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Hierlemann, M.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Pongratz, Peter ; Kenda, Andreas ; Cerva, H. ; Hierlemann, M.	Simulation of LACBED patterns of STI Structures for the Measurement of Strain in ULSI Devices	Konferenzbeitrag Inproceedings	2006
	2		Kenda, Andreas ; Cerva, H. ; Pongratz, Peter ; Hierlemann, M. ; Liebmann, R.	Strain measurements of ULSI devices using LACBED with TSUPREM modeled displacements	Konferenzbeitrag Inproceedings	2005