Author(s)	Title	Type	Issue Date
	1		Lenz, Christoph ; Scharinger, Alexander ; Manstetten, Paul ; Hössinger, Andreas ; Weinbub, Josef	A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes	Buchbeitrag Book Contribution	2021