Fait, J., Putz, S., Wachter, G., Schalko, J., Schmid, U., Arndt, M., & Trupke, M. (2021). High Finesse Microcavities in the Optical Telecom O-band. Applied Physics Letters, 119(22), 221112. https://doi.org/10.1063/5.0066620 ( reposiTUm)

Kahr, M., Stifter, M., Steiner, H., Hortschitz, W., Kovács, G., Kainz, A., Schalko, J., & Keplinger, F. (2019). Dual Resonator MEMS Magnetic Field Gradiometer. Sensors, 19(3), 493. https://doi.org/10.3390/s19030493 ( reposiTUm)

Wachter, G., Kuhn, S., Minniberger, S., Salter, C., Asenbaum, P., Millen, J., Schneider, M., Schalko, J., Schmid, U., Felgner, A., Hüser, D., Arndt, M., & Trupke, M. (2019). Silicon microcavity arrays with open access and a finesse of half a million. Light: Science & Applications, 8(37). https://doi.org/10.1038/s41377-019-0145-y ( reposiTUm)

Kainz, A., Hortschitz, W., Steiner, H., Stifter, M., Schalko, J., Jachimowicz, A., & Keplinger, F. (2018). Passive optomechanical electric field strength sensor with built-in vibration suppression. Applied Physics Letters, 113(14), 143505. https://doi.org/10.1063/1.5045614 ( reposiTUm)

Kainz, A., Steiner, H., Schalko, J., Jachimowicz, A., Kohl, F., Stifter, M., Beigelbeck, R., Keplinger, F., & Hortschitz, W. (2018). Distortion-free measurement of electric field strength with a MEMS sensor. Nature Electronics, 1(1), 68–73. https://doi.org/10.1038/s41928-017-0009-5 ( reposiTUm)

Luhmann, N., Jachimowicz, A., Schalko, J., Sadeghi, P., Sauer, M., Foelske-Schmitz, A., & Schmid, S. (2017). Effect of oxygen plasma on nanomechanical silicon nitride resonators. Applied Physics Letters, 111(6), 063103. https://doi.org/10.1063/1.4989775 ( reposiTUm)

Kainz, A. F. H., Hortschitz, W., Steiner, H., Schalko, J., Jachimowicz, A., & Keplinger, F. (2017). Accurate Analytical Model for Air Damping in Lateral MEMS/MOEMS Oscillators. Sensors and Actuators A: Physical, 255, 154–159. https://doi.org/10.1016/j.sna.2016.12.023 ( reposiTUm)

Steiner, H., Hortschitz, W., Kainz, A. F. H., Stifter, M., Jachimowicz, A., Schalko, J., Keplinger, F., & Kohl, F. (2017). MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor. Sensors and Actuators A: Physical, 263, 727–732. https://doi.org/10.1016/j.sna.2017.05.035 ( reposiTUm)

Kuhn, S., Wachter, G., Wieser, F.-F., Millen, J., Schneider, M., Schalko, J., Schmid, U., Trupke, M., & Arndt, M. (2017). Nanoparticle detection in an open-access silicon microcavity. Applied Physics Letters, 111(25), Article 253107. https://doi.org/10.1063/1.5008492 ( reposiTUm)

Dergez, D., Schalko, J., Löffler, S., Bittner, A., & Schmid, U. (2015). Impact of auxiliary capacitively coupled plasma on the properties of ICP-CVD deposited a-SiNₓ:H thin films. Sensors and Actuators A: Physical, 224, 156–162. https://doi.org/10.1016/j.sna.2015.02.013 ( reposiTUm)

Steiner, H., Keplinger, F., Schalko, J., Hortschitz, W., & Stifter, M. (2015). Highly Efficient Passive Thermal Micro-Actuator. Journal of Microelectromechanical Systems, 24(6), 1981–1988. http://hdl.handle.net/20.500.12708/151300 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sánchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media. Applied Physics Letters, 107(5), 053506. https://doi.org/10.1063/1.4928429 ( reposiTUm)

Kainz, A., Hortschitz, W., Schalko, J., Jachimowicz, A., & Keplinger, F. (2015). Air damping as design feature in lateral oscillators. Sensors and Actuators A: Physical, 236, 357–363. https://doi.org/10.1016/j.sna.2015.11.005 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sànchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 107, 0535061–0535065. https://doi.org/10.1063/1.4928429 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 104(23), 233501. https://doi.org/10.1063/1.4882177 ( reposiTUm)

Beigelbeck, R., Schneider, M., Schalko, J., Bittner, A., & Schmid, U. (2014). A two-step load-deflection procedure applicable to extract the Young’s modulus and the residual tensile stress of circularly shaped thin-film diaphragms. Journal of Applied Physics, 116(114905), 11490501–11490513. http://hdl.handle.net/20.500.12708/157233 ( reposiTUm)

Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. Optics Express, 22(18), 2212001–2212010. http://hdl.handle.net/20.500.12708/157232 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Jachimowicz, A., Schalko, J., Bittner, A., & Schmid, U. (2014). Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode. SENSORS AND ACTUATORS B-CHEMICAL, 200, 235–244. http://hdl.handle.net/20.500.12708/157230 ( reposiTUm)

Dergez, D., Schalko, J., Bittner, A., & Schmid, U. (2013). Fundamental properties of a-SiNx:H thin films deposited by ICP-PECVD for MEMS applications. Applied Surface Science, 284, 348–353. https://doi.org/10.1016/j.apsusc.2013.07.104 ( reposiTUm)

Hansal, W., Steiner, H., Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., & Svasek, P. (2013). Microgalvanic nickel pulse plating process for the production of thermal actuators. Microsystem Technologies, 20(4–5), 681–689. https://doi.org/10.1007/s00542-013-2007-5 ( reposiTUm)

Hortschitz, W., Steiner, H., Sachse, M., Stifter, M., Kohl, F., Schalko, J., Jachimowicz, A., Keplinger, F., & Sauter, T. (2012). Robust Precision Position Detection With an Optical MEMS Hybrid Device. IEEE Transactions on Industrial Electronics, 59(12), 4855–4862. https://doi.org/10.1109/tie.2011.2173096 ( reposiTUm)

Cerimovic, S., Beigelbeck, R., Antlinger, H., Schalko, J., Jakoby, B., & Keplinger, F. (2012). Sensing viscosity and density of glycerol-water mixtures utilizing a suspended plate MEMS resonator. Microsystem Technologies, 18(7–8), 1045–1056. https://doi.org/10.1007/s00542-012-1437-9 ( reposiTUm)

Dalola, S., Cerimovic, S., Kohl, F., Beigelbeck, R., Schalko, J., Ferrari, V., Marioli, D., Keplinger, F., & Sauter, T. (2012). MEMS Thermal Flow Sensor With Smart Electronic Interface Circuit. IEEE Sensors Journal, 12(12), 3318–3328. https://doi.org/10.1109/jsen.2012.2219619 ( reposiTUm)

Hortschitz, W., Steiner, H., Sachse, M., Stifter, M., Kohl, F., Schalko, J., Jachimowicz, A., Keplinger, F., & Sauter, T. (2011). An Optical In-Plane MEMS Vibration Sensor. IEEE Sensors Journal, 11(11), 2805–2812. https://doi.org/10.1109/jsen.2011.2169781 ( reposiTUm)

Cordill, M. J., Taylor, A., Schalko, J., & Dehm, G. (2011). Microstructure and adhesion of as-deposited and annealed Cu/Ti films on polyimide. Journal of Materials Research, 102(6), 1–6. https://doi.org/10.3139/146.110513 ( reposiTUm)

Cordill, M. J., Taylor, A., Schalko, J., & Dehm, G. (2010). Fracture and Delamination of Chromium Thin Films on Polymer Substrates. METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 41A, 870–875. http://hdl.handle.net/20.500.12708/167536 ( reposiTUm)

Ćerimović, S., Talić, A., Kohl, F., Keplinger, F., Schalko, J., & Jachimowicz, A. (2009). FEM-basierte Analyse eines neuen thermischen Strömungssensors mit drei unterschiedlichen Betriebsmoden. Elektrotechnik Und Informationstechnik, 126(1–2), 13–18. https://doi.org/10.1007/s00502-009-0614-8 ( reposiTUm)

Riesch, C., Reichel, E. K., Jachimowicz, A., Schalko, J., Hudek, P., Jakoby, B., & Keplinger, F. (2009). A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout. Journal of Micromechanics and Microengineering, 19(7), 075010. https://doi.org/10.1088/0960-1317/19/7/075010 ( reposiTUm)

Kohl, F., Beigelbeck, R., Kuntner, J., Schalko, J., & Jachimowicz, A. (2008). Zur Emissivität partiell transparenter, dielektrischer Schichten. Elektrotechnik Und Informationstechnik, 125(3), 56–64. https://doi.org/10.1007/s00502-008-0509-0 ( reposiTUm)

Kvasnica, S., Schalko, J., Eisenmenger-Sittner, C., Bernardi, J., Vorlaufer, G., Pauschitz, A., & Roy, M. (2006). Nanotribological study of PECVD DLC and reactively sputtered Ti containing carbon films. Diamond and Related Materials, 15(10), 1743–1752. https://doi.org/10.1016/j.diamond.2006.03.005 ( reposiTUm)

Mannsberger, M., Kukovecz, A., Georgakilas, A., Rechthaler, J., Schalko, J., Hasi, F., Allmaier, G., Prato, M., & Kuzmany, H. (2005). Thermal Stripping of Supramolecular Strutures: C₆₀ Nanorods. Journal of Nanoscience and Nanotechnology, 5(2), 198–203. http://hdl.handle.net/20.500.12708/171492 ( reposiTUm)

Olcaytug, F., Szymanowski, H., Kaczmarek, M., Sobczyk, A., Rapiejko, C., Schalko, J., Piplits, K., Gazicki-Lipman, M., & Yasuda, H. (2005). Cylindric electromagnetron electrode for continuously variable PVD/CVD mixed processing. Polish Journal of Applied Chemistry, 49((1-2)), 11–21. http://hdl.handle.net/20.500.12708/173317 ( reposiTUm)

Kainz, A. F. H., Hortschitz, W., Schalko, J., Jachimowicz, A., & Keplinger, F. (2019). Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE Conference Proceedings. https://doi.org/10.1109/transducers.2019.8808410 ( reposiTUm)

Kahr, M., Stifter, M., Steiner, H., Hortschitz, W., Kovacs, G., Kainz, A., Schalko, J., & Keplinger, F. (2018). MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130724 ( reposiTUm)

Kahr, M., Stifter, M., Steiner, H., Hortschitz, W., Kovacs, G., Kainz, A., Schalko, J., & Keplinger, F. (2018). Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130843 ( reposiTUm)

Hortschitz, W., Kainz, A., Steiner, H., Kovacs, G., Stifter, M., Kahr, M., Schalko, J., & Keplinger, F. (2018). Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130855 ( reposiTUm)

Luhmann, N., Jachimowicz, A., Schalko, J., Sadeghi, P., Sauer, M., Foelske-Schmitz, A., & Schmid, S. (2017). Effect of oxygen plasma on nanomechanical silicon nitride resonators. In 43rd International Conference on Micro and Nanoengineering (MNE) (p. 1). http://hdl.handle.net/20.500.12708/76054 ( reposiTUm)

Steiner, H., Kahr, M., Kainz, A. F. H., Stifter, M., Jachimowicz, A., Schalko, J., Keplinger, F., & Kohl, F. (2016). Nonlinear MOEMS Transducer for DC Displacement and Inclination Utilizing Harmonics. In Proceedings MNE 2016 (p. 1). http://hdl.handle.net/20.500.12708/75458 ( reposiTUm)

Kahr, M., Kainz, A. F. H., Steiner, H., Kohl, F., Zemann, S., Schalko, J., & Keplinger, F. (2016). Electrostatic Feedback Actuation for Enhancing the Dynamic Range of MOEMS Displacement Sensors. In Proceedings of the Eurosensors XXX (pp. 1283–1286). Procedia Engineering. http://hdl.handle.net/20.500.12708/75461 ( reposiTUm)

Kahr, M., Steiner, H., Stifter, M., Kainz, A. F. H., Kohl, F., Siedler, C., Schalko, J., & Keplinger, F. (2016). Novel MOEMS Lorentz force transducer for magnetic fields. In Proceedings of the Eurosensors XXX (pp. 680–683). Procedia Engineering. http://hdl.handle.net/20.500.12708/75462 ( reposiTUm)

Steiner, H., Kahr, M., Kainz, A. F. H., Stifter, M., Jachimowicz, A., Schalko, J., Keplinger, F., & Kohl, F. (2016). Impact of a Non-linear Transfer Characteristic on the Evaluation of Static Displacements with a MOEMS Transducer. In Proceedings of the Eurosensors XXX (pp. 1219–1222). Procedia Engineering. http://hdl.handle.net/20.500.12708/75505 ( reposiTUm)

Hortschitz, W., Kainz, A. F. H., Steiner, H., Kohl, F., Schalko, J., Keplinger, F., & Sauter, T. (2015). MOEMS Accelerometer Evaluation Regarding Resolution. In Interactive Booklet MNE 2015 (p. 2). http://hdl.handle.net/20.500.12708/74888 ( reposiTUm)

Kainz, A. F. H., Hortschitz, W., Schalko, J., Jachimowicz, A., & Keplinger, F. (2015). Strongly Passively Damped MOEMS Vibration Sensor. In Interactive Booklet MNE 2015 (p. 2). http://hdl.handle.net/20.500.12708/74887 ( reposiTUm)

Kainz, A. F. H., Hortschitz, W., Stifter, M., Schalko, J., & Keplinger, F. (2014). Optimization of Passive Air Damping of MOEMS Vibration Sensors. In Proceedings - Procedia Engineering (pp. 440–443). http://hdl.handle.net/20.500.12708/74445 ( reposiTUm)

Hortschitz, W., Kainz, A. F. H., Steiner, H., Stifter, M., Kohl, F., Schalko, J., & Sauter, T. (2014). MOEMS Vibration Sensor for Advanced Low-Frequency Aöölications with pm Resolution. In Proceedings - Procedia Engineering (pp. 835–838). http://hdl.handle.net/20.500.12708/74444 ( reposiTUm)

Dergez, D., Bittner, A., Schalko, J., & Schmid, U. (2014). Low-stress and Long-term Stable a-SiNx:H Films Deposited by ICP-PECVD. In Procedia Engineering (pp. 100–103). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.392 ( reposiTUm)

Hansal, W., Steiner, H., Mann, R., Halmdienst, M., Schalko, J., & Keplinger, F. (2013). Microgalvanic nickel pulse plating process for the production of thermal actuators. In Proceedings of SPIE - Smart Sensors, Actuators, and MEMS VI (pp. 87631X-1-87631X – 7). SPIE. http://hdl.handle.net/20.500.12708/73593 ( reposiTUm)

Schneider, M., Bittner, A., Schmid, U., Beigelbeck, R., Schalko, J., & Stifter, M. (2012). Experimentelle Verifikation eines verbesserten Bulge-Test Modells zur elastomechanischen Charakterisierung von runden Aluminiumnitrid- und Siliziumnitridmembranen. In ME Tagung 2012 (pp. 56–60). Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik. http://hdl.handle.net/20.500.12708/73344 ( reposiTUm)

Mutapcic, M., Cerimovic, S., Keplinger, F., Talic, A., Schalko, J., Beigelbeck, R., Antlinger, H., & Jakoby, B. (2012). FEM-basierte Entwicklung miniaturisierter 1D und 2D Strömungssensoren. In Tagungsband zur Informationstagung Mikroelektronik 12 (pp. 117–122). http://hdl.handle.net/20.500.12708/70239 ( reposiTUm)

Steiner, H., Keplinger, F., Schalko, J., & Hortschitz, W. (2012). SU-8 as Material for Thermal Actuators and Its Non-Linear Behavior. In Book of Abstracts (pp. 190–191). http://hdl.handle.net/20.500.12708/73176 ( reposiTUm)

Cerimovic, S., Schalko, J., Keplinger, F., Talic, A., Kohl, F., Beigelbeck, R., Antlinger, H., & Jakoby, B. (2012). Entwicklung und Design eines bidirektionalen Heißfilm-Strömungssensors. In Tagungsband zur Informationstagung Mikroelektronik 12 (pp. 123–129). http://hdl.handle.net/20.500.12708/70225 ( reposiTUm)

Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–8). https://doi.org/10.1117/12.886824 ( reposiTUm)

Cerimovic, S., Beigelbeck, R., Antlinger, H., Schalko, J., Jakoby, B., & Keplinger, F. (2011). Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements. In CD-Proceedings COMSOL Conference 2011 (p. 6). http://hdl.handle.net/20.500.12708/72447 ( reposiTUm)

Hortschitz, W., Kohl, F., Sachse, M., Stifter, M., Sauter, T., Steiner, H., Schalko, J., Jachimowicz, A., & Keplinger, F. (2011). Noise considerations on hybrid optical MEMS displacement sensors. In Proceedings of the IEEE Sensors 2011 (pp. 363–366). http://hdl.handle.net/20.500.12708/72661 ( reposiTUm)

Talic, A., Cerimovic, S., Mutapcic, M., Beigelbeck, R., Keplinger, F., & Schalko, J. (2011). 3D FEM Analysis of Micromachined Wind Sensor Based on a Self-heated Thermistor Array. In CD-Proceedings COMSOL Conference 2011 (p. 6). http://hdl.handle.net/20.500.12708/72662 ( reposiTUm)

Hortschitz, W., Kohl, F., Steiner, H., Sachse, M., Stifter, M., Schalko, J., Jachimowicz, A., & Keplinger, F. (2011). Design of Linear and Nonlinear Hybrid Optical MEMS Displacement Sensors. In Smart Sensors, Actuators, and MEMS V (p. 9). SPIE. http://hdl.handle.net/20.500.12708/72664 ( reposiTUm)

Steiner, H., Sachse, M., Schalko, J., Hortschitz, W., Kohl, F., & Jachimowicz, A. (2011). Experimental setup for the coating of chlorosilane based self assembling monolayers to reduce stiction in MEMS devices. In Smart Sensors, Actuators, and MEMS V (p. 9). SPIE. http://hdl.handle.net/20.500.12708/72663 ( reposiTUm)

Cerimovic, S., Beigelbeck, R., Antlinger, H., Schalko, J., & Jakoby, B. (2011). Viscosity and Density Measurements of Glycerol-Water Mixtures Utilizing a Novel Resonant MEMS Sensor. In Proceedings of SPIE (p. 6). http://hdl.handle.net/20.500.12708/72162 ( reposiTUm)

Sachse, M., Hortschitz, W., Steiner, H., Keplinger, F., Jachimowicz, A., & Schalko, J. (2011). A Middle Ear Microphone Design Based on the Physiology of the Human Ear. In G. Kaltsas & C. Tsamis (Eds.), EurosensorsXXV (pp. 595–598). Elsevier BV. https://doi.org/10.1016/j.proeng.2011.12.148 ( reposiTUm)

Sachse, M., Hortschitz, W., Steiner, H., Stifter, M., & Schalko, J. (2010). Analyse der Dämpfung in Mikrostrukturen mit keleinen Dämpfergeometrien. In Proceedings of the ME 2010 (pp. 191–196). http://hdl.handle.net/20.500.12708/71420 ( reposiTUm)

Cerimovic, S., Talic, A., Kohl, F., Beigelbeck, R., Schalko, J., & Keplinger, F. (2010). Micromachined Wind Sensors Based on a Circular Thermistor Array in a Double Bridge Configuration. In Proceedings (pp. 495–500). http://hdl.handle.net/20.500.12708/71635 ( reposiTUm)

Cerimovic, S., Talic, A., Kohl, F., Beigelbeck, R., Schalko, J., & Keplinger, F. (2010). FEM-basiertes Design eines miniaturisierten TOF-Strömungssensors. In Proceedings of the ME 2010 (pp. 184–190). http://hdl.handle.net/20.500.12708/71417 ( reposiTUm)

Talic, A., Cerimovic, S., Beigelbeck, R., Kohl, F., Schalko, J., & Keplinger, F. (2010). Stationäre und transiente Analyse miniaturisierter Strömungssensoren mit sehr niedriger Leistungsaufnahme. In Proceedings of the ME 2010 (pp. 227–230). http://hdl.handle.net/20.500.12708/71418 ( reposiTUm)

Steiner, H., Sachse, M., Schalko, J., Hortschitz, W., & Jachimowicz, A. (2010). Experimenteller Aufbau zum Beschichten von selbstorganisierenden Monoschicht zur Reduktion von Stiction bei Silicium MEMS Bauteilen. In Tagungsband der Dornbirner Mikrotechniktage 2010 (pp. 46–49). http://hdl.handle.net/20.500.12708/71804 ( reposiTUm)

Talic, A., Cerimovic, S., Kohl, F., Beigelbeck, R., Schalko, J., & Keplinger, F. (2010). FEM and Measurement Analysis for Flow Sensor Featuring Three Different Operating Modes. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 746–749). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.216 ( reposiTUm)

Hortschitz, W., Steiner, H., Sachse, M., Kohl, F., Schalko, J., & Keplinger, F. (2010). Hybrid Optical MEMS Vibration Sensor. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 420–423). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.136 ( reposiTUm)

Kohl, F., Beigelbeck, R., Kuntner, J., Schalko, J., Talic, A., & Cerimovic, S. (2010). Advanced structures for heat transfer studies on diaphragms. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 898–901). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.254 ( reposiTUm)

Sachse, M., Hortschitz, W., Kohl, F., Schalko, J., & Keplinger, F. (2010). A Middle Ear Microphone Design Basid on the Physiology of the Ear. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 500–503). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.156 ( reposiTUm)

Dalola, S., Cerimovic, S., Kohl, F., Schalko, J., Ferrari, V., Marioli, D., & Keplinger, F. (2010). Highly Sensitive Smart Flow Sensor with Frequency and Duty Cycle Output. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 528–531). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.163 ( reposiTUm)

Dalola, S., Cerimovic, S., Ferrari, V., Keplinger, F., Marioli, D., Talic, A., & Schalko, J. (2010). Sensore di flusso microlavorato con interfaccia elettronica. In Proceedings (pp. 357–366). http://hdl.handle.net/20.500.12708/71636 ( reposiTUm)

Hortschitz, W., Sachse, M., Steiner, H., Kohl, F., Sauter, T., Schalko, J., & Keplinger, F. (2010). Optical MEMS Vibration Sensor. In Proceedings of the 9th IEEE Conference on Sensors (pp. 1731–1735). http://hdl.handle.net/20.500.12708/72024 ( reposiTUm)

Cerimovic, S., Talic, A., Kohl, F., Beigelbeck, R., Schalko, J., & Jachimowicz, A. (2009). Micromachined Flow Sensors Enabling Eletrocalorimetric and TOF Transduction. In Procedia Chemistry (Issue 1, pp. 132–135). Elsevier BV. https://doi.org/10.1016/j.proche.2009.07.033 ( reposiTUm)

Riesch, C., Reichel, E. K., Jachimowicz, A., Schalko, J., Jakoby, B., & Keplinger, F. (2009). A micromachined suspended plate viscosity sensors featuring in-plane vibrations and integrated piezoresistive readout. In Conference Proceedings Transducers 2009 (pp. 1178–1181). http://hdl.handle.net/20.500.12708/70842 ( reposiTUm)

Cerimovic, S., Talic, A., Beigelbeck, R., Sauter, T., Kohl, F., Schalko, J., & Keplinger, F. (2009). Novel Calorimetric Flow Sensor Implementation Based on Thermal Sigma-Delta Modulation. In Proceedings CD (pp. 1923–1926). http://hdl.handle.net/20.500.12708/71044 ( reposiTUm)

Cerimovic, S., Talic, A., Sauter, T., Kohl, F., Beigelbeck, R., Schalko, J., & Jachimowicz, A. (2009). A Novel Thermal Transduction Method for sub-mW flow Sensors. In Proceedings CD (pp. 1325–1328). http://hdl.handle.net/20.500.12708/71043 ( reposiTUm)

Kohl, F., Beigelbeck, R., Schalko, J., & Jachimowicz, A. (2008). Error Analysis of Membrance-Based Thermal Conductivity Estimates. In Proceedings EUROSENSORS XXII (p. 4). http://hdl.handle.net/20.500.12708/70310 ( reposiTUm)

Schalko, J., Beigelbeck, R., Kohl, F., Jachimowicz, A., Keplinger, F., & Opitz, M. (2008). Novel Carbon Nanotube Fabric Based Membranes. In Proceedings EUROSENSORS XXII (p. 4). http://hdl.handle.net/20.500.12708/70311 ( reposiTUm)

Cerimovic, S., Talic, A., Beigelbeck, R., Kohl, F., Schalko, J., & Keplinger, F. (2008). PSpice-Modellierung miniaturisierter Strömungssensoren. In Tagungsband zur Informationstagung Mikroelektronik 08 (pp. 46–49). http://hdl.handle.net/20.500.12708/70417 ( reposiTUm)

Cerimovic, S., Talic, A., Beigelbeck, R., Kohl, F., Schalko, J., & Jachimowicz, A. (2008). Novel Flow Sensors Based on a Two-State Controller Scheme. In Book of Abstracts (pp. 591–592). http://hdl.handle.net/20.500.12708/70473 ( reposiTUm)

Talic, A., Cerimovic, S., Kohl, F., Beigelbeck, R., Keplinger, F., & Schalko, J. (2008). FEM Analysis of Micromachined Flow Sensor with Wheatstone Bridge Read-out. In CD-Proceedings COMSOL Conference Hannover 2008 (p. 5). http://hdl.handle.net/20.500.12708/70477 ( reposiTUm)

Keplinger, F., Kohl, F., Beigelbeck, R., Kuntner, J., Jachimowicz, A., & Schalko, J. (2007). High Performance Sensor for Angular Resolved Flow Measurement. In Proceedings of Transducers 07 & Eurosensors XXI (pp. 2337–2340). http://hdl.handle.net/20.500.12708/69640 ( reposiTUm)

Kohl, F., Beigelbeck, R., Cerimovic, S., Talic, A., Schalko, J., & Jachimowicz, A. (2007). Comparison of the Dynamic Response of Calorimetric and Hot-Film Flow Transducers. In Proceedings of the 6th IEEE Conference on Sensors (p. 4). http://hdl.handle.net/20.500.12708/70055 ( reposiTUm)

Jachimowicz, A., Schalko, J., Kuntner, J., Kohl, F., & Jakoby, B. (2006). Bridge-Based Microsensor for Determining the Thermal Properties of Liquids. In K. Riedling (Ed.), GMe Workshop 2006 Proceedings (pp. 121–125). http://hdl.handle.net/20.500.12708/69580 ( reposiTUm)

Kohl, F., Keplinger, F., Beigelbeck, R., Kuntner, J., Schalko, J., & Jachimowicz, A. (2006). Refined Thermal Flow Sensors by Transduction Engineering. In Proceedings EUROSENSORS 2006 (pp. 186–187). http://hdl.handle.net/20.500.12708/69206 ( reposiTUm)

Kohl, F., Beigelbeck, R., Schalko, J., & Jachimowicz, A. (2005). Towards System-Ready Flow Sensors. In Proceedings of the ETFA 2005 (pp. 959–966). http://hdl.handle.net/20.500.12708/68630 ( reposiTUm)

Schalko, J., Kohl, F., Keplinger, F., Beigelbeck, R., Talic, A., Cerimovic, S., Kuntner, J., & Jachimowicz, A. (2007). Advanced Thermal Flow Sensors. In The Society for Microelectronics Biennial Report 2005 - 2006 (pp. 417–421). Gesellschaft für Mikro- und Nanoelektronik. http://hdl.handle.net/20.500.12708/25072 ( reposiTUm)

Rothbauer, M., Gondola, H., Schmid, S., Schalko, J., Huppertz, B., & Ertl, P. (2017). A Lab-on-a-chip with Integrated Impedance Sensors for Nanotoxicological Studies on Human Placental Cell Lines. Microfluidics and Lab-on-a-Chip Technologies, Germany. http://hdl.handle.net/20.500.12708/100666 ( reposiTUm)

Derntl, C., Schalko, J., Schneider, M., Bittner, A., Schmid, U., Schmiedmayer, H.-J., & Trupke, M. (2013). Arrays of open, independently tunable microcavities for quantum emitters. Artificial Atoms: From Quantum Physics to Applications, Budapest, Hungary. http://hdl.handle.net/20.500.12708/130479 ( reposiTUm)

Sachse, M., Hortschitz, W., Steiner, H., Keplinger, F., Jachimowicz, A., & Schalko, J. (2011). A Middle Ear Microphone Design Based on the Physiology of the Human Ear. Eurosensors XXV, Athens, Greece, EU. http://hdl.handle.net/20.500.12708/89756 ( reposiTUm)

Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89763 ( reposiTUm)

Kohl, F., Beigelbeck, R., Kuntner, J., Schalko, J., Talic, A., & Cerimovic, S. (2010). Advanced structures for heat transfer studies on diaphragms. Eurosensors XXIV, Linz, Austria, Austria. http://hdl.handle.net/20.500.12708/89318 ( reposiTUm)

Dalola, S., Ferrari, V., Marioli, D., Cerimovic, S., Keplinger, F., Talic, A., & Schalko, J. (2010). Micromachined flow sensor with smart electronic interface. 42 Riunione Annuale del Gruppo Elettronica (42nd annual meeting Electronics Groupe) GE2010, Rome, Italy, EU. http://hdl.handle.net/20.500.12708/89285 ( reposiTUm)

Sauer, M., Lang, W., Puchegger, S., Peterlik, H., Havlicek, M., Jantsch, W., Rümmeli, M., Schalko, J., Yanagi, K., Kataura, H., & Kuzmany, H. (2010). Transporteigenschaften von Metall-Halbleiter separierten einwandigen Kohlenstoff Nanoröhrchen. Annual Meeting of the Austrian Physical Society, Wien, Austria. http://hdl.handle.net/20.500.12708/89329 ( reposiTUm)

Fasching, R., Keplinger, F., & Schalko, J. (1999). Jahresabschlußbericht der Außenstelle Wr. Neustadt des Instituts 366. http://hdl.handle.net/20.500.12708/30937 ( reposiTUm)

Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. arXiv. http://hdl.handle.net/20.500.12708/156447 ( reposiTUm)

Schalko, J. (2002). Deposition and characterization of PECVD carbon and carbon alloy films in various modifications [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/181749 ( reposiTUm)