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Full name Familienname, Vorname
Hoenicke, P.
 

Own Publications Eigene Publikationen

Results 1-5 of 5 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Pepponi, Giancarlo ; Giubertoni, D. ; Bersani, M. ; Meirer, F. ; Ingerle, D. ; Steinhauser, Georg ; Streli, Christina ; Hoenicke, P. ; Beckhoff, B. Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in siliconArtikel Article2010
2Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Ingerle, D. ; Steinhauser, Georg ; Streli, Christina ; Hoenicke, P. ; Beckhoff, B. ; Bersani, M. Grazing Incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for characterization of ultra shallow arsenic distribution in siliconPräsentation Presentation2009
3Giubertoni, D. ; Pepponi, Giancarlo ; Beckhoff, B. ; Hoenicke, P. ; Gennaro, S. ; Meirer, F. ; Ingerle, D. ; Steinhauser, Georg ; Fried, M. ; Petrik, P. ; Parisini, A. ; Reading, M.A. ; Streli, Christina ; van den Berg, J.A. ; Bersani, M. Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortiumPräsentation Presentation2009
4Nutsch, A. ; Beckhoff, B. ; Altmann, R. ; van den Berg, J.A. ; Giubertoni, D. ; Hoenicke, P. ; Bersani, M. ; Leibold, A. ; Meirer, F. ; Müller, M. ; Pepponi, Giancarlo ; Otto, M. ; Petrik, P. ; Reading, M.A. ; Pfitzner, L. ; Ryssel, H. Complementary metrology within a European joint laboratoryKonferenzbeitrag Inproceedings 2009
5Pepponi, Giancarlo ; Giubertoni, D. ; Bersani, M. ; Zöger, N. ; Streli, Christina ; Beckhoff, B. ; Hoenicke, P. ; Kolbe, M. ; Müller, M. ; Meirer, F. Grazing Incidence X-Ray Fluorescence characterisation of Ultra Shallow Junctions in the ANNA consortiumPräsentation Presentation2008