Wissenschaftliche Artikel

Berger, C., Schiek, M., Schneider, M., Pfusterschmied, G., & Schmid, U. (2025). Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators. Journal of Applied Physics, 137(14), Article 144502. https://doi.org/10.1063/5.0250701 ( reposiTUm)
Berger, C., Schiek, M., Pandit, S., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material. Journal of Applied Physics, 136(14), 1–11. https://doi.org/10.1063/5.0226103 ( reposiTUm)
Berger, C., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators. Journal of Applied Physics, 135(16), 1–10. https://doi.org/10.1063/5.0197261 ( reposiTUm)
Pandit, S., Schneider, M., Berger, C., & Schmid, U. (2024). Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical coupling. SENSORS AND ACTUATORS A-PHYSICAL, 376, Article 115638. https://doi.org/10.1016/j.sna.2024.115638 ( reposiTUm)
Schlögl, M., Schneider, M., & Schmid, U. (2024). Scalable electromagnetic energy harvester for wind turbine rotor blade applications. Smart Materials and Structures, 33(5), 1–12. https://doi.org/10.1088/1361-665X/ad3e52 ( reposiTUm)
Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2024). Real-Time Tracking of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Resonators. Proceedings, 97(1), Article 179. https://doi.org/10.3390/proceedings2024097179 ( reposiTUm)
Disnan, D., Bacher, F., Berger, S., Schneider, M., & Schmid, U. (2024). Microstructural influence on thermal stability of ferroelectric properties in P(VDF-TrFE) spin cast thin films. Polymer, 298, Article 126894. https://doi.org/10.1016/j.polymer.2024.126894 ( reposiTUm)
Schlögl, M., Weißenbach, J., Schneider, M., & Schmid, U. (2023). Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges. Sensors and Actuators A: Physical, 349, Article 114067. https://doi.org/10.1016/j.sna.2022.114067 ( reposiTUm)
Disnan, D., Hafner, J., Schneider, M., & Schmid, U. (2023). Spherulite-like microstructure observed for spin-cast P(VDF-TrFE) thin films and their ferroelectric characteristics. Polymer, 272, Article 125840. https://doi.org/10.1016/j.polymer.2023.125840 ( reposiTUm)
Pandit, S., Schneider, M., Schwarz, S., & Schmid, U. (2023). Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (YₓAl₁₋ₓN) Thin Films. Advanced Engineering Materials, 25(22), 1–8. https://doi.org/10.1002/adem.202300940 ( reposiTUm)
Gesing, A., Tran, T., Huber, D., Steinmüller-Nethl, D., Pfusterschmied, G., Schneider, M., Platz, D., & Schmid, U. (2023). The gas-liquid-Q-factor-inversion in MEMS plate resonators. Journal of Sound and Vibration, 559, Article 117777. https://doi.org/10.1016/j.jsv.2023.117777 ( reposiTUm)
Disnan, D., Hafner, J., Benaglia, S., Teuschel, M., Schneider, M., Garcia, R., & Schmid, U. (2023). Nanostructural and piezoelectric characterization of electro-formed δ-phase poly(vinylidene fluoride) thin films. Materials Research Letters, 11(4), 296–303. https://doi.org/10.1080/21663831.2022.2150096 ( reposiTUm)
Ullmann, P., Bretthauer Christian, Schneider, M., & Schmid, U. (2023). Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out. Sensors and Actuators A: Physical, 349, Article 114003. https://doi.org/10.1016/j.sna.2022.114003 ( reposiTUm)
Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2022). Accuracy and Precision of Resonant Piezoelectric Mems Viscosity Sensors in Highly Viscous Bituminous Materials. Sensors and Actuators A: Physical. https://doi.org/10.1016/j.sna.2022.113903 ( reposiTUm)
Moll, P., Pfusterschmied, G., Schneider, M., Dorfmeister, M., Knafl, S., Wanzenböck, H., & Schmid, U. (2022). Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids. Journal of Microelectromechanical Systems, 31(3), 372–383. https://doi.org/10.1109/JMEMS.2022.3163477 ( reposiTUm)
Pandit, S., Schneider, M., Berger, C., Schwarz, S., & Schmid, U. (2022). Impact of AlN Seed Layer on Microstructure and Piezoelectric Properties of YₓAl₁−ₓN (x = 15%) Thin Films. Advanced Electronic Materials, 1–8. https://doi.org/10.1002/aelm.202200789 ( reposiTUm)
Kartci, A., Vancik, S., Prasek, J., Hrdy, R., Schneider, M., Schmid, U., & Hubalek, J. (2022). Comparison of on-chip MIS capacitors based on stacked HfO₂/Al₂O₃ nanolaminates. Materials Today Communications, 33, Article 104664. https://doi.org/10.1016/j.mtcomm.2022.104664 ( reposiTUm)
Schlögl, M., Köpl, S., Hiesberger, J., Schneider, M., & Schmid, U. (2022). Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing. Sensors and Actuators A: Physical, 346, 1–12. https://doi.org/10.1016/j.sna.2022.113829 ( reposiTUm)
Hajian, A., Artemenko, A., Kromka, A., Schwarz, S., Schneider, M., Dragounová, K., Adaikkan, M., Zellner, C., & Schmid, U. (2022). Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates. Journal of the European Ceramic Society, 42(13), 5789–5800. https://doi.org/10.1016/j.jeurceramsoc.2022.05.049 ( reposiTUm)
Maier, F. J., Schneider, M., Artemenko, A., Kromka, A., Stöger-Pollach, M., & Schmid, U. (2022). Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO₂/TiO₂/IrO₂ capacitors. Journal of Applied Physics, 131(9), Article 095301. https://doi.org/10.1063/5.0080139 ( reposiTUm)
Maier, F. J., Schneider, M., Schrattenholzer, J., & Schmid, U. (2021). Electrical and Microstructural Characterization of TiO2 Thin Films for Flexoelectric Devices. Journal of Physics: Conference Series, 1837, Article 012009. https://doi.org/10.1088/1742-6596/1837/1/012009 ( reposiTUm)
Schlögl, M., Schneider, M., & Schmid, U. (2021). Design and Simulation of a Scalable Hybrid Energy Harvesting Device for Low Frequency Rotations. Journal of Physics: Conference Series, 1837, Article 012007. https://doi.org/10.1088/1742-6596/1837/1/012007 ( reposiTUm)
Schlögl, M., Schneider, M., & Schmid, U. (2021). Piezoelectricity in Y₀.₀₉Al₀.₉₁N thin films. Materials Science and Engineering: B, 276, Article 115543. https://doi.org/10.1016/j.mseb.2021.115543 ( reposiTUm)
Hafner, J. A., Teuschel, M., Disnan, D., Schneider, M., & Schmid, U. (2021). Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators. Materials Research Letters, 9(4), 195–203. https://doi.org/10.1080/21663831.2020.1868593 ( reposiTUm)
Maier, F. J., Schneider, M., Ullmann, P., Hafner, J., & Schmid, U. (2021). α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry. Journal of Applied Physics, 129(21), 214507. https://doi.org/10.1063/5.0051313 ( reposiTUm)
Pfusterschmied, G., Triendl, F., Schneider, M., & Schmid, U. (2021). Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights. Materials Science in Semiconductor Processing, 123(105504), 105504. https://doi.org/10.1016/j.mssp.2020.105504 ( reposiTUm)
Haus, J. N., Schwerter, M., Schneider, M., Gäding, M., Leester-Schädel, M., Schmid, U., & Dietzel, A. (2021). Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil Integration. Sensors, 21(18), 6140. https://doi.org/10.3390/s21186140 ( reposiTUm)
Watanabe, H., Chang, T.-F. M., Schneider, M., Schmid, U., Chen, C.-Y., Iida, S., Yamane, D., Ito, H., Machida, K., Masu, K., & Sone, M. (2021). Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem, 2(2), 216–223. https://doi.org/10.3390/electrochem2020015 ( reposiTUm)
Hafner, J. A., Benaglia, S., Richheimer, F., Teuschel, M., Maier, F. J., Artner, W., Wood, S., Platz, D., Schneider, M., Hradil, K., Castro, F. A., Garcia, R., & Schmid, U. (2021). Multi-scale characterisation of a ferroelectric polymer reveals the emergence of a morphological phase transition driven by temperature. Nature Communications, 12(1), 1–9. https://doi.org/10.1038/s41467-020-20407-6 ( reposiTUm)
Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). High performance piezoelectric AlN MEMS resonators for precise sensing in liquids. Elektrotechnik Und Informationstechnik, 137(3), 121–127. https://doi.org/10.1007/s00502-020-00794-w ( reposiTUm)
Schneider, M., Dorfmeister, M., Moll, P., Kaltenbacher, M., & Schmid, U. (2020). Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Journal of Microelectromechanical Systems, 29(5), 948–953. https://doi.org/10.1109/jmems.2020.3004243 ( reposiTUm)
Pfusterschmied, G., Weinmann, C., Schneider, M., Platz, D., Shen, N., Sader, J., & Schmid, U. (2020). Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids. Journal of Micromechanics and Microengineering, 30(7), 075004. https://doi.org/10.1088/1361-6439/ab8bc9 ( reposiTUm)
Maier, F. J., Schneider, M., Schrattenholzer, J., Artner, W., Hradil, K., Artemenko, A., Kromka, A., & Schmid, U. (2020). Flexoelectricity in polycrystalline TiO2 thin films. Acta Materialia, 190, 124–129. https://doi.org/10.1016/j.actamat.2020.03.018 ( reposiTUm)
Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., & Schmid, U. (2020). Influence of the AlN/Pt-ratio on the electro-mechanical properties ofmultilayered AlN/Pt thin film strain gauges at high temperatures. Sensors and Actuators A: Physical, 302(111805), 111805. https://doi.org/10.1016/j.sna.2019.111805 ( reposiTUm)
Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren. GIT, 64. JAHRGANG(4–5), 36–38. http://hdl.handle.net/20.500.12708/141563 ( reposiTUm)
Patocka, F., Schneidhofer, C., Dörr, N., Schneider, M., & Schmid, U. (2020). Novel MEMS Sensor for the Detection of Particles with Dielectric Properties in Aged Lubricating Oils. Sensors and Actuators A: Physical, 315(112290), 112290. https://doi.org/10.1016/j.sna.2020.112290 ( reposiTUm)
Patocka, F., Schlögl, M., Schneidhofer, C., Dörr, N., Schneider, M., & Schmid, U. (2019). Piezoelectrically Excited MEMS Resonators with Integrated Planar Coil for the Detection of Ferrous Particles in Liquids. Sensors and Actuators B: Chemical, 299(126957), 126957. https://doi.org/10.1016/j.snb.2019.126957 ( reposiTUm)
Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., & Schmid, U. (2019). Electro-mechanical Properties of Multilayered Aluminum Nitride and Platinum Thin Films at High Temperatures. Sensors and Actuators A: Physical, 293, 128–135. https://doi.org/10.1016/j.sna.2019.04.036 ( reposiTUm)
Wachter, G., Kuhn, S., Minniberger, S., Salter, C., Asenbaum, P., Millen, J., Schneider, M., Schalko, J., Schmid, U., Felgner, A., Hüser, D., Arndt, M., & Trupke, M. (2019). Silicon microcavity arrays with open access and a finesse of half a million. Light: Science & Applications, 8(37). https://doi.org/10.1038/s41377-019-0145-y ( reposiTUm)
Hajian, A., Müftüoglu, D., Konegger, T., Schneider, M., & Schmid, U. (2019). On the porosification of LTCC substrates with sodium hydroxide. Composites Part B: Engineering, 157, 14–23. https://doi.org/10.1016/j.compositesb.2018.08.071 ( reposiTUm)
Triendl, F., Fleckl, G., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range. Journal of Vacuum Science & Technology B, 37(3), 032903. https://doi.org/10.1116/1.5094137 ( reposiTUm)
Dorfmeister, M., Schneider, M., & Schmid, U. (2019). 3D characterisation of piezoelectric bistable MEMS membranes during switching. Sensors and Actuators A: Physical, 298(111576), 111576. https://doi.org/10.1016/j.sna.2019.111576 ( reposiTUm)
Pfusterschmied, G., Patocka, F., Weinmann, C., Schneider, M., Platz, D., & Schmid, U. (2019). Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids. Sensors and Actuators A: Physical, 295, 84–92. https://doi.org/10.1016/j.sna.2019.05.031 ( reposiTUm)
Dorfmeister, M., Kössl, B., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab3185 ( reposiTUm)
Patocka, F., Schneider, M., Dörr, N., Schneidhofer, C., & Schmid, U. (2019). Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab062a ( reposiTUm)
Gablech, I., Svatoš, V., Caha, O., Dubroka, A., Pekárek, J., Klempa, J., Neužil, P., Schneider, M., & Šikola, T. (2019). Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup. Thin Solid Films, 670, 105–112. https://doi.org/10.1016/j.tsf.2018.12.035 ( reposiTUm)
Schneider, M., Stöber, L., Konrath, J. P., Patocka, F., & Schmid, U. (2019). Argon bombardment of 4H silicon carbide substrates for tailored Schottky diode barrier heights. Materials Science Forum, 963, 506–510. https://doi.org/10.4028/www.scientific.net/msf.963.506 ( reposiTUm)
Hafner, J. A., Teuschel, M., Schneider, M., & Schmid, U. (2019). Origin of the strong temperature effect on the piezoelectric response of the ferroelectric (co-)polymer P(VDF70-TrFE30). Polymer, 170, 1–6. https://doi.org/10.1016/j.polymer.2019.02.064 ( reposiTUm)
Hafner, J. A., Schrattenholzer, J., Teuschel, M., Schneider, M., Platz, D., & Schmid, U. (2019). Modelling the distribution of BaTiO3 nanoparticles in a P(VDF70-TrFE30) polymer matrix for permittivity calculation. Polymer, 180, Article 121682. https://doi.org/10.34726/1061 ( reposiTUm)
Hajian, A., Stöger-Pollach, M., Schneider, M., Müftüoglu, D., Crunwell, F. K., & Schmid, U. (2018). Porosification behaviour of LTCC substrates with potassium hydroxide. Journal of the European Ceramic Society, 38(5), 2369–2377. https://doi.org/10.1016/j.jeurceramsoc.2018.01.017 ( reposiTUm)
Fischeneder, M., Kucera, M., Hofbauer, F., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback. Sensors and Actuators B: Chemical, 260, 198–203. https://doi.org/10.1016/j.snb.2018.01.001 ( reposiTUm)
Iannacci, J., Serra, E., Sordo, G., Bonaldi, M., Borrielli, A., Schmid, U., Bittner, A., Schneider, M., Kuenzig, T., Schrag, G., Pandraud, G., & Sarro, P. M. (2018). MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing. Microsystem Technologies, 24(12), 5027–5036. https://doi.org/10.1007/s00542-018-3923-1 ( reposiTUm)
Dorfmeister, M., Schneider, M., & Schmid, U. (2018). Static and dynamic performance of bistable MEMS membranes. Sensors and Actuators A: Physical, 282, 259–268. https://doi.org/10.1016/j.sna.2018.09.038 ( reposiTUm)
Gillinger, M., Knobloch, T., Markovic, A., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications. Materials Science in Semiconductor Processing, 81, 1–6. https://doi.org/10.1016/j.mssp.2018.02.028 ( reposiTUm)
Leitgeb, M., Zellner, C., Lukschanderl, M., Schneider, M., & Schmid, U. (2018). A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H-Silicon Carbide. Journal of The Electrochemical Society, 165(9), E325–E329. https://doi.org/10.1149/2.0571809jes ( reposiTUm)
Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2018). Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Sensors, 18(11), 3842. https://doi.org/10.3390/s18113842 ( reposiTUm)
Gillinger, M., Shaposhnikov, K., Knobloch, T., Stöger-Pollach, M., Artner, W., Hradil, K., Schneider, M., Kaltenbacher, M., & Schmid, U. (2018). Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications. Applied Surface Science, 435, 432–437. https://doi.org/10.1016/j.apsusc.2017.11.113 ( reposiTUm)
Schmid, P., Zarfl, C., Triendl, F., Maier, F. J., Schwarz, S., Schneider, M., & Schmid, U. (2018). Impact of adhesion promoters and sputter parameters on theelectro-mechanical properties of Pt thin films at high temperatures. Sensors and Actuators A: Physical, 285, 149–157. https://doi.org/10.1016/j.sna.2018.11.010 ( reposiTUm)
Fischeneder, M., Bittner, A., Schneider, M., & Schmid, U. (2018). Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films. Materials Research Express. https://doi.org/10.1088/2053-1591/aac9db ( reposiTUm)
Wistrela, E., Schmied, I., Schneider, M., Gillinger, M., Mayrhofer, P. M., Bittner, A., & Schmid, U. (2018). Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1−x N thin films. Thin Solid Films, 648, 76–82. https://doi.org/10.1016/j.tsf.2018.01.003 ( reposiTUm)
Leitgeb, M. R., Zellner, C., Hufnagl, C., Schneider, M., Schwab, S., Hutter, H., & Schmid, U. (2017). Stacked Layers of Different Porosity in 4H SiC Substrates Applying a Photoelectrochemical Approach. Journal of The Electrochemical Society, 164(12), 337–347. https://doi.org/10.1149/2.1081712jes ( reposiTUm)
Pfusterschmied, G., Toledo, J., Kucera, M., Steindl, W., Zemann, S., Ruiz-Díez, V., Schneider, M., Bittner, A., Sanchez-Rojas, J., & Schmid, U. (2017). Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines, 8(7), 200. https://doi.org/10.3390/mi8070200 ( reposiTUm)
Fischeneder, M., Wistrela, E., Bittner, A., Schneider, M., & Schmid, U. (2017). Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures. Materials Science in Semiconductor Processing, 71, 283–289. https://doi.org/10.1016/j.mssp.2017.08.010 ( reposiTUm)
Udvardi, P., Radó, J., Straszner, A., Ferencz, J., Hajnal, Z., Soleimani, S., Schneider, M., Schmid, U., Révész, P., & Volk, J. (2017). Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems. Micromachines, 8(10), 311. https://doi.org/10.3390/mi8100311 ( reposiTUm)
Camarda, A., Sordo, G., Iannacci, J., Schneider, M., Schmid, U., Tartagni, M., & Romani, A. (2017). Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlN. Journal of Microelectromechanical Systems, 26(5), 1110–1121. https://doi.org/10.1109/jmems.2017.2709407 ( reposiTUm)
Wistrela, E., Bittner, A., Schneider, M., Reissner, M., & Schmid, U. (2017). Magnetic and Microstructural Properties of Sputter Deposited Cr-doped Aluminium Nitride Thin Films on Silicon Substrates. Journal of Applied Physics, 121(11), 115302. https://doi.org/10.1063/1.4978748 ( reposiTUm)
Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2017). Porous single crystalline 4H silicon carbide rugate mirrors. APL Materials, 5, 106106-1-106106–6. https://doi.org/10.1063/1.5001876 ( reposiTUm)
Kuhn, S., Wachter, G., Wieser, F.-F., Millen, J., Schneider, M., Schalko, J., Schmid, U., Trupke, M., & Arndt, M. (2017). Nanoparticle detection in an open-access silicon microcavity. Applied Physics Letters, 111(25), Article 253107. https://doi.org/10.1063/1.5008492 ( reposiTUm)
Leitgeb, M., Zellner, C., Schneider, M., Schwab, S., Hutter, H., & Schmid, U. (2017). Metal assisted photochemical etching of 4H silicon carbide. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/aa8942 ( reposiTUm)
Kim, S. H., Poli, F. M., Köchl, F., Militello-Asp, E., Polevoi, A. R., Budny, R., Casper, T., Loarte, A., Luce, T., Na, Y. S., Romanelli, M., Schneider, M., Snipes, J., & de Vries, P. C. (2017). Development of ITER non-activation phase operation scenarios. Nuclear Fusion, 57(8), 1–14. https://doi.org/10.1088/1741-4326/aa763e ( reposiTUm)
Gillinger, M., Shaposhnikov, K., Knobloch, T., Schneider, M., Kaltenbacher, M., & Schmid, U. (2016). Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire. Applied Physics Letters, 108(23), Article 231601. https://doi.org/10.1063/1.4953259 ( reposiTUm)
Stöber, L., Konrath, J. P., Haberl, V., Patocka, F., Schneider, M., & Schmid, U. (2016). Nitrogen incorporation in sputter deposited molybdenum nitride thin films. Journal of Vacuum Science and Technology A, 34(2), 021513. https://doi.org/10.1116/1.4941141 ( reposiTUm)
Stöber, L., Konrath, J. P., Patocka, F., Schneider, M., & Schmid, U. (2016). Controlling 4H-SiC Schottky Barriers by Molybdenum and Molybdenum Nitride as Contact Materials. IEEE Transactions on Electron Devices, 63(2), 578–583. https://doi.org/10.1109/ted.2015.2504604 ( reposiTUm)
Leitgeb, M., Backes, A., Schneider, M., Zellern, C., & Schmid, U. (2016). Communication — The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon Carbide. ECS Journal of Solid State Science and Technology. https://doi.org/10.1149/2.0021603jss ( reposiTUm)
Wistrela, E., Schneider, M., Bittner, A., & Schmid, U. (2016). Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric properties. Microsystem Technologies, 22(7), 1691–1700. https://doi.org/10.1007/s00542-015-2799-6 ( reposiTUm)
Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2016). Inductively-coupled plasma-enhanced chemical vapour deposition ofhydrogenated amorphous silicon carbide thin films for MEMS. Sensors and Actuators A: Physical, 247, 647–655. https://doi.org/10.1016/j.sna.2016.05.042 ( reposiTUm)
Frischmuth, T., Schneider, M., Bogdanović Radović, I., Siketić, Z., Maurer, D., Grille, T., & Schmid, U. (2016). Lowtemperature deposition of a-SiC:H thin films applying a dual plasma source process. Thin Solid Films, 616, 164–171. https://doi.org/10.1016/j.tsf.2016.07.030 ( reposiTUm)
Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2016). A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC Substrates. ECS Journal of Solid State Science and Technology, 5(10), P556–P564. https://doi.org/10.1149/2.0041610jss ( reposiTUm)
Pfusterschmied, G., Kucera, M., Steindl, W., Manzaneque, T., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids. Sensors and Actuators B: Chemical, 237, 999–1006. https://doi.org/10.1016/j.snb.2016.02.029 ( reposiTUm)
Dergez, D., Schneider, M., Bittner, A., Pawlak, N., & Schmid, U. (2016). Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films. Thin Solid Films, 606, 7–12. https://doi.org/10.1016/j.tsf.2016.03.029 ( reposiTUm)
Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2016). High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin films. Thin Solid Films, 611, 6–11. https://doi.org/10.1016/j.tsf.2016.05.001 ( reposiTUm)
Klauser, C., Bigault, T., Böni, P., Courtois, P., Devishvili, A., Rebrova, N., Schneider, M., & Soldner, T. (2016). Depolarization in polarizing supermirrors. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 840, 181–185. https://doi.org/10.1016/j.nima.2016.09.056 ( reposiTUm)
Stöber, L., Konrath, J. P., Krivec, S., Patocka, F., Schwarz, S., Bittner, A., Schneider, M., & Schmid, U. (2015). Impact of sputter deposition parameters on molybdenum nitride thin film properties. Journal of Micromechanics and Microengineering, 25(7), 074001. https://doi.org/10.1088/0960-1317/25/7/074001 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2015). Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 48(40), 405301. https://doi.org/10.1088/0022-3727/48/40/405301 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2015). Impact of film thickness on the temperature-activated leakagecurrent behavior of sputtered aluminum nitride thin films. SENSORS AND ACTUATORS A-PHYSICAL, 224, 177–184. https://doi.org/10.1016/j.sna.2015.01.032 ( reposiTUm)
Gillinger, M., Schneider, M., Bittner, A., Nicolay, P., & Schmid, U. (2015). Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films. Journal of Applied Physics, 117(6), 065303. https://doi.org/10.1063/1.4907208 ( reposiTUm)
Dergez, D., Schneider, M., Bittner, A., & Schmid, U. (2015). Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films. Thin Solid Films, 589, 227–232. https://doi.org/10.1016/j.tsf.2015.05.028 ( reposiTUm)
Schneider, M., Bittner, A., Klein, A., & Schmid, U. (2015). Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin films. Microelectronic Engineering, 140, 47–51. https://doi.org/10.1016/j.mee.2015.06.001 ( reposiTUm)
Beigelbeck, R., Schneider, M., Schalko, J., Bittner, A., & Schmid, U. (2014). A two-step load-deflection procedure applicable to extract the Young’s modulus and the residual tensile stress of circularly shaped thin-film diaphragms. Journal of Applied Physics, 116(114905), 11490501–11490513. http://hdl.handle.net/20.500.12708/157233 ( reposiTUm)
Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. Optics Express, 22(18), 2212001–2212010. http://hdl.handle.net/20.500.12708/157232 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2014). Thickness dependence of Young’s modulus and residual stress of sputtered aluminum nitride thin films. Applied Physics Letters, 105(20), 201912. https://doi.org/10.1063/1.4902448 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2014). Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approach. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 751–757. https://doi.org/10.1007/s00542-013-2027-1 ( reposiTUm)
Lugstein, A., Mijić, M., Burchhart, T., Zeiner, C., Langegger, R., Schneider, M., Schmid, U., & Bertagnolli, E. (2013). In situ monitoring of Joule heating effects in germanium nanowires by -Raman spectroscopy. Nanotechnology, 24(6), 065701. https://doi.org/10.1088/0957-4484/24/6/065701 ( reposiTUm)
Litaudon, X., Voitsekhovitch, I., Artaud, J. F., Belo, P., Bizarro, J. P. S., Casper, T., Citrin, J., Fable, E., Ferreira, J., Garcia, J., Garzotti, L., Giruzzi, G., Hobirk, J., Hogeweij, G. M. D., Imbeaux, F., Joffrin, E., Köchl, F., Liu, F., Lönnroth, J., … Snyder, P. B. (2013). Modelling of hybrid scenario: from present-day experiments towards ITER. Nuclear Fusion, 53(7), 073024. https://doi.org/10.1088/0029-5515/53/7/073024 ( reposiTUm)
Schneider, M., Strunz, T., Bittner, A., & Schmid, U. (2012). Impact of Sputter Deposition Parameters on the Leakage Current Behavior of Aluminum Nitride Thin Films. Advances in Science and Technology. https://doi.org/10.4028/www.scientific.net/ast.77.29 ( reposiTUm)
Schneider, M., Bittner, A., Patocka, F., Stöger-Pollach, M., Halwax, E., & Schmid, U. (2012). Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AIN thin films. Applied Physics Letters, 101(22), 221602. https://doi.org/10.1063/1.4768951 ( reposiTUm)
Dow, A. B. A., Lin, H., Schneider, M., Petkov, C., Bittner, A., Ahmed, A., Popov, C., Schmid, U., & Kherani, N. P. (2012). Ultrananocrystalline Diamond-Based High-Velocity SAW Device Fabricated by Electron Beam Lithography. IEEE Transactions on Nanotechnology, 11(5), 979–984. https://doi.org/10.1109/tnano.2012.2210731 ( reposiTUm)
Alamin Dow, A. B., Schneider, M., Koo, D., Al-Rubaye, H. A., Bittner, A., Schmid, U., & Kherani, N. (2012). Modeling the performance of a micromachined piezoelectric energy harvester. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 1035–1043. https://doi.org/10.1007/s00542-012-1436-x ( reposiTUm)
Citrin, J., Hobirk, J., Schneider, M., Artaud, J. F., Bourdelle, C., Crombe, K., Hogeweij, G. M. D., Imbeaux, F., Joffrin, E., Köchl, F., & Stober, J. (2012). Predictive analysis of 𝑞-profile influence on transport in JET and ASDEX Upgrade hybrid scenarios. Plasma Physics and Controlled Fusion, 54(6), 065008. https://doi.org/10.1088/0741-3335/54/6/065008 ( reposiTUm)
Deutschinger, A., Schmid, U., Schneider, M., Brenner, W., Wanzenböck, H., Volland, B., Ivanov, Tzv., & Rangelow, I. W. (2010). Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 16(11), 1901–1908. https://doi.org/10.1007/s00542-010-1110-0 ( reposiTUm)

Beiträge in Tagungsbänden

Schneider, M., Mortada, M., Mayrhofer, D., Kaltenbacher, M., & Schmid, U. (2024). Directivity and distance dependence of generated pressure field of bistable PMUTs. In Abstract Book Eurosensors XXXVI (pp. 307–308). https://doi.org/10.5162/EUROSENSORSXXXVI/PT4.193 ( reposiTUm)
Schneider, M., & Schmid, U. (2024). How bandwidth and sample points affect precision of Q-factor  measurements in PiezoMEMS resonators. In S. Schmid (Ed.), 19th International Workshop on Nanomechanical Sensing (pp. 112–112). ( reposiTUm)
Zarepakzad, S., Esfahani, M. N., Tasdemir, Dr. Z., Schneider, M., Schmid, U., Leblebici, Y., & Alaca, B. E. (2024). Transverse Vibration of Silicon Nanowires: Surface Properties. In S. Schmid (Ed.), 19th International Workshop on  Nanomechanical Sensing (pp. 109–109). http://hdl.handle.net/20.500.12708/210182 ( reposiTUm)
Schneider, M., & Schmid, U. (2023). Impact of bandwidth and number of measurement points on Q-factor measurement precision in piezoelectric MEMS resonators. In MikroSystemTechnik Kongress 2023 (pp. 681–685). VDE Verlag. ( reposiTUm)
Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2023). Continuous Monitoring of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Sensors. In Tagungsband MikroSystemTechnik Kongress 2023 (pp. 810–813). VDE Verlag. ( reposiTUm)
Platz, D., Fabian, J., Samm, E., Mortada, M., Schneider, M., & Schmid, U. (2023). Exploiting Parametric Instability in Bistable MEMS Actuators. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 530–533). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052469 ( reposiTUm)
Schneider, M., Kößl, B., Alasatri, S., Magnet, I. A. M., & Schmid, U. (2023). Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems Resonators. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 471–474). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052396 ( reposiTUm)
Schneider, M., Santasusagna, J., Magnet, I. A. M., & Schmid, U. (2022). Ex vivo Blood Viscosity Monitoring with Piezoelectric MEMS Resonators. In 2022 IEEE Sensors (pp. 1–4). IEEE. https://doi.org/10.1109/SENSORS52175.2022.9967277 ( reposiTUm)
Moll, P., Pfusterschmied, G., Schneide, M., Dorfmeister, M., & Schmid, U. (2021). Piezoelectric Switching of Bistable MEMS Membranes in Fluids. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), online, Unknown. IEEE. https://doi.org/10.1109/mems51782.2021.9375163 ( reposiTUm)
Hafner, J., Benaglia, S., Teuschel, M., Platz, D., Schneider, M., Garcia, R., & Schmid, U. (2020). Multi-scale characterisation of a semi-crystalline polymer reveals hidden ferroelectricity above the Curie transiton. In 8th Multifrequency AFM conference, Book of Abstracts (p. 107). http://hdl.handle.net/20.500.12708/77284 ( reposiTUm)
Hafner, J., Canena, D., Platz, D., Schneider, M., Hinterdorfer, P., & Schmid, U. (2020). Scanning Probes with High Resonance Frequency and Low Stiffness for High-speed AFM Applications in Liquid Environments. In 8th Multifrequency AFM conference, Book of Abstracts (p. 28). http://hdl.handle.net/20.500.12708/77285 ( reposiTUm)
Patocka, F., Schlögl, M., Schneider, M., Schneidhofer, C., Dörr, N., & Schmid, U. (2019). MEMS Sensor for Monitoring the Degradation of Lubricating Oils. In 7th European Conference on Tribology (Ecotrib 2019) - Book of Abstracts (pp. 138–139). http://hdl.handle.net/20.500.12708/77033 ( reposiTUm)
Schmid, U., & Schneider, M. (2019). Aluminium Nitride based Piezoelectric MEMS: From Material Aspects to Low Power Devices. In 46th International Conference on Metallurgical Coatings and Thin Films (p. 1). http://hdl.handle.net/20.500.12708/77018 ( reposiTUm)
Schmid, U., & Schneider, M. (2019). Advanced Aluminium Nitride Thin Films for Piezoelectric MEMS. In Surfcoat Korea 2019 - Book of Abstracts (p. 31). http://hdl.handle.net/20.500.12708/77020 ( reposiTUm)
Schneider, M., Weißenbach, J., & Schmid, U. (2019). Einfluss von Substrattemperatur und Bias-Spannung auf die Eigenschaften von gesputterten AlN Dünnfilmen für BAWs. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 60–63). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76945 ( reposiTUm)
Pfusterschmied, G., Weinmann, C., Schneider, M., Hospodka, M., Mirwald, J., Hofko, B., & Schmid, U. (2019). Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2019 - Proceedings (pp. 320–323). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76947 ( reposiTUm)
Pfusterschmied, G., Weinmann, C., Hospodka, M., Hofko, B., Schneider, M., & Schmid, U. (2019). Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (the Republic of). IEEE. https://doi.org/10.1109/memsys.2019.8870897 ( reposiTUm)
Dorfmeister, M., Schneider, M., & Schmid, U. (2019). A Bistable Ultrasonic Mems Device With An Integrated Piezoelectric Scandium-Aln Thin Film Actuator For Switching. In 20th International Conference on Solid State Sensors and Actuators (Transducers 19) (pp. 853–856). IEEE. http://hdl.handle.net/20.500.12708/76944 ( reposiTUm)
Schmid, U., & Schneider, M. (2019). High Performance Piezoelectric AlN MEMS Resonators for Liquid Sensing and Beyond - The Potential of PiezoMEMS. In 20th International Conference on Solid State Sensors and Actuators (Transducers 19) (pp. 653–654). IEEE. http://hdl.handle.net/20.500.12708/76943 ( reposiTUm)
Leitgeb, M., Zellner, C., Dorfmeister, M., Schneider, M., & Schmid, U. (2018). Buckling Porous SiC Membranes. In Proceedings - Eurosensors 2018, Graz (pp. 1–4). MDPI. http://hdl.handle.net/20.500.12708/76503 ( reposiTUm)
Patocka, F., Schneider, M., Schneidhofer, C., Dörr, N., & Schmid, U. (2018). Novel MEMS Sensor for Real-time Lubricant Condition Monitoring. In ÖTG-Symposium 2018 (pp. 115–122). ÖTG. http://hdl.handle.net/20.500.12708/76495 ( reposiTUm)
Dorfmeister, M., Kössl, B., Schneider, M., & Schmid, U. (2018). A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130912 ( reposiTUm)
Hafner, J., Teuschel, M., Schrattenholzer, J., Schneider, M., & Schmid, U. (2018). Optimized Batch Process for Organic MEMS Devices. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130904 ( reposiTUm)
Patocka, F., Schlögl, M., Schneider, M., & Schmid, U. (2018). Novel MEMS Sensor for Detecting Magnetic Particles in Liquids. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130868 ( reposiTUm)
Hajian, A., Müftüoglu, D., Schneider, M., & Schmid, U. (2018). Investigating the Effect of Etching Parameters on the Porosification of LTCC with Sodium Hydroxide. In Electroceramics XVI (p. 174). http://hdl.handle.net/20.500.12708/76505 ( reposiTUm)
Schneider, M., & Schmid, U. (2018). Piezoelectric MEMS Devices: from Material Aspects to Low-Power Applications. In Nano Research & Applications (pp. 41–42). Scitechnol Biosoft Pvt. Ltd. http://hdl.handle.net/20.500.12708/76533 ( reposiTUm)
Schneider, M., & Schmid, U. (2018). Substrate Temperature and Bias Voltage Dependent Properties of Sputtered AlN Thin Films for BAW Applications. In 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). The 18th IEEE International Conferene on Nanotechnology (ieee nano 2018), Cork, Ireland. IEEE. https://doi.org/10.1109/nano.2018.8626332 ( reposiTUm)
Schmid, U., & Schneider, M. (2018). Piezoelectric MEMS: Materials, Devices and Applications. In 16th International Conference on Plasma Surface Engineering (PSE 2018) (p. 1). http://hdl.handle.net/20.500.12708/76532 ( reposiTUm)
Hajian, A., Stöger-Pollach, M., Schneider, M., Homolka, H., Müftüoglu, D., & Schmid, U. (2018). Effect of sintering temperature on porosification behavior of fired LTCC substrates. In Abstract Book (p. 144). http://hdl.handle.net/20.500.12708/76506 ( reposiTUm)
Pfusterschmied, G., Kucera, M., Steindl, W., Bittner, A., Schneider, M., & Schmid, U. (2017). Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 183–186). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/75974 ( reposiTUm)
Schmid, U., & Schneider, M. (2017). Piezoelectric Microsystems: Material Aspects, Devices and Applications. In Selected Papers from the 4th International Electronic Conference on Sensors and Applications. 4th International Electronic Conference on Sensors and Applications (ECSA 2017), Online, Unknown. MDPI. https://doi.org/10.3390/ecsa-4-04934 ( reposiTUm)
Dorfmeister, M., Pfister, R., Schneider, M., & Schmid, U. (2017). Analytische Modellierung von kreisförmigen, bistabilen Membranen mit unterschiedlichen, geometrischen Abmessungen. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 727–730). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/75964 ( reposiTUm)
Gillinger, M., Knobloch, T., Schneider, M., & Schmid, U. (2017). Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040341 ( reposiTUm)
Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2017). Porous Silicon Carbide for MEMS. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040297 ( reposiTUm)
Camarda, A., Tartagni, M., Sordo, G., Iannacci, J., Schneider, M., Schmid, U., & Romani, A. (2017). Smoothing The Way Towards Miniaturized MEMS AlN-based Piezoelectric Transformers. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE. http://hdl.handle.net/20.500.12708/76039 ( reposiTUm)
Schneider, M., DeMiguel-Ramos, M., Flewitt, A. J., Iborra, E., & Schmid, U. (2017). Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040305 ( reposiTUm)
Toledo, J., Ruiz-Díez, V., Sànchez-Rojas, J. L., Pfusterschmied, G., Schneider, M., & Schmid, U. (2017). Wine Fermentation Sensor Based on Piezoelectric Resonators. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE. http://hdl.handle.net/20.500.12708/76040 ( reposiTUm)
Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2017). Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040380 ( reposiTUm)
Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2017). FT-IR analysis of high temperature annealing effects in a-SiC:H thin films. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 6). SPIE. http://hdl.handle.net/20.500.12708/76045 ( reposiTUm)
Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2017). Aktive Q-Faktor Regelung von piezoelektrischen MEMS Cantilevern für High Speed AFM Anwendungen in Vakuum. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 112–115). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76021 ( reposiTUm)
Toth, F., Dorfmeister, M., Schneider, M., Schmid, U., & Kaltenbacher, M. (2017). Non-linear analysis of a pre-stressed piezoelectric multi-layer plate. In VIII ECCOMAS Thematic Conference on Smart Structures and Materials SMART2017 (pp. 1307–1315). http://hdl.handle.net/20.500.12708/67635 ( reposiTUm)
Pfusterschmied, G., Kucera, M., Weinmann, C., Schneider, M., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2017). Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties. In IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017 (pp. 1013–1016). IEEE. http://hdl.handle.net/20.500.12708/76019 ( reposiTUm)
Mayrhofer, P., Rehlendt, C., Bittner, A., Schneider, M., & Schmid, U. (2016). Scandium Aluminium Nitride for MEMS Applications. In nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems. nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz, Austria. http://hdl.handle.net/20.500.12708/75196 ( reposiTUm)
Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2016). Metal assisted Chemical Etching of Monocystalline Silicon Carbide. In nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems. nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz, Austria. http://hdl.handle.net/20.500.12708/75487 ( reposiTUm)
Klein, A., Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2016). Einfluss der Schichtdicke auf das mechanische Verhalten und die Bruchstabilität von a-SiC:H Membranen. In OVE Schriftenreihe (p. 20). Schriftenreihe OVE. http://hdl.handle.net/20.500.12708/75489 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2016). Improved Piezoelectric Coefficients in Ultra-thin Aluminum Nitride Thin Films. In The 3rd International Conference on Nanogenerators and Piezotronics (NGPT 2016) (p. 39). UniversItalia Roma. http://hdl.handle.net/20.500.12708/75488 ( reposiTUm)
Pfusterschmied, G., Kucera, M., Toledo, J., Steindl, W., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators. In Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016) (p. 2). IEEE. http://hdl.handle.net/20.500.12708/75481 ( reposiTUm)
Mayrhofer, P. M., Wistrela, E., Schneider, M., Bittner, A., & Schmid, U. (2016). Precise Determination of d 33 and d 31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to Sc x Al 1-x N. In Procedia Engineering (pp. 876–879). Procedia Engineering / Elsevier. https://doi.org/10.1016/j.proeng.2016.11.295 ( reposiTUm)
Jandak, M., Neuzil, T., Schneider, M., & Schmid, U. (2016). Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators. In Procedia Engineering (pp. 929–932). Procedia Engineering / Elsevier. https://doi.org/10.1016/j.proeng.2016.11.308 ( reposiTUm)
Frischmuth, T., Klein, A., Schneider, M., Grille, T., & Schmid, U. (2016). Fracture analysis of a-SiC:H membranes after thermal annealing. In Proceedings of the Eurosensors 2016 (pp. 1164–1167). Procedia Engineering / Elsevier. http://hdl.handle.net/20.500.12708/75485 ( reposiTUm)
Iannacci, J., Sordo, G., Schneider, M., Schmid, U., Camarda, A., & Romani, A. (2016). A Novel Toggle-Type MEMS Vibration Energy Harvester for Internet of Things Applications. In Proceedings of the IEEE Sensors 2016 (p. 3). IEEE. http://hdl.handle.net/20.500.12708/75542 ( reposiTUm)
Gillinger, M., Schneider, M., Bittner, A., Nicolay, P., & Schmid, U. (2015). High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films. In Proc. of SPIE Vol. 9517-9520 (p. 8). SPIE. http://hdl.handle.net/20.500.12708/74985 ( reposiTUm)
Sordo, G., Iannacci, J., Serra, E., Bonaldi, M., Borrielli, A. L., Schneider, M., & Schmid, U. (2015). Study on the performance of tailored spring elements for piezoelectric MEMS energy harvesters. In 2015 XVIII AISEM Annual Conference. 2015 XVIII AISEM Annual Conference, Trento, Italy. IEEE. http://hdl.handle.net/20.500.12708/74968 ( reposiTUm)
Stöber, L., Schneider, M., & Schmid, U. (2015). Impact of Contact Material Deposition Technique on the Properties of Ti/4H-SiC Schottky Structures. In ICSCRM 2015 - 16th International Conference on Silicon Carbide and Related Materials (pp. 569–572). http://hdl.handle.net/20.500.12708/74924 ( reposiTUm)
Frischmuth, T., Maurer, D., Schneider, M., Grille, T., & Schmid, U. (2015). IMPACT OF SUBSTRATE TEMPERATURE AND INDUCTIVELY COUPLED PLASMA POWER ON a-SiC:H THIN FILM PROPERTIES. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spain. http://hdl.handle.net/20.500.12708/74920 ( reposiTUm)
Stöber, L., Konrath, J. P., Haberl, V., Schneider, M., & Schmid, U. (2015). High Temperature Behaviour of Sputter Deposited Molybdenum Nitride Thin Films. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spain. http://hdl.handle.net/20.500.12708/74919 ( reposiTUm)
Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2015). Impact of thermal treatment on the residual stress and Young’s modulus of thin a-SiC:H membranes applying bulge testing. In Proceedings of Eurosensors XXIX (pp. 752–755). Procedia Engineering. http://hdl.handle.net/20.500.12708/74926 ( reposiTUm)
Beigelbeck, R., Stifter, M., Schneider, M., Keplinger, F., Schmid, U., Voglhuber-Brunnmaier, T., & Jakoby, B. (2014). Rigorous Analytical Analysis of Resonant Euler-Bernoulli Beams with Constant Thickness and Polynomial Width. In 2014 IEEE Ultrasonics Symposium Proceedings (pp. 2095–2099). IEEE. http://hdl.handle.net/20.500.12708/74311 ( reposiTUm)
Stöber, L., Konrath, J. P., Schneider, M., & Schmid, U. (2014). Usability of Molybdenum and Molybdenum Nitride Thin Films for Microsystem Applications. In MME 2014 - 25th Micromechanics and Microsystems Europe workshop (pp. 1–4). http://hdl.handle.net/20.500.12708/74310 ( reposiTUm)
Beigelbeck, R., Schneider, M., Stifter, M., Voglhuber-Brunnmaier, T., Jakoby, B., Schmid, U., & Keplinger, F. (2014). Novel exact closed-form solutions for the resonant frequencies and mode-shapes of Euler-Bernoulli beams with constant thickness and polynomial width. In Tagungsband - 64. Jahrestagung der ÖPG. 64. Jahrestagung der Österreichischen Physikalischen Gesellschaft, Pöllau, Steiermark, Austria. http://hdl.handle.net/20.500.12708/74447 ( reposiTUm)
Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2014). Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films. In Procedia Engineering (pp. 128–131). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.543 ( reposiTUm)
Schneider, M., Bittner, A., Schmid, P., & Schmid, U. (2014). Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers. In Procedia Engineering (pp. 1493–1496). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.581 ( reposiTUm)
Iannacci, J., Serra, E., Sordo, G., Bonaldi, M., Borielli, A., Schmid, U., Bittner, A., Schneider, M., Kuenzig, T., Schrag, G., Pandraud, G., & Sarro, P. M. (2014). MEMS Based Multi Modal Vibration Energy Harvesters for Ultra Low Power Autonomous Remote and Distributed Sensing. In Proceedings of the 14th Mechatronics Forum International Conference (pp. 1–8). http://hdl.handle.net/20.500.12708/74314 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2013). Investigation on the Dielectric Behavior of Aluminum Nitride Thin Films at Different Temperatures Applying a Time-zero Approach. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73711 ( reposiTUm)
Schneider, M., Bittner, A., Schmid, U., Beigelbeck, R., Schalko, J., & Stifter, M. (2012). Experimentelle Verifikation eines verbesserten Bulge-Test Modells zur elastomechanischen Charakterisierung von runden Aluminiumnitrid- und Siliziumnitridmembranen. In ME Tagung 2012 (pp. 56–60). Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik. http://hdl.handle.net/20.500.12708/73344 ( reposiTUm)
Voitsekhovitch, I., Litaudon, X., Barbato, E., Basiuk, V., Belo, P., Bizarro, J. P. S., Casper, T., Citrin, J., Fable, E., Ferreira, J., Garcia, J., Garzotti, L., Hobirk, J., Hogeweij, G. M. D., Ivanova-Stanik, I., Joffrin, E., Kalupin, D., Köchl, F., Liu, F., … Snyder, P. B. (2012). Integrated modelling for tokamak plasma: physics and scenario optimisation. In Proceedings fo the 39th EPS Conference on Plasma Physics. European Physical Society (EPS). http://hdl.handle.net/20.500.12708/44721 ( reposiTUm)
Alamin Dow, A. B., Al-Rubaye, H., Koo, D., Schneider, M., Bittner, A., Schmid, U., & Kherani, N. P. (2011). Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.885861 ( reposiTUm)
Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–8). https://doi.org/10.1117/12.886824 ( reposiTUm)
Citrin, J., Hobirk, J., Schneider, M., Artaud, J. F., Bourdelle, C., Crombe, K., Hogeweij, G. M. D., Imbeaux, F., Joffrin, E., Köchl, F., Stober, J. K., AUG team, JET EFDA (2011), & the ITEM-TF ITER S. M. Group 2011. (2011). Predictive transport analysis of JET and AUG hybrid scenarios. In Proceedings of the 38th Conference on Plasma Physics. European Physical Society. http://hdl.handle.net/20.500.12708/44639 ( reposiTUm)
Schneider, M., & Schneider, U. (2010). Calculations of temperature development on concrete members during tunnel fires by CFD modelling. In Advances and Trends in Structural Engineering, Mechanics and Computation (p. 185). CRC Press/Balkema. http://hdl.handle.net/20.500.12708/60285 ( reposiTUm)
Schneider, U., & Schneider, M. (2010). Calculations of restraint axial forces of conrete cylinders under transient temperature conditions. In Advances and Trends in Structural Engineering, Mechanics and Computation (p. 173). CRC Press/Balkema. http://hdl.handle.net/20.500.12708/60286 ( reposiTUm)

Beiträge in Büchern

Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2018). Active Q-factor Control of Piezoelectric MEMS Cantilevers for High Speed AFM Applications in Vacuum. In Microsystems Technology in Germany 2018 / Mikrosystemtechnik in Deutschland 2018 (pp. 36–37). trias Consult. http://hdl.handle.net/20.500.12708/29940 ( reposiTUm)
Schneider, M., Bittner, A., Kucera, M., & Schmid, U. (2016). Piezoelektrische MEMS Sensoren zur Viskositäts- und Dichtebestimmung von technischen Flüssigkeiten. In Tille Thomas (Ed.), Automobil-Sensorik (pp. 353–372). Springer-Verlag, Berlin-Heidelberg. https://doi.org/10.1007/978-3-662-48944-4_17 ( reposiTUm)

Bücher

Schmid, U., & Schneider, M. (Eds.). (2018). Piezoelectric MEMS. MDPI. http://hdl.handle.net/20.500.12708/24537 ( reposiTUm)
Schneider, M., & Schneider, U. (Eds.). (2011). An Advanced Transient Concrete Model for the Determination of Restraint in Concrete Structures Subjected to Fire and the Fire Resistance of Concrete Tunnel Sections, Heft 18. Institut für Hochbau und Technologie, Zentrum für Baustoffforschung, Werkstofftechnik und Brandschutz, TU Wien. http://hdl.handle.net/20.500.12708/23293 ( reposiTUm)

Präsentationen

Schneider, M., & Schmid, U. (2024, June 7). Material Aspects and Unconventional Device Concepts for PiezoMEMS [Keynote Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208519 ( reposiTUm)
Mortada, M., Schmid, U., & Schneider, M. (2024, September). K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and Vacuum [Conference Presentation]. MNE2024 - 50 th InternatIonal Micro and Nano EngIneerIng Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208611 ( reposiTUm)
Muringakodan, S., Schmid, U., & Schneider, M. (2024, September). STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES [Conference Presentation]. MNE 2024 - 50th International conference on Micro and Nano Engineering, Montpellier, France. http://hdl.handle.net/20.500.12708/208774 ( reposiTUm)
Rahnemaihaghighi, N., Schmid, U., & Schneider, M. (2024, September). LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMS [Conference Presentation]. MNE 2024 - 50th InternatIonal Micro and Nano EngIneerIng Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208773 ( reposiTUm)
Keerthi, K., Schmid, U., & Schneider, M. (2024, September). IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM [Conference Presentation]. MNE 2024 - 50th International Micro and Nano Engineering Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208778 ( reposiTUm)
Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2023, September 13). Real-time tracking of the dynamic viscosity of  bitumen with piezoelectric MEMS resonators [Conference Presentation]. Eurosensors XXXIV, Lecce, Italy. ( reposiTUm)
Schmid, U., Schneider, M., Leitgeb, M., & Pfusterschmied, G. (2022). SiC Process Technologies for MEMS [Conference Presentation]. MNE 2022 - Eurosensors, Leuven, Belgium. ( reposiTUm)
Hofko, B., Grothe, H., Schmid, U., Alasatri, S., Hofer, K., Koyun, A. N., Mirwald, J., Schneider, M., & Werkovits, S. (2022, June 8). Christian Doppler Labor für Chemo-Mechanische Analyse von bituminösen Stoffen [Presentation]. 2 Jahres Evaluierungsevent des Christian Doppler Labors für Chemo-Mechanische Analyse von bituminösen Stoffen, Wien, Austria. ( reposiTUm)
Schmid, U., Hafner, J., Pfusterschmied, G., Platz, D., & Schneider, M. (2020). High Performance Piezoelectric MEMS Resonators in Fluids. XXII. Linz Winter Workshop 2020, Linz, Austria. http://hdl.handle.net/20.500.12708/91321 ( reposiTUm)
Schneider, M., Mayrhofer, P., Gillinger, M., Pfusterschmied, G., & Schmid, U. (2017). Piezoelectric MEMS: Material Aspects and Devices. AMA Conferences 2017 - SENSOR 2017 and IRS2 201, Nürnberg, Germany. http://hdl.handle.net/20.500.12708/90848 ( reposiTUm)
Toth, F., Dorfmeister, M., Schmid, U., Kaltenbacher, M., & Schneider, M. (2017). Non-Linear Dynamics of a Circular Piezoelectric Multi-Layer Plate. 13th International Workshop on Direct and Inverse Problems in Piezoelectricity, Kassel, Germany. http://hdl.handle.net/20.500.12708/94666 ( reposiTUm)
Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2017). High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing of Liquid Properties. Internatinal Conference on Small Science (ICSS), San Sebastian, Spain. http://hdl.handle.net/20.500.12708/91003 ( reposiTUm)
Kim, S. H., Poli, F. M., Köchl, F., Militello-Asp, E., Polevoi, A. R., Budny, R., Casper, T., Loarte, A., Luce, T., Na, Y. S., Romanelli, M., Schneider, M., Snipes, J., de Vries, P. C., & the ITPA Topical Group (2016). (2016). Development of ITER Non-Activation Phase Operation Scenarios. 26th IAEA Fusion Energy Conference (2016), Kyoto, Japan. http://hdl.handle.net/20.500.12708/133116 ( reposiTUm)
Schneider, M., Bittner, A., & Schmid, U. (2014). Characterization of the Mechanical and Piezoelectric Properties of Aluminium Nitride Thin Films at Varying Film Thickness. Piezoworkshop 2014, Wien, Austria. http://hdl.handle.net/20.500.12708/90415 ( reposiTUm)
Derntl, C., Schalko, J., Schneider, M., Bittner, A., Schmid, U., Schmiedmayer, H.-J., & Trupke, M. (2013). Arrays of open, independently tunable microcavities for quantum emitters. Artificial Atoms: From Quantum Physics to Applications, Budapest, Hungary, EU. http://hdl.handle.net/20.500.12708/130479 ( reposiTUm)
Litaudon, X., Voitsekhovitch, I., Artaud, J. F., Belo, P., Bizarro, J. P. S., Casper, T., Citrin, J., Fable, E., Ferreira, J., Garcia, J., Garzotti, L., Giruzzi, G., Hobirk, J., Hogeweij, G. M. D., Imbeaux, F., Joffrin, E., Köchl, F., Liu, F., Lonnroth, J., … Snyder, P. B. (2013). Modelling of Hybrid Scenario: from Present-Day Experiments toward ITER. Seminar, Ecole Centrale Paris, EU. http://hdl.handle.net/20.500.12708/130883 ( reposiTUm)
Voitsekhovitch, I., Garcia, J., Artaud, J. F., Baiocchi, B., Baranov, Y., Barbato, E., Basiuk, V., Belo, P., Bizarro, J. P. S., Bolzonella, T., Citrin, J., van Dongen, J., Fable, E., Felici, F., Ferreira, J., Figueiredo, A., Garzotti, L., Hogeweij, G. M. D., Huynh, P., … Urban, J. (2013). Integrated Scenario Modelling - ITER Scenario Modelling activities 2012-2013. CCFE Physics Meeting 2013, Culham, UK, EU. http://hdl.handle.net/20.500.12708/130911 ( reposiTUm)
Litaudon, X., Voitsekhovitch, I., Artaud, J. F., Belo, P., Bizarro, J. P. S., Casper, T., Citrin, J., Fable, E., Ferreira, J., Garcia, J., Garzotti, L., Giruzzi, G., Hobrik, J., Hogewij, D., Imbeaux, F., Joffrin, E., Köchl, F., Lönnroth, J., Liu, F., … Schneider, M. (2012). Modelling of Hybrid Scenario: from present-day experiments toward ITER. 24th IAEA Fusion Energy Conference, San Diego, USA, Non-EU. http://hdl.handle.net/20.500.12708/130155 ( reposiTUm)
Alamin Dow, A. B., Al-Rubaye, H., Koo, D., Schneider, M., Bittner, A., Schmid, U., & Kherani, N. P. (2011). Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89757 ( reposiTUm)
Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89763 ( reposiTUm)
Citrin, J., Hobirk, J., Schneider, M., Artaud, J. F., Bourdelle, C., Crombe, K., Hogeweij, G. M. D., Imbeaux, F., Joffrin, E., Köchl, F., AUG team, JET EFDA (2011), & the ITEM-TF ITER S. M. Group 2011. (2011). Predictive transport analysis of JET and AUG hybrid scenarios - Motivation and analysis steps. 11th EU ITM-TF ITER Scenario Modelling Workshop, Utrecht, Netherlands, EU. http://hdl.handle.net/20.500.12708/129463 ( reposiTUm)
Schneider, U., & Schneider, M. (2010). Calculation of restraint axial forces of concrete cylinders under transient temperature conditions. The Fourth International Conference on Structural Engineering, Mechanics and Computation, Kapstadt, Südafrika, Non-EU. http://hdl.handle.net/20.500.12708/111770 ( reposiTUm)

Berichte

Alasatri, S., Grothe, H., Gruber, M. R., Hofko, B., Mirwald, J., Primerano, K., Schmid, U., Schneider, M., Stüwe, S., & Werkovits, S. (2024). Chemo-mechanische Toolbox. https://doi.org/10.48436/ckn4z-mn226 ( reposiTUm)
Alasatri, S., Grothe, H., Gruber, M. R., Hofko, B., Mirwald, J., Primerano, K., Schmid, U., Schneider, M., Stüwe, S., & Werkovits, S. (2024). Chemo-mechanical Toolbox. https://doi.org/10.48436/bp12g-8vp13 ( reposiTUm)
Hofko, B., Grothe, H., Schmid, U., Alasatri, S., Hofer, K., Koyun, A. N., Mirwald, J., Schneider, M., & Werkovits, S. (2022). Christian Doppler Laboratory for Chemo-Mechanical Analysis of Bitminous Materials. http://hdl.handle.net/20.500.12708/153714 ( reposiTUm)

Preprints

Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. arXiv. http://hdl.handle.net/20.500.12708/156447 ( reposiTUm)

Hochschulschriften

Schneider, M. (2014). Einfluss der Schichtdicke und der Substratvorbehandlung auf die elektro-mechanischen Eigenschaften von gesputterten Aluminiumnitrid-Dünnfilmen [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/158599 ( reposiTUm)