Wissenschaftliche Artikel

Moll, P., Pfusterschmied, G., Schwarz, S., Stöger-Pollach, M., & Schmid, U. (2024). Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si. SENSORS AND ACTUATORS A-PHYSICAL, 372, 1–9. https://doi.org/10.1016/j.sna.2024.115376 ( reposiTUm)

Berger, C., Schiek, M., Pandit, S., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material. Journal of Applied Physics, 136(14), 1–11. https://doi.org/10.1063/5.0226103 ( reposiTUm)

Moll, P., Schwarz, S., Pfusterschmied, G., Artner, W., & Schmid, U. (2024). Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition. Journal of Microelectromechanical Systems, 1–9. https://doi.org/10.34726/7319 ( reposiTUm)

Berger, C., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators. Journal of Applied Physics, 135(16), 1–10. https://doi.org/10.1063/5.0197261 ( reposiTUm)

Xiang, Y., Fulmek, P., Sauer, M., Foelske, A., & Schmid, U. (2024). Characterization of Surface Modifications in Oxygen Plasma-Treated Teflon AF1600. Langmuir, 40(9), 4779–4788. https://doi.org/10.1021/acs.langmuir.3c03639 ( reposiTUm)

Pandit, S., Schneider, M., Berger, C., & Schmid, U. (2024). Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical coupling. SENSORS AND ACTUATORS A-PHYSICAL, 376, Article 115638. https://doi.org/10.1016/j.sna.2024.115638 ( reposiTUm)

Schlögl, M., Schneider, M., & Schmid, U. (2024). Scalable electromagnetic energy harvester for wind turbine rotor blade applications. Smart Materials and Structures, 33(5), 1–12. https://doi.org/10.1088/1361-665X/ad3e52 ( reposiTUm)

Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2024). Real-Time Tracking of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Resonators. Proceedings, 97(1), Article 179. https://doi.org/10.3390/proceedings2024097179 ( reposiTUm)

Perazzi, M., Leitgeb, M., Vengattoor Raghu, A., Zellner, C., Hahn, R., Kirnbauer, A., Schwarz, S., Pfusterschmied, G., & Schmid, U. (2024). High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils. Materials Science Forum, 1124, 43–49. https://doi.org/10.4028/p-D0xoyc ( reposiTUm)

Wahid, S. N., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024). A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer. Materials Science Forum, 1124, 35–41. https://doi.org/10.4028/p-8AEonP ( reposiTUm)

Pompei, E., Vlamidis, Y., Ferbel, L., Zannier, V., Rubini, S., Esteban, D. A., Bals, S., Marinelli, C., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2024). Functionalization of three-dimensional epitaxial graphene with metal nanoparticles. Nanoscale, 16(34), 16107–16118. https://doi.org/10.1039/d4nr01986e ( reposiTUm)

Dubek, K., Schneidhofer, C., Dörr, N., & Schmid, U. (2024). Laboratory robustness validation of a humidity sensor system for the condition monitoring of grease-lubricated components for railway applications. Journal of Sensors and Sensor Systems, 13(1), 9–23. https://doi.org/10.5194/jsss-13-9-2024 ( reposiTUm)

Disnan, D., Bacher, F., Berger, S., Schneider, M., & Schmid, U. (2024). Microstructural influence on thermal stability of ferroelectric properties in P(VDF-TrFE) spin cast thin films. Polymer, 298, Article 126894. https://doi.org/10.1016/j.polymer.2024.126894 ( reposiTUm)

Schlögl, M., Weißenbach, J., Schneider, M., & Schmid, U. (2023). Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges. Sensors and Actuators A: Physical, 349, Article 114067. https://doi.org/10.1016/j.sna.2022.114067 ( reposiTUm)

Disnan, D., Hafner, J., Schneider, M., & Schmid, U. (2023). Spherulite-like microstructure observed for spin-cast P(VDF-TrFE) thin films and their ferroelectric characteristics. Polymer, 272, Article 125840. https://doi.org/10.1016/j.polymer.2023.125840 ( reposiTUm)

David, M., Disnan, D., Arigliani, E., Lardschneider, A., Marschick, G., Hoang, H. T., Detz, H., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2023). Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics. Photonics Research, 11(10), 1694–1702. https://doi.org/10.1364/PRJ.495729 ( reposiTUm)

Xiang, Y., Dejkoski, B., Fulmek, P., & Schmid, U. (2023). Surface properties of μm and sub-μm polydimethylsiloxane thin films after oxygen plasma treatment. Polymer, 275, Article 125915. https://doi.org/10.1016/j.polymer.2023.125915 ( reposiTUm)

Pandit, S., Schneider, M., Schwarz, S., & Schmid, U. (2023). Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (YₓAl₁₋ₓN) Thin Films. Advanced Engineering Materials, 25(22), 1–8. https://doi.org/10.1002/adem.202300940 ( reposiTUm)

Ignat, I., Schuster, B., Hafner, J. A., Kwon, M., Platz, D., & Schmid, U. (2023). Intermodal coupling spectroscopy of mechanical modes in microcantilevers. Beilstein Journal of Nanotechnology, 14, 123–132. https://doi.org/10.3762/bjnano.14.13 ( reposiTUm)

Macili, A., Vlamidis, Y., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2023). Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications. Applied Surface Science, 615, Article 156375. https://doi.org/10.1016/j.apsusc.2023.156375 ( reposiTUm)

Kwon, M., Ignat, I., Platz, D., Arthaber, H., & Schmid, U. (2023). Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography. SENSORS AND ACTUATORS A-PHYSICAL, 362, Article 114637. https://doi.org/10.1016/j.sna.2023.114637 ( reposiTUm)

Gesing, A., Tran, T., Huber, D., Steinmüller-Nethl, D., Pfusterschmied, G., Schneider, M., Platz, D., & Schmid, U. (2023). The gas-liquid-Q-factor-inversion in MEMS plate resonators. Journal of Sound and Vibration, 559, Article 117777. https://doi.org/10.1016/j.jsv.2023.117777 ( reposiTUm)

Veronesi, S., Vlamidis, Y., Ferbel, L., Marinelli, C., Sanmartin, C., Taglieri, I., Pfusterschmied, G., Leitgeb, M., Schmid, U., Mencarelli, F., & Heun, S. (2023). Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications. Journal of the Science of Food and Agriculture, 1–11. https://doi.org/10.1002/jsfa.13118 ( reposiTUm)

Disnan, D., Hafner, J., Benaglia, S., Teuschel, M., Schneider, M., Garcia, R., & Schmid, U. (2023). Nanostructural and piezoelectric characterization of electro-formed δ-phase poly(vinylidene fluoride) thin films. Materials Research Letters, 11(4), 296–303. https://doi.org/10.1080/21663831.2022.2150096 ( reposiTUm)

Hafner, J., Disnan, D., Benaglia, S., Garcia, R., & Schmid, U. (2023). Solution-processed ferroelectric polymer nanocrystals. Polymer, 281, 126115. https://doi.org/10.1016/j.polymer.2023.126115 ( reposiTUm)

Ullmann, P., Bretthauer Christian, Schneider, M., & Schmid, U. (2023). Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out. Sensors and Actuators A: Physical, 349, Article 114003. https://doi.org/10.1016/j.sna.2022.114003 ( reposiTUm)

Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2022). Accuracy and Precision of Resonant Piezoelectric Mems Viscosity Sensors in Highly Viscous Bituminous Materials. Sensors and Actuators A: Physical. https://doi.org/10.1016/j.sna.2022.113903 ( reposiTUm)

Loch Gesing, A., Platz, D., & Schmid, U. (2022). A numerical method to determine the displacement spectrum of micro-plates in viscous fluids. Computers and Structures, 260, Article 106716. https://doi.org/10.1016/j.compstruc.2021.106716 ( reposiTUm)

Moll, P., Pfusterschmied, G., Schneider, M., Dorfmeister, M., Knafl, S., Wanzenböck, H., & Schmid, U. (2022). Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids. Journal of Microelectromechanical Systems, 31(3), 372–383. https://doi.org/10.1109/JMEMS.2022.3163477 ( reposiTUm)

Xiang, Y., Fulmek, P., Platz, D., & Schmid, U. (2022). Temperature-dependent electrowetting behavior on Teflon AF1600. Journal of Materials Science, 57(31), 15151–15159. https://doi.org/10.1007/s10853-022-07515-y ( reposiTUm)

Aguinsky, L. F., Rodrigues, F., Wachter, G., Trupke, M., Schmid, U., Hössinger, A., & Weinbub, J. (2022). Phenomenological Modeling of Low-Bias Sulfur Hexafluoride Plasma Etching of Silicon. Solid-State Electronics, 191(108262), 108262. https://doi.org/10.1016/j.sse.2022.108262 ( reposiTUm)

David, M., Disnan, D., Lardschneider, A., Wacht, D., Hoang, H. T., Ramer, G., Detz, H., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2022). Structure and mid-infrared optical properties of spin-coated polyethylene films developed for integrated photonics applications. Optical Materials Express, 12(6), 2168. https://doi.org/10.1364/ome.458667 ( reposiTUm)

Xiang, Y., Fulmek, P., Platz, D., & Schmid, U. (2022). Temperature Dependence of Water Contact Angle on Teflon AF1600. Langmuir, 38(4), 1631–1637. https://doi.org/10.1021/acs.langmuir.1c03202 ( reposiTUm)

Gesing, A., Platz, D., & Schmid, U. (2022). Viscous fluid–structure interaction of micro-resonators in the beam–plate transition. Journal of Applied Physics, 131(13), Article 134502. https://doi.org/10.1063/5.0085514 ( reposiTUm)

Pandit, S., Schneider, M., Berger, C., Schwarz, S., & Schmid, U. (2022). Impact of AlN Seed Layer on Microstructure and Piezoelectric Properties of YₓAl₁−ₓN (x = 15%) Thin Films. Advanced Electronic Materials, 1–8. https://doi.org/10.1002/aelm.202200789 ( reposiTUm)

Veronesi, S., Pfusterschmied, G., Fabbri, F., Leitgeb, M., Arif, O., Esteban, D. A., Bals, S., Schmid, U., & Heun, S. (2022). 3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC. Carbon, 189, 210–218. https://doi.org/10.1016/j.carbon.2021.12.042 ( reposiTUm)

Voglhuber-Brunnmaier, T., Beigelbeck, R., Schmid, U., Sauter, T., You, T., Ou, X., & Jakoby, B. (2022). Efficient and Accurate Modeling of the Surface Deflection of Thin Layers on Composite Substrates with Applications to Piezoelectric Parameter Measurements. Micro, 2(3), 369–389. https://doi.org/10.3390/micro2030025 ( reposiTUm)

Hajian, A., Artemenko, A., Kromka, A., Schwarz, S., Schneider, M., Dragounová, K., Adaikkan, M., Zellner, C., & Schmid, U. (2022). Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates. Journal of the European Ceramic Society, 42(13), 5789–5800. https://doi.org/10.1016/j.jeurceramsoc.2022.05.049 ( reposiTUm)

Maier, F. J., Schneider, M., Artemenko, A., Kromka, A., Stöger-Pollach, M., & Schmid, U. (2022). Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO₂/TiO₂/IrO₂ capacitors. Journal of Applied Physics, 131(9), Article 095301. https://doi.org/10.1063/5.0080139 ( reposiTUm)

Kartci, A., Vancik, S., Prasek, J., Hrdy, R., Schneider, M., Schmid, U., & Hubalek, J. (2022). Comparison of on-chip MIS capacitors based on stacked HfO₂/Al₂O₃ nanolaminates. Materials Today Communications, 33, Article 104664. https://doi.org/10.1016/j.mtcomm.2022.104664 ( reposiTUm)

Schlögl, M., Köpl, S., Hiesberger, J., Schneider, M., & Schmid, U. (2022). Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing. Sensors and Actuators A: Physical, 346, 1–12. https://doi.org/10.1016/j.sna.2022.113829 ( reposiTUm)

Maier, F. J., Schneider, M., Schrattenholzer, J., & Schmid, U. (2021). Electrical and Microstructural Characterization of TiO2 Thin Films for Flexoelectric Devices. Journal of Physics: Conference Series, 1837, Article 012009. https://doi.org/10.1088/1742-6596/1837/1/012009 ( reposiTUm)

Schlögl, M., Schneider, M., & Schmid, U. (2021). Design and Simulation of a Scalable Hybrid Energy Harvesting Device for Low Frequency Rotations. Journal of Physics: Conference Series, 1837, Article 012007. https://doi.org/10.1088/1742-6596/1837/1/012007 ( reposiTUm)

Schlögl, M., Schneider, M., & Schmid, U. (2021). Piezoelectricity in Y₀.₀₉Al₀.₉₁N thin films. Materials Science and Engineering: B, 276, Article 115543. https://doi.org/10.1016/j.mseb.2021.115543 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Schwarz, S., Pobegen, G., Konrath, J. P., & Schmid, U. (2021). Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 36(5), 055021. https://doi.org/10.1088/1361-6641/abf29b ( reposiTUm)

Leitgeb, M., Pfusterschmied, G., Schwarz, S., Depuydt, B., Cho, J., & Schmid, U. (2021). Communication-Current Oscillations in Photoelectrochemical Etching of Monocrystalline 4H Silicon Carbide. ECS Journal of Solid State Science and Technology, 10(7), 073003. https://doi.org/10.1149/2162-8777/ac10b3 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Schwarz, S., Artner, W., & Schmid, U. (2021). Si/4H-SiC heterostructure formation using metal-induced crystallization. Materials Science in Semiconductor Processing, 128(105763), 105763. https://doi.org/10.1016/j.mssp.2021.105763 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Pobegen, G., Schwarz, S., Artner, W., Konrath, J. P., & Schmid, U. (2021). Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC. Materials Science in Semiconductor Processing, 131(105888), 105888. https://doi.org/10.1016/j.mssp.2021.105888 ( reposiTUm)

Aguinsky, L. F., Wachter, G., Manstetten, P., Rodrigues, F., Trupke, M., Schmid, U., Hössinger, A., & Weinbub, J. (2021). Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity Resonators. Journal of Micromechanics and Microengineering, 31(12), 125003. https://doi.org/10.1088/1361-6439/ac2bad ( reposiTUm)

Triendl, F., Pfusterschmied, G., Berger, C., Schwarz, S., Artner, W., & Schmid, U. (2021). Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer. Thin Solid Films, 721(138539), 138539. https://doi.org/10.1016/j.tsf.2021.138539 ( reposiTUm)

Hafner, J. A., Teuschel, M., Disnan, D., Schneider, M., & Schmid, U. (2021). Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators. Materials Research Letters, 9(4), 195–203. https://doi.org/10.1080/21663831.2020.1868593 ( reposiTUm)

Maier, F. J., Schneider, M., Ullmann, P., Hafner, J., & Schmid, U. (2021). α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry. Journal of Applied Physics, 129(21), 214507. https://doi.org/10.1063/5.0051313 ( reposiTUm)

Pfusterschmied, G., Triendl, F., Schneider, M., & Schmid, U. (2021). Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights. Materials Science in Semiconductor Processing, 123(105504), 105504. https://doi.org/10.1016/j.mssp.2020.105504 ( reposiTUm)

Hajian, A., Konegger, T., Bielecki, T., Mieller, B., Rabe, T., Schwarz, S., Zellner, C., & Schmid, U. (2021). Wet chemical porosification with phosphate buffer solutions for permittivity reduction of LTCC substrates. Journal of Alloys and Compounds, 863(158059), 158059. https://doi.org/10.1016/j.jallcom.2020.158059 ( reposiTUm)

Haus, J. N., Schwerter, M., Schneider, M., Gäding, M., Leester-Schädel, M., Schmid, U., & Dietzel, A. (2021). Robust Pressure Sensor in SOI Technology with Butterﬂy Wiring for Airfoil Integration. Sensors, 21(18), 6140. https://doi.org/10.3390/s21186140 ( reposiTUm)

Watanabe, H., Chang, T.-F. M., Schneider, M., Schmid, U., Chen, C.-Y., Iida, S., Yamane, D., Ito, H., Machida, K., Masu, K., & Sone, M. (2021). Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem, 2(2), 216–223. https://doi.org/10.3390/electrochem2020015 ( reposiTUm)

Hafner, J. A., Benaglia, S., Richheimer, F., Teuschel, M., Maier, F. J., Artner, W., Wood, S., Platz, D., Schneider, M., Hradil, K., Castro, F. A., Garcia, R., & Schmid, U. (2021). Multi-scale characterisation of a ferroelectric polymer reveals the emergence of a morphological phase transition driven by temperature. Nature Communications, 12(1), 1–9. https://doi.org/10.1038/s41467-020-20407-6 ( reposiTUm)

Fait, J., Putz, S., Wachter, G., Schalko, J., Schmid, U., Arndt, M., & Trupke, M. (2021). High Finesse Microcavities in the Optical Telecom O-band. Applied Physics Letters, 119(22), 221112. https://doi.org/10.1063/5.0066620 ( reposiTUm)

Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). High performance piezoelectric AlN MEMS resonators for precise sensing in liquids. Elektrotechnik Und Informationstechnik, 137(3), 121–127. https://doi.org/10.1007/s00502-020-00794-w ( reposiTUm)

Schneider, M., Dorfmeister, M., Moll, P., Kaltenbacher, M., & Schmid, U. (2020). Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Journal of Microelectromechanical Systems, 29(5), 948–953. https://doi.org/10.1109/jmems.2020.3004243 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Zellner, C., Artner, W., Hradil, K., & Schmid, U. (2020). Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization. Materials Letters: X, 6, Article 100040. https://doi.org/10.1016/j.mlblux.2020.100040 ( reposiTUm)

Pfusterschmied, G., Weinmann, C., Schneider, M., Platz, D., Shen, N., Sader, J., & Schmid, U. (2020). Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids. Journal of Micromechanics and Microengineering, 30(7), 075004. https://doi.org/10.1088/1361-6439/ab8bc9 ( reposiTUm)

Maier, F. J., Schneider, M., Schrattenholzer, J., Artner, W., Hradil, K., Artemenko, A., Kromka, A., & Schmid, U. (2020). Flexoelectricity in polycrystalline TiO2 thin films. Acta Materialia, 190, 124–129. https://doi.org/10.1016/j.actamat.2020.03.018 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Fleckl, G., Schwarz, S., & Schmid, U. (2020). On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC. Thin Solid Films, 697(137837), 137837. https://doi.org/10.1016/j.tsf.2020.137837 ( reposiTUm)

Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., & Schmid, U. (2020). Influence of the AlN/Pt-ratio on the electro-mechanical properties ofmultilayered AlN/Pt thin film strain gauges at high temperatures. Sensors and Actuators A: Physical, 302(111805), 111805. https://doi.org/10.1016/j.sna.2019.111805 ( reposiTUm)

Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren. GIT, 64. JAHRGANG(4–5), 36–38. http://hdl.handle.net/20.500.12708/141563 ( reposiTUm)

Patocka, F., Schneidhofer, C., Dörr, N., Schneider, M., & Schmid, U. (2020). Novel MEMS Sensor for the Detection of Particles with Dielectric Properties in Aged Lubricating Oils. Sensors and Actuators A: Physical, 315(112290), 112290. https://doi.org/10.1016/j.sna.2020.112290 ( reposiTUm)

Triendl, F., Pfusterschmied, G., Pobegen, G., Konrath, J. P., & Schmid, U. (2020). Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 35(11), 115011. https://doi.org/10.1088/1361-6641/abae8d ( reposiTUm)

Hajian, A., Brehl, M., Koch, T., Zellner, C., Schwarz, S., Konegger, T., de Ligny, D., & Schmid, U. (2019). Wet-chemical porosification of LTCC substrates: Dissolution mechanism and mechanical properties. Microporous and Mesoporous Materials, 288(109593), 109593. https://doi.org/10.1016/j.micromeso.2019.109593 ( reposiTUm)

Patocka, F., Schlögl, M., Schneidhofer, C., Dörr, N., Schneider, M., & Schmid, U. (2019). Piezoelectrically Excited MEMS Resonators with Integrated Planar Coil for the Detection of Ferrous Particles in Liquids. Sensors and Actuators B: Chemical, 299(126957), 126957. https://doi.org/10.1016/j.snb.2019.126957 ( reposiTUm)

Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., & Schmid, U. (2019). Electro-mechanical Properties of Multilayered Aluminum Nitride and Platinum Thin Films at High Temperatures. Sensors and Actuators A: Physical, 293, 128–135. https://doi.org/10.1016/j.sna.2019.04.036 ( reposiTUm)

Hajian, A., Smetaczek, S., Zellner, C., Stöger-Pollach, M., Konegger, T., Limbeck, A., & Schmid, U. (2019). Tailored and deep porosification of LTCC substrates with phosphoric acid. Journal of the European Ceramic Society, 39(10), 3112–3119. https://doi.org/10.1016/j.jeurceramsoc.2019.04.026 ( reposiTUm)

Aghaie, A., Khanmohammadi, A., Hajian, A., Schmid, U., & Bagheri, H. (2019). Nonenzymatic Electrochemical Determination of Paraoxon Ethyl in Water and Fruits by Graphene-Based NiFe Bimetallic Phosphosulfide Nanocomposite as a Superior Sensing Layer. Food Analytical Methods, 12(7), 1545–1555. https://doi.org/10.1007/s12161-019-01486-8 ( reposiTUm)

Schmidt, R., Mayrhofer, P., Schmid, U., & Bittner, A. (2019). Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures. Journal of Applied Physics, 125(8), 084501. https://doi.org/10.1063/1.5050181 ( reposiTUm)

Lau, I., Hajian, A., Michler, F., Gold, G., Lurz, F., Schmid, U., Helmreich, K., Weigel, R., & Koelpin, A. (2019). Influence of the PCB Manufacturing Process on the Measurement Error of Planar Relative Permittivity Sensors Up To 100 GHz. IEEE Transactions on Microwave Theory and Techniques, 67(7), 2793–2804. https://doi.org/10.1109/tmtt.2019.2910114 ( reposiTUm)

Wachter, G., Kuhn, S., Minniberger, S., Salter, C., Asenbaum, P., Millen, J., Schneider, M., Schalko, J., Schmid, U., Felgner, A., Hüser, D., Arndt, M., & Trupke, M. (2019). Silicon microcavity arrays with open access and a finesse of half a million. Light: Science & Applications, 8(37). https://doi.org/10.1038/s41377-019-0145-y ( reposiTUm)

Hajian, A., Müftüoglu, D., Konegger, T., Schneider, M., & Schmid, U. (2019). On the porosification of LTCC substrates with sodium hydroxide. Composites Part B: Engineering, 157, 14–23. https://doi.org/10.1016/j.compositesb.2018.08.071 ( reposiTUm)

Triendl, F., Fleckl, G., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range. Journal of Vacuum Science & Technology B, 37(3), 032903. https://doi.org/10.1116/1.5094137 ( reposiTUm)

Dorfmeister, M., Schneider, M., & Schmid, U. (2019). 3D characterisation of piezoelectric bistable MEMS membranes during switching. Sensors and Actuators A: Physical, 298(111576), 111576. https://doi.org/10.1016/j.sna.2019.111576 ( reposiTUm)

Pfusterschmied, G., Patocka, F., Weinmann, C., Schneider, M., Platz, D., & Schmid, U. (2019). Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids. Sensors and Actuators A: Physical, 295, 84–92. https://doi.org/10.1016/j.sna.2019.05.031 ( reposiTUm)

Dorfmeister, M., Kössl, B., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab3185 ( reposiTUm)

Patocka, F., Schneider, M., Dörr, N., Schneidhofer, C., & Schmid, U. (2019). Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab062a ( reposiTUm)

Platz, D., & Schmid, U. (2019). Vibrational Modes in MEMS Resonators. Journal of Micromechanics and Microengineering, 29(12), 123001. https://doi.org/10.1088/1361-6439/ab4bad ( reposiTUm)

Schneider, M., Stöber, L., Konrath, J. P., Patocka, F., & Schmid, U. (2019). Argon bombardment of 4H silicon carbide substrates for tailored Schottky diode barrier heights. Materials Science Forum, 963, 506–510. https://doi.org/10.4028/www.scientific.net/msf.963.506 ( reposiTUm)

Hafner, J. A., Teuschel, M., Schneider, M., & Schmid, U. (2019). Origin of the strong temperature effect on the piezoelectric response of the ferroelectric (co-)polymer P(VDF70-TrFE30). Polymer, 170, 1–6. https://doi.org/10.1016/j.polymer.2019.02.064 ( reposiTUm)

Hafner, J. A., Schrattenholzer, J., Teuschel, M., Schneider, M., Platz, D., & Schmid, U. (2019). Modelling the distribution of BaTiO3 nanoparticles in a P(VDF70-TrFE30) polymer matrix for permittivity calculation. Polymer, 180, Article 121682. https://doi.org/10.34726/1061 ( reposiTUm)

Hajian, A., Stöger-Pollach, M., Schneider, M., Müftüoglu, D., Crunwell, F. K., & Schmid, U. (2018). Porosification behaviour of LTCC substrates with potassium hydroxide. Journal of the European Ceramic Society, 38(5), 2369–2377. https://doi.org/10.1016/j.jeurceramsoc.2018.01.017 ( reposiTUm)

Fischeneder, M., Kucera, M., Hofbauer, F., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback. Sensors and Actuators B: Chemical, 260, 198–203. https://doi.org/10.1016/j.snb.2018.01.001 ( reposiTUm)

Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Flow-through sensor based on piezoelectric MEMS resonator for thein-line monitoring of wine fermentation. Sensors and Actuators B: Chemical, 254, 291–298. https://doi.org/10.1016/j.snb.2017.07.096 ( reposiTUm)

Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids. Microsystem Technologies, 24(3), 1423–1431. https://doi.org/10.1007/s00542-017-3536-0 ( reposiTUm)

Iannacci, J., Serra, E., Sordo, G., Bonaldi, M., Borrielli, A., Schmid, U., Bittner, A., Schneider, M., Kuenzig, T., Schrag, G., Pandraud, G., & Sarro, P. M. (2018). MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing. Microsystem Technologies, 24(12), 5027–5036. https://doi.org/10.1007/s00542-018-3923-1 ( reposiTUm)

Dorfmeister, M., Schneider, M., & Schmid, U. (2018). Static and dynamic performance of bistable MEMS membranes. Sensors and Actuators A: Physical, 282, 259–268. https://doi.org/10.1016/j.sna.2018.09.038 ( reposiTUm)

Gillinger, M., Knobloch, T., Markovic, A., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications. Materials Science in Semiconductor Processing, 81, 1–6. https://doi.org/10.1016/j.mssp.2018.02.028 ( reposiTUm)

Leitgeb, M., Zellner, C., Lukschanderl, M., Schneider, M., & Schmid, U. (2018). A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H-Silicon Carbide. Journal of The Electrochemical Society, 165(9), E325–E329. https://doi.org/10.1149/2.0571809jes ( reposiTUm)

Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2018). Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Sensors, 18(11), 3842. https://doi.org/10.3390/s18113842 ( reposiTUm)

Gillinger, M., Shaposhnikov, K., Knobloch, T., Stöger-Pollach, M., Artner, W., Hradil, K., Schneider, M., Kaltenbacher, M., & Schmid, U. (2018). Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications. Applied Surface Science, 435, 432–437. https://doi.org/10.1016/j.apsusc.2017.11.113 ( reposiTUm)

Schmid, P., Zarfl, C., Triendl, F., Maier, F. J., Schwarz, S., Schneider, M., & Schmid, U. (2018). Impact of adhesion promoters and sputter parameters on theelectro-mechanical properties of Pt thin films at high temperatures. Sensors and Actuators A: Physical, 285, 149–157. https://doi.org/10.1016/j.sna.2018.11.010 ( reposiTUm)

Fischeneder, M., Bittner, A., Schneider, M., & Schmid, U. (2018). Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films. Materials Research Express. https://doi.org/10.1088/2053-1591/aac9db ( reposiTUm)

Wistrela, E., Schmied, I., Schneider, M., Gillinger, M., Mayrhofer, P. M., Bittner, A., & Schmid, U. (2018). Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1−x N thin ﬁlms. Thin Solid Films, 648, 76–82. https://doi.org/10.1016/j.tsf.2018.01.003 ( reposiTUm)

Leitgeb, M. R., Zellner, C., Hufnagl, C., Schneider, M., Schwab, S., Hutter, H., & Schmid, U. (2017). Stacked Layers of Different Porosity in 4H SiC Substrates Applying a Photoelectrochemical Approach. Journal of The Electrochemical Society, 164(12), 337–347. https://doi.org/10.1149/2.1081712jes ( reposiTUm)

Reiner, M., Schellander, J., Denifl, G., Stadtmueller, M., Schmid, M., Frischmuth, T., Schmid, U., Pietschnig, R., & Ostermaier, C. (2017). Physical-chemical stability of fluorinated III-N surfaces: Towards the understanding of the (0001) AlₓGa₁₋ₓN surface donor modification by fluorination. Journal of Applied Physics, 121, 2257041–2257046. http://hdl.handle.net/20.500.12708/146671 ( reposiTUm)

Pfusterschmied, G., Toledo, J., Kucera, M., Steindl, W., Zemann, S., Ruiz-Díez, V., Schneider, M., Bittner, A., Sanchez-Rojas, J., & Schmid, U. (2017). Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines, 8(7), 200. https://doi.org/10.3390/mi8070200 ( reposiTUm)

Steinhäußer, F., Talai, A., Göltl, G., Steiger-Thirsfeld, A., Bittner, A., Weigel, R., Koelpin, A., & Schmid, U. (2017). Concentration and temperature dependent selectivity of the LTCC porosification process with phosphoric acid. Ceramics International, 43(1), 714–721. https://doi.org/10.1016/j.ceramint.2016.09.218 ( reposiTUm)

Fischeneder, M., Wistrela, E., Bittner, A., Schneider, M., & Schmid, U. (2017). Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures. Materials Science in Semiconductor Processing, 71, 283–289. https://doi.org/10.1016/j.mssp.2017.08.010 ( reposiTUm)

Udvardi, P., Radó, J., Straszner, A., Ferencz, J., Hajnal, Z., Soleimani, S., Schneider, M., Schmid, U., Révész, P., & Volk, J. (2017). Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems. Micromachines, 8(10), 311. https://doi.org/10.3390/mi8100311 ( reposiTUm)

Zarfl, C., Schwab, S., Schmid, P., Hutter, H., & Schmid, U. (2017). Influence of the sputter gas composition on the electromechanicalproperties and on the stability of TiAlNxO1-xthin films. Sensors and Actuators A: Physical, 267, 552–559. https://doi.org/10.1016/j.sna.2017.10.028 ( reposiTUm)

Toledo, J., Ruiz-Díez, V., Díaz, A., Ruiz, D., Donoso, A., Bellido, J. C., Wistrela, E., Kucera, M., Schmid, U., Hernando-Garcia, J., & Sànchez-Rojas, J. L. (2017). Design and Characterization of In-Plane Piezoelectric Microactuators. Actuators, 6(2), 1–13. https://doi.org/10.3390/act6020019 ( reposiTUm)

Camarda, A., Sordo, G., Iannacci, J., Schneider, M., Schmid, U., Tartagni, M., & Romani, A. (2017). Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlN. Journal of Microelectromechanical Systems, 26(5), 1110–1121. https://doi.org/10.1109/jmems.2017.2709407 ( reposiTUm)

Grosser, M., Seidel, H., & Schmid, U. (2017). Microstructure and Mechanical Properties of Sputter Deposited Tantalum Nitride Thin Films after High Temperature Loading. Thin Solid Films, 629, 69–78. https://doi.org/10.1016/j.tsf.2017.03.030 ( reposiTUm)

Wistrela, E., Bittner, A., Schneider, M., Reissner, M., & Schmid, U. (2017). Magnetic and Microstructural Properties of Sputter Deposited Cr-doped Aluminium Nitride Thin Films on Silicon Substrates. Journal of Applied Physics, 121(11), 115302. https://doi.org/10.1063/1.4978748 ( reposiTUm)

Mayrhofer, P., Rehlendt, C., Fischeneder, M., Kucera, M., Wistrela, E., Bittner, A., & Schmid, U. (2017). ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes. Journal of Microelectromechanical Systems, VOL. 26(1), 102–112. http://hdl.handle.net/20.500.12708/146290 ( reposiTUm)

Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2017). Porous single crystalline 4H silicon carbide rugate mirrors. APL Materials, 5, 106106-1-106106–6. https://doi.org/10.1063/1.5001876 ( reposiTUm)

Kuhn, S., Wachter, G., Wieser, F.-F., Millen, J., Schneider, M., Schalko, J., Schmid, U., Trupke, M., & Arndt, M. (2017). Nanoparticle detection in an open-access silicon microcavity. Applied Physics Letters, 111(25), Article 253107. https://doi.org/10.1063/1.5008492 ( reposiTUm)

Leitgeb, M., Zellner, C., Schneider, M., Schwab, S., Hutter, H., & Schmid, U. (2017). Metal assisted photochemical etching of 4H silicon carbide. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/aa8942 ( reposiTUm)

Gillinger, M., Shaposhnikov, K., Knobloch, T., Schneider, M., Kaltenbacher, M., & Schmid, U. (2016). Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire. Applied Physics Letters, 108(23), Article 231601. https://doi.org/10.1063/1.4953259 ( reposiTUm)

Wang, W. B., Fu, Y. Q., Chen, J. J., Xuan, W. P., Chen, J. K., Wang, X. Z., Mayrhofer, P., Duan, P. F., Bittner, A., Schmid, U., & Luo, J. K. (2016). AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance. Journal of Micromechanics and Microengineering, 26(7), 075006. https://doi.org/10.1088/0960-1317/26/7/075006 ( reposiTUm)

Mayrhofer, P. M., Persson, P. O. Å., Bittner, A., & Schmid, U. (2016). Properties of ScxAl1‑xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading. Microsystem Technologies, 22(7), 1679–1689. https://doi.org/10.1007/s00542-015-2798-7 ( reposiTUm)

Stöber, L., Konrath, J. P., Haberl, V., Patocka, F., Schneider, M., & Schmid, U. (2016). Nitrogen incorporation in sputter deposited molybdenum nitride thin films. Journal of Vacuum Science and Technology A, 34(2), 021513. https://doi.org/10.1116/1.4941141 ( reposiTUm)

Stöber, L., Konrath, J. P., Patocka, F., Schneider, M., & Schmid, U. (2016). Controlling 4H-SiC Schottky Barriers by Molybdenum and Molybdenum Nitride as Contact Materials. IEEE Transactions on Electron Devices, 63(2), 578–583. https://doi.org/10.1109/ted.2015.2504604 ( reposiTUm)

Leitgeb, M., Backes, A., Schneider, M., Zellern, C., & Schmid, U. (2016). Communication — The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon Carbide. ECS Journal of Solid State Science and Technology. https://doi.org/10.1149/2.0021603jss ( reposiTUm)

Backes, A., Bittner, A., Leitgeb, M., & Schmid, U. (2016). Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon. Scripta Materialia, 114, 27–30. http://hdl.handle.net/20.500.12708/149610 ( reposiTUm)

Toledo, J., Manzaneque, T., Ruiz-Díez, V., Jimenez-Molinos, F., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2016). Comparison of in‑plane and out‑of‑plane piezoelectric microresonators for real‑time monitoring of engine oil contamination with diesel. Microsystem Technologies, 22, 1781–1790. http://hdl.handle.net/20.500.12708/149607 ( reposiTUm)

Wistrela, E., Schneider, M., Bittner, A., & Schmid, U. (2016). Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric properties. Microsystem Technologies, 22(7), 1691–1700. https://doi.org/10.1007/s00542-015-2799-6 ( reposiTUm)

Ruiz, D., Donoso, A., Bellido, J. C., Kucera, M., Schmid, U., & Sánchez-Rojas, J. L. (2016). Design of piezoelectric microtransducers based on the topology optimization method. Microsystem Technologies, 22(7), 1733–1740. https://doi.org/10.1007/s00542-016-2828-0 ( reposiTUm)

Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2016). Inductively-coupled plasma-enhanced chemical vapour deposition ofhydrogenated amorphous silicon carbide thin films for MEMS. Sensors and Actuators A: Physical, 247, 647–655. https://doi.org/10.1016/j.sna.2016.05.042 ( reposiTUm)

Frischmuth, T., Schneider, M., Bogdanović Radović, I., Siketić, Z., Maurer, D., Grille, T., & Schmid, U. (2016). Lowtemperature deposition of a-SiC:H thin films applying a dual plasma source process. Thin Solid Films, 616, 164–171. https://doi.org/10.1016/j.tsf.2016.07.030 ( reposiTUm)

Backes, A., Leitgeb, M., Bittner, A., & Schmid, U. (2016). Temperature Dependent Pore Formation in Metal Assisted Chemical Etching of Silicon. ECS Journal of Solid State Science and Technology, 5(12), P653–P656. https://doi.org/10.1149/2.0131612jss ( reposiTUm)

Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2016). A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC Substrates. ECS Journal of Solid State Science and Technology, 5(10), P556–P564. https://doi.org/10.1149/2.0041610jss ( reposiTUm)

Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sánchez-Rojas, J. L. (2016). Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids. Journal of Micromechanics and Microengineering, 26(8), 084012. https://doi.org/10.1088/0960-1317/26/8/084012 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Steindl, W., Manzaneque, T., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids. Sensors and Actuators B: Chemical, 237, 999–1006. https://doi.org/10.1016/j.snb.2016.02.029 ( reposiTUm)

Dergez, D., Schneider, M., Bittner, A., Pawlak, N., & Schmid, U. (2016). Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films. Thin Solid Films, 606, 7–12. https://doi.org/10.1016/j.tsf.2016.03.029 ( reposiTUm)

Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2016). High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin films. Thin Solid Films, 611, 6–11. https://doi.org/10.1016/j.tsf.2016.05.001 ( reposiTUm)

Ruiz-Díez, V., Hernando-García, J., Toledo, J., Manzaneque, T., Kucera, M., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2016). Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media. Journal of Micromechanics and Microengineering, 26(8), 084008. https://doi.org/10.1088/0960-1317/26/8/084008 ( reposiTUm)

Steinhäußer, F., Talai, A., Sandulache, G., Weigel, R., Koelpin, A., Hansal, W., Bittner, A., & Schmid, U. (2016). Pulse plated silver metallization on porosified LTCC substrates for high frequency applications. Microelectronics Reliability, 60, 93–100. https://doi.org/10.1016/j.microrel.2016.02.010 ( reposiTUm)

Steinhäußer, F., Talai, A., Weigel, R., Koelpin, A., Bittner, A., & Schmid, U. (2016). Permittivity Reduction and Surface Modification by Porosification of LTCC. Ceramics International, 42(7), 8925–8931. https://doi.org/10.1016/j.ceramint.2016.02.149 ( reposiTUm)

Kiziroglou, M. E., Elefsiniotis, A., Kokorakis, N., Wright, S. W., Toh, T. T., Mitcheson, P. D., Schmid, U., Becker, Th., & Yeatman, E. M. (2016). Scaling and super‑cooling in heat storage harvesting devices. Microsystem Technologies, 22(7), 1905–1914. https://doi.org/10.1007/s00542-016-2889-0 ( reposiTUm)

Iannacci, J., Sordo, G., Serra, E., & Schmid, U. (2016). The MEMS four‑leaf clover wideband vibration energy harvesting device: design concept and experimental verification. Microsystem Technologies, 22(7), 1865–1881. https://doi.org/10.1007/s00542-016-2886-3 ( reposiTUm)

Sordo, G., Serra, E., Schmid, U., & Iannacci, J. (2016). Optimization method for designing multimodal piezoelectric MEMS energy harvesters. Microsystem Technologies, 22(7), 1811–1820. https://doi.org/10.1007/s00542-016-2848-9 ( reposiTUm)

Dergez, D., Schalko, J., Löffler, S., Bittner, A., & Schmid, U. (2015). Impact of auxiliary capacitively coupled plasma on the properties of ICP-CVD deposited a-SiNₓ:H thin films. Sensors and Actuators A: Physical, 224, 156–162. https://doi.org/10.1016/j.sna.2015.02.013 ( reposiTUm)

Mayrhofer, P. M., Euchner, H., Bittner, A., & Schmid, U. (2015). Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin ﬁlms applying Laser Doppler Vibrometry and FEM simulations. Sensors and Actuators A: Physical, 222, 301–308. https://doi.org/10.1016/j.sna.2014.10.024 ( reposiTUm)

Mayrhofer, P., Riedl, H., Euchner, H., Stöger-Pollach, M., Mayrhofer, P. H., Bittner, A., & Schmid, U. (2015). Microstructure and piezoelectric response of YxAl1−xN thin films. Acta Materialia, 100, 81–89. https://doi.org/10.1016/j.actamat.2015.08.019 ( reposiTUm)

Steinhäußer, F., Hradil, K., Schwarz, S., Artner, W., Stöger-Pollach, M., Steiger-Thirsfeld, A., Bittner, A., & Schmid, U. (2015). Wet chemical porosification of LTCC in phosphoric acid: Anorthite forming tapes. Journal of the European Ceramic Society, 35(15), 4181–4188. https://doi.org/10.1016/j.jeurceramsoc.2015.06.032 ( reposiTUm)

Steinhäußer, F., Hradil, K., Schwarz, S., Artner, W., Stöger-Pollach, M., Steiger-Thirsfeld, A., Bittner, A., & Schmid, U. (2015). Wet chemical porosification of LTCC in phosphoric acid: Celsian forming tapes. Journal of the European Ceramic Society, 35(16), 4465–4473. https://doi.org/10.1016/j.jeurceramsoc.2015.08.007 ( reposiTUm)

Ruiz-Díez, V., Hernando-García, J., Manzaneque, T., Kucera, M., Schmid, U., & Sánchez-Rojas, J. L. (2015). Modelling out-of-plane and in-plane resonant modes of microplates in liquid media. Journal of Micromechanics and Microengineering, 25(7), 074005. https://doi.org/10.1088/0960-1317/25/7/074005 ( reposiTUm)

Ruiz-Díez, V., Hernando-García, J., Manzaneque, T., Kucera, M., Schmid, U., & Sánchez-Rojas, J. L. (2015). Viscous and acoustic losses in length-extensional microplate resonators in liquid media. Applied Physics Letters, 106(8), 083510. https://doi.org/10.1063/1.4913885 ( reposiTUm)

Talai, A., Steinhäußer, F., Bittner, A., Schmid, U., Weigel, R., & Koelpin, A. (2015). A method for the determination of the complex permittivity by detuned ring resonators for bulk materials up to 110 GHz. International Journal of Microwave and Wireless Technologies, 7(3–4), 251–260. https://doi.org/10.1017/s1759078715000483 ( reposiTUm)

Stöber, L., Konrath, J. P., Krivec, S., Patocka, F., Schwarz, S., Bittner, A., Schneider, M., & Schmid, U. (2015). Impact of sputter deposition parameters on molybdenum nitride thin film properties. Journal of Micromechanics and Microengineering, 25(7), 074001. https://doi.org/10.1088/0960-1317/25/7/074001 ( reposiTUm)

Zarfl, C., Schmid, P., Balogh, G., & Schmid, U. (2015). Electro-mechanical properties and oxidation behaviour of TiAlNxOythin films at high temperatures. SENSORS AND ACTUATORS A-PHYSICAL, 226, 143–148. https://doi.org/10.1016/j.sna.2015.02.026 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2015). Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 48(40), 405301. https://doi.org/10.1088/0022-3727/48/40/405301 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2015). Impact of film thickness on the temperature-activated leakagecurrent behavior of sputtered aluminum nitride thin films. SENSORS AND ACTUATORS A-PHYSICAL, 224, 177–184. https://doi.org/10.1016/j.sna.2015.01.032 ( reposiTUm)

Gillinger, M., Schneider, M., Bittner, A., Nicolay, P., & Schmid, U. (2015). Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films. Journal of Applied Physics, 117(6), 065303. https://doi.org/10.1063/1.4907208 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sánchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media. Applied Physics Letters, 107(5), 053506. https://doi.org/10.1063/1.4928429 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., & Schmid, U. (2015). Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids. Journal of Micromechanics and Microengineering, 25(10), 105014. https://doi.org/10.1088/0960-1317/25/10/105014 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2015). Beam-clipping-induced diffraction effects in MEMS laser scanners for autostereoscopic outdoor displays. SENSORS AND ACTUATORS A-PHYSICAL, 233, 582–589. https://doi.org/10.1016/j.sna.2015.06.024 ( reposiTUm)

Dergez, D., Schneider, M., Bittner, A., & Schmid, U. (2015). Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films. Thin Solid Films, 589, 227–232. https://doi.org/10.1016/j.tsf.2015.05.028 ( reposiTUm)

Schneider, M., Bittner, A., Klein, A., & Schmid, U. (2015). Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin films. Microelectronic Engineering, 140, 47–51. https://doi.org/10.1016/j.mee.2015.06.001 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sànchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 107, 0535061–0535065. https://doi.org/10.1063/1.4928429 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 104(23), 233501. https://doi.org/10.1063/1.4882177 ( reposiTUm)

Beigelbeck, R., Schneider, M., Schalko, J., Bittner, A., & Schmid, U. (2014). A two-step load-deflection procedure applicable to extract the Young’s modulus and the residual tensile stress of circularly shaped thin-film diaphragms. Journal of Applied Physics, 116(114905), 11490501–11490513. http://hdl.handle.net/20.500.12708/157233 ( reposiTUm)

Wang, W., Mayrhofer, P., He, X., Gillinger, M., Ye, Z., Wang, X., Bittner, A., Schmid, U., & Luo, J. K. (2014). High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient. Applied Physics Letters, 105(13), Article 133502. https://doi.org/10.1063/1.4896853 ( reposiTUm)

Bohnenberger, T., Rafailovic, L. D., Weilach, C., Hubmayr, D., & Schmid, U. (2014). Thin ﬁlms from functionalized carbon nanotubes using the layer-by-layer technique. Thin Solid Films, 551, 68–73. https://doi.org/10.1016/j.tsf.2013.11.107 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Riel, T., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2014). Design and evaluation of a large-scale autostereoscopic multi-view laser display for outdoor applications. Optics Express, 22(22), 27063. https://doi.org/10.1364/oe.22.027063 ( reposiTUm)

Thangaraj, K., Elefsiniots, A., Becker, T., Schmid, U., Lees, J., Featherston, C. A., & Pullin, R. (2014). Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester. Microsystem Technologies, 20(4–5), 701–707. https://doi.org/10.1007/s00542-013-2009-3 ( reposiTUm)

Mayrhofer, P. M., Eisenmenger-Sittner, C., Stöger-Pollach, M., Euchner, H., Bittner, A., & Schmid, U. (2014). The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1xN thin films. Journal of Applied Physics, 115(19), 193505. https://doi.org/10.1063/1.4876260 ( reposiTUm)

Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. Optics Express, 22(18), 2212001–2212010. http://hdl.handle.net/20.500.12708/157232 ( reposiTUm)

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Jachimowicz, A., Schalko, J., Bittner, A., & Schmid, U. (2014). Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode. SENSORS AND ACTUATORS B-CHEMICAL, 200, 235–244. http://hdl.handle.net/20.500.12708/157230 ( reposiTUm)

Steinhäußer, F., Talai, A., Steiger-Thirsfeld, A., Koelpin, A., Weigel, R., Bittner, A., & Schmid, U. (2014). Graphical based characterisation and modelling of material gradients in porosiﬁed LTCC. Journal of the European Ceramic Society, 34(11), 2833–2838. https://doi.org/10.1016/j.jeurceramsoc.2014.01.021 ( reposiTUm)

Alamin Dow, A. B., Schmid, U., & Kherani, N. P. (2014). Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 933–944. https://doi.org/10.1007/s00542-014-2093-z ( reposiTUm)

Bohnenberger, T., & Schmid, U. (2014). Layer-by-layer approach for deposition of pure carbon nanotubes and composite ﬁlms for use as electrodes in electrochemical devices. Thin Solid Films, 565, 116–121. https://doi.org/10.1016/j.tsf.2014.05.055 ( reposiTUm)

Manzaneque, T., Ruiz-Díez, V., Hernando-García, J., Wistrela, E., Kucera, M., Schmid, U., & Sánchez-Rojas, J. L. (2014). Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing. SENSORS AND ACTUATORS A-PHYSICAL, 220, 305–315. https://doi.org/10.1016/j.sna.2014.10.002 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2014). Thickness dependence of Young’s modulus and residual stress of sputtered aluminum nitride thin films. Applied Physics Letters, 105(20), 201912. https://doi.org/10.1063/1.4902448 ( reposiTUm)

Fricke, S., Friedberger, A., Seidel, H., & Schmid, U. (2014). High temperature measurement set-up for the electro-mechanical characterization of robust thin ﬁlm systems. Measurement Science and Technology, 25(1), 015007. https://doi.org/10.1088/0957-0233/25/1/015007 ( reposiTUm)

Elefsiniotis, A., Kokorakis, N., Becker, T., & Schmid, U. (2014). A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft. SENSORS AND ACTUATORS A-PHYSICAL, 206, 159–164. https://doi.org/10.1016/j.sna.2013.11.036 ( reposiTUm)

Backes, A., & Schmid, U. (2014). Impact of doping level on the metal assisted chemical etching of p-type silicon. SENSORS AND ACTUATORS B-CHEMICAL, 193, 883–887. https://doi.org/10.1016/j.snb.2013.11.009 ( reposiTUm)

Elefsiniotis, A., Becker, Th., & Schmid, U. (2014). Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft. Journal of Electronic Materials, 43(6), 1809–1814. https://doi.org/10.1007/s11664-013-2880-9 ( reposiTUm)

Alamin Dow, A. B., Bittner, A., Schmid, U., & Kherani, N. P. (2014). Design, fabrication and testing of a piezoelectric energy microgenerator. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 1035–1040. https://doi.org/10.1007/s00542-014-2116-9 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2014). Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approach. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 751–757. https://doi.org/10.1007/s00542-013-2027-1 ( reposiTUm)

Ababneh, A., Al-Omari, A. N., Dagamseh, A. M. K., Qiu, H. C., Feili, D., Ruiz-Díez, V., Manzaneque, T., Hernando, J., Sánchez-Rojas, J. L., Bittner, A., Schmid, U., & Seidel, H. (2014). Electrical characterization of micromachined AlN resonators at various back pressures. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 663–670. https://doi.org/10.1007/s00542-013-2003-9 ( reposiTUm)

Manzaneque, T., Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Al-Omari, A. N., Kucera, M., Bittner, A., Schmid, U., Seidel, H., & Sánchez-Rojas, J. L. (2014). Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modes. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 691–699. https://doi.org/10.1007/s00542-013-2008-4 ( reposiTUm)

Kucera, M., Hofbauer, F., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., & Schmid, U. (2014). Lock‑in amplifier powered analogue Q‑control circuit for self‑actuated self‑sensing piezoelectric MEMS resonators. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(4–5), 615–625. https://doi.org/10.1007/s00542-013-1997-3 ( reposiTUm)

Lugstein, A., Mijić, M., Burchhart, T., Zeiner, C., Langegger, R., Schneider, M., Schmid, U., & Bertagnolli, E. (2013). In situ monitoring of Joule heating effects in germanium nanowires by -Raman spectroscopy. Nanotechnology, 24(6), 065701. https://doi.org/10.1088/0957-4484/24/6/065701 ( reposiTUm)

Dergez, D., Schalko, J., Bittner, A., & Schmid, U. (2013). Fundamental properties of a-SiNx:H thin films deposited by ICP-PECVD for MEMS applications. Applied Surface Science, 284, 348–353. https://doi.org/10.1016/j.apsusc.2013.07.104 ( reposiTUm)

Elefsiniotis, A., Samson, D., Becker, T., & Schmid, U. (2013). Investigation of the Performance of Thermoelectric Energy Harvesters Under Real Flight Conditions. Journal of Electronic Materials, 42(7), 2301–2305. http://hdl.handle.net/20.500.12708/155604 ( reposiTUm)

Elefsiniotis, A., Kiziroglou, M. E., Wright, S. W., Toh, T. T., Becker, T., Yeatman, E. M., & Schmid, U. (2013). Performance evaluation of a thermoelectric energy harvesting device using various phase change materials. Journal of Physics: Conference Series, 476, 012020. https://doi.org/10.1088/1742-6596/476/1/012020 ( reposiTUm)

Kucera, M., Manzaneque, T., Sánchez-Rojas, J. L., Bittner, A., & Schmid, U. (2013). Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop. Journal of Micromechanics and Microengineering, 23(8), 085009. https://doi.org/10.1088/0960-1317/23/8/085009 ( reposiTUm)

Dow, A. B. A., Popov, C., Schmid, U., & Kherani, N. P. (2013). Super-High-Frequency SAW Transducer Utilizing AlN/Ultrananocrystalline Diamond Architectures. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 60(8), 1581–1586. https://doi.org/10.1109/tuffc.2013.2738 ( reposiTUm)

Elefsiniotis, A., Weiss, M., Becker, Th., & Schmid, U. (2013). Efficient Power Management for Energy-Autonomous Wireless Sensor Nodes for Aeronautical Applications. Journal of Electronic Materials, 42(7), 1907–1910. https://doi.org/10.1007/s11664-012-2468-9 ( reposiTUm)

Mayrhofer, P. M., Eisenmenger-Sittner, C., Euchner, H., Bittner, A., & Schmid, U. (2013). Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1-xN thin films. Applied Physics Letters, 103(25), 251903. https://doi.org/10.1063/1.4850735 ( reposiTUm)

Ruiz-Díez, V., Manzaneque, T., Hernando-García, J., Ababneh, A., Kucera, M., Schmid, U., Seidel, H., & Sánchez-Rojas, J. L. (2013). Design and characterization of AlN-based in-plane microplate resonators. Journal of Micromechanics and Microengineering, 23(7), 074003. https://doi.org/10.1088/0960-1317/23/7/074003 ( reposiTUm)

Alamin Dow, A. B., Ahmed, A., Popov, C., Schmid, U., & Kherani, N. P. (2012). Aluminium nitride/nanodiamond structures for high-frequency surface acoustic wave nanotransducers. Micro and Nano Letters, 7(10), 1030–1032. https://doi.org/10.1049/mnl.2012.0587 ( reposiTUm)

Schneider, M., Strunz, T., Bittner, A., & Schmid, U. (2012). Impact of Sputter Deposition Parameters on the Leakage Current Behavior of Aluminum Nitride Thin Films. Advances in Science and Technology. https://doi.org/10.4028/www.scientific.net/ast.77.29 ( reposiTUm)

Zeilmann, C., Haas, T., Backes, A., & Schmid, U. (2012). LTCC Based Microfluidic Mass Flow Sensor Concept. Journal of Microelectronics and Electronic Packaging, 9(2), 87–96. https://doi.org/10.4071/imaps.331 ( reposiTUm)

Samson, D., Kluge, M., Fuss, T., Schmid, U., & Becker, Th. (2012). Flight Test Results of a Thermoelectric Energy Harvester for Aircraft. Journal of Electronic Materials, 41(6), 1134–1137. https://doi.org/10.1007/s11664-012-1928-6 ( reposiTUm)

Grosser, M., Münch, M., Seidel, H., Bienert, C., Roosen, A., & Schmid, U. (2012). The impact of substrate properties and thermal annealing on tantalum nitride thin films. Applied Surface Science, 258(7), 2894–2900. https://doi.org/10.1016/j.apsusc.2011.11.003 ( reposiTUm)

Bohnenberger, T., Steinhäußer, F., Matovic, J., & Schmid, U. (2012). Platinated ultrathin films made of carbon nanotubes. Microsystem Technologies, 18(7–8), 863–868. https://doi.org/10.1007/s00542-011-1391-y ( reposiTUm)

Matovic, J., Adamovic, N., Radovanovic, F., Jakšić, Z., & Schmid, U. (2012). Field effect transistor based on ions as charge carriers. Sensors and Actuators B: Chemical, 170, 137–142. https://doi.org/10.1016/j.snb.2011.03.011 ( reposiTUm)

Schmid, U., Becker, T., & Michel, B. (2012). Special issue of the conference “Smart Sensors, Actuators andMEMS”, within the SPIE EUROPE Symposium “MICROTECHNOLOGIES” Prague, Czech Republic, 18-20 April 2011. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 833–833. https://doi.org/10.1007/s00542-012-1476-2 ( reposiTUm)

Schneider, M., Bittner, A., Patocka, F., Stöger-Pollach, M., Halwax, E., & Schmid, U. (2012). Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AIN thin films. Applied Physics Letters, 101(22), 221602. https://doi.org/10.1063/1.4768951 ( reposiTUm)

Dow, A. B. A., Lin, H., Schneider, M., Petkov, C., Bittner, A., Ahmed, A., Popov, C., Schmid, U., & Kherani, N. P. (2012). Ultrananocrystalline Diamond-Based High-Velocity SAW Device Fabricated by Electron Beam Lithography. IEEE Transactions on Nanotechnology, 11(5), 979–984. https://doi.org/10.1109/tnano.2012.2210731 ( reposiTUm)

Kulygin, A., Kirsch, C., Schwarz, P., Schmid, U., & Seidel, H. (2012). Decoupled Surface Micromachined Gyroscope With Single-Point Suspension. Journal of Microelectromechanical Systems, 21(1), 206–216. https://doi.org/10.1109/jmems.2011.2170816 ( reposiTUm)

Alamin Dow, A. B., Schneider, M., Koo, D., Al-Rubaye, H. A., Bittner, A., Schmid, U., & Kherani, N. (2012). Modeling the performance of a micromachined piezoelectric energy harvester. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 1035–1043. https://doi.org/10.1007/s00542-012-1436-x ( reposiTUm)

Bittner, A., Pagel, N., Seidel, H., & Schmid, U. (2012). Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 879–884. https://doi.org/10.1007/s00542-011-1402-z ( reposiTUm)

Oliver, M. J., Hernando-García, J., Ababneh, A., Seidel, H., Schmid, U., Andrés, J. P., Pobedinskas, P., Haenen, K., & Sánchez-Rojas, J. L. (2012). Resonantly excited AlN-based microcantilevers for immunosensing. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 1089–1094. https://doi.org/10.1007/s00542-012-1444-x ( reposiTUm)

Ruiz, V., Hernando-García, J., Ababneh, A., Seidel, H., Schmid, U., & Sánchez-Rojas, J. L. (2012). Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(7–8), 997–1001. https://doi.org/10.1007/s00542-012-1428-x ( reposiTUm)

Ababneh, A., Alsumady, M., Seidel, H., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Bittner, A., & Schmid, U. (2012). c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes. Applied Surface Science, 259, 59–65. http://hdl.handle.net/20.500.12708/164074 ( reposiTUm)

Fricke, S., Friedberger, A., Seidel, H., & Schmid, U. (2012). A robust pressure sensor for harsh environmental applications. SENSORS AND ACTUATORS A-PHYSICAL, 184, 16–21. https://doi.org/10.1016/j.sna.2012.05.043 ( reposiTUm)

Manzaneque, T., Hernando-García, J., Ababneh, A., Schwarz, P., Seidel, H., Schmid, U., & Sánchez-Rojas, J. L. (2011). Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop. Journal of Micromechanics and Microengineering, 21(2), 025007. https://doi.org/10.1088/0960-1317/21/2/025007 ( reposiTUm)

Samson, D., Kluge, M., Becker, Th., & Schmid, U. (2011). Wireless sensor node powered by aircraft specific thermoelectric energy harvesting. Sensors and Actuators A: Physical, 172(1), 240–244. https://doi.org/10.1016/j.sna.2010.12.020 ( reposiTUm)

Bittner, A., Seidel, H., & Schmid, U. (2011). Permittivity of modified polyimide layers on LTCC. Microelectronic Engineering, 88(9), 2977–2980. https://doi.org/10.1016/j.mee.2011.04.053 ( reposiTUm)

Alamin Dow, A. B., Schmid, U., & Kherani, N. P. (2011). Analysis and modeling of a piezoelectric energy harvester stimulated by β-emitting radioisotopes. Smart Materials and Structures, 20(11), 115019. https://doi.org/10.1088/0964-1726/20/11/115019 ( reposiTUm)

Alamin Dow, A. B., Schmid, U., & Kherani, N. P. (2011). Analysis of a Micromachined Piezoelectric Energy Harvester. SPIE Newsroom. https://doi.org/10.1117/2.1201112.003998 ( reposiTUm)

Adamovic, N., & Schmid, U. (2011). Potential of plasmonics in photovoltaic solar cells. Elektrotechnik Und Informationstechnik : E & i, 128(10), 342–347. https://doi.org/10.1007/s00502-011-0043-3 ( reposiTUm)

Bolzmacher, C., Bauer, K., Schmid, U., Hafez, M., & Seidel, H. (2010). Displacement amplification of piezoelectric microactuators with a micromachined leverage unit. Sensors and Actuators A: Physical, 157(1), 61–67. https://doi.org/10.1016/j.sna.2009.10.014 ( reposiTUm)

Becker, T., Schmid, U., & Michel, B. (2010). Editorial - Special Issue of the Conference “Smart Sensors, Actuators and MEMS”, within the SPIE Europe Symposium “Microtechnologies for the New Millennium” Dresden, Germany, 4-6 May 2009. Microsystem Technologies, 16(5), 655–655. https://doi.org/10.1007/s00542-010-1061-5 ( reposiTUm)

Schmid, U. (2010). Guest Editorial: Microactuators for Fluidic Applications. Journal of Microelectronics and Electronic Packaging, 6(4), 188. http://hdl.handle.net/20.500.12708/168239 ( reposiTUm)

Klein, S., Seidel, H., Bittner, A., & Schmid, U. (2010). CMOS-Compatible RF-MEMS Switches. Microsystems Technology in Germany 2010, 2010, 56–57. http://hdl.handle.net/20.500.12708/168237 ( reposiTUm)

Samson, D., Kluge, M., Becker, Th., Otterpohl, T., & Schmid, U. (2010). Energieautonomer Funknetzwerkknoten für Luftfahrzeuge. Elektrotechnik Und Informationstechnik, 127(6), 176–180. https://doi.org/10.1007/s00502-010-0740-3 ( reposiTUm)

Grosser, M., Münch, M., Brenner, J., Wilke, M., Seidel, H., Bienert, C., Roosen, A., & Schmid, U. (2010). Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering. Microsystem Technologies, 16(5), 825–836. https://doi.org/10.1007/s00542-009-0993-0 ( reposiTUm)

Samson, D., Otterpohl, T., Kluge, M., Schmid, U., & Becker, Th. (2010). Aircraft-Specific Thermoelectric Generator Module. Journal of Electronic Materials, 39(9), 2092–2095. https://doi.org/10.1007/s11664-009-0997-7 ( reposiTUm)

Samson, D., Kluge, M., Becker, T., & Schmid, U. (2010). Energy Harvesting for Remote Monitoring of Aircraft Seats. Sensor Letters, 8(2), 328–335. https://doi.org/10.1166/sl.2010.1273 ( reposiTUm)

Grosser, M., & Schmid, U. (2010). The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films. Applied Surface Science, 256(14), 4564–4569. https://doi.org/10.1016/j.apsusc.2010.02.048 ( reposiTUm)

Bolzmacher, C., Bauer, K., Schmid, U., Hafez, M., & Seidel, H. (2010). Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 16(5), 847–853. https://doi.org/10.1007/s00542-009-1008-x ( reposiTUm)

Manzaneque, T., Hernando, J., Rodríguez-Aragón, L., Ababneh, A., Seidel, H., Schmid, U., & Sánchez-Rojas, J. L. (2010). Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 16(5), 837–845. https://doi.org/10.1007/s00542-009-1003-2 ( reposiTUm)

Hernando, J., Sánchez-Rojas, J. L., Schmid, U., Ababneh, A., Marchand, G., & Seidel, H. (2010). Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 16(5), 855–861. https://doi.org/10.1007/s00542-009-1015-y ( reposiTUm)

Deutschinger, A., Schmid, U., Schneider, M., Brenner, W., Wanzenböck, H., Volland, B., Ivanov, Tzv., & Rangelow, I. W. (2010). Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 16(11), 1901–1908. https://doi.org/10.1007/s00542-010-1110-0 ( reposiTUm)

Ababneh, A., Schmid, U., Hernando, J., Sánchez-Rojas, J. L., & Seidel, H. (2010). The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films. MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 172(3), 253–258. https://doi.org/10.1016/j.mseb.2010.05.026 ( reposiTUm)

Bittner, A., Ababneh, A., Seidel, H., & Schmid, U. (2010). Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates. Applied Surface Science, 257(3), 1088–1091. https://doi.org/10.1016/j.apsusc.2010.08.019 ( reposiTUm)

Bittner, A., Seidel, H., & Schmid, U. (2010). High-Frequency Characterization of Porous Low-Temperature Cofired Ceramics Substrates. Journal of the American Ceramic Society, 93(11), 3778–3781. https://doi.org/10.1111/j.1551-2916.2010.03928.x ( reposiTUm)

Fricke, S., Friedberger, A., Müller, G., Brode, W., Seidel, H., & Schmid, U. (2010). Electrical Performance of Alumina Thin Films for High-Temperature Pressure Cells With a Metallic Body. IEEE Sensors Journal, 10(5), 918–923. http://hdl.handle.net/20.500.12708/167583 ( reposiTUm)

Sanchez-Rojas, J. L., Hernando, J., Donoso, A., Bellido, J. C., Manzaneque, T., Ababneh, A., Seidel, H., & Schmid, U. (2010). Modal optimization and filtering in piezoelectric microplate resonators. Journal of Micromechanics and Microengineering, 20(5), 055027. https://doi.org/10.1088/0960-1317/20/5/055027 ( reposiTUm)

Sökmen, Ü., Stranz, A., Waag, A., Ababneh, A., Seidel, H., Schmid, U., & Peiner, E. (2010). Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications. Journal of Micromechanics and Microengineering, 20(6), 064007. https://doi.org/10.1088/0960-1317/20/6/064007 ( reposiTUm)

Bittner, A., Seidel, H., & Schmid, U. (2010). Electromigration resistance and long term stability of textured silver thin films on LTCC. Microelectronic Engineering, 88(1), 127–130. https://doi.org/10.1016/j.mee.2010.09.018 ( reposiTUm)

Gachot, C., Catrin, R., Lasagni, A., Schmid, U., & Mücklich, F. (2009). Comparative study of grain sizes and orientation in microstructured Au, Pt and W thin films designed by laser interference metallurgy. Applied Surface Science, 255(10), 5626–5632. https://doi.org/10.1016/j.apsusc.2008.10.032 ( reposiTUm)

Schmid, U., & Grosser, M. (2009). Electrical performance of Ti/Pt thin films on glass-ceramic substrates after high temperature loading. Applied Physics A: Materials Science and Processing, 96(4), 921–932. https://doi.org/10.1007/s00339-009-5255-6 ( reposiTUm)

Fricke, S., Friedberger, A., & Schmid, U. (2009). The influence of plasma power on the temperature-dependant conductivity and on the wet chemical etch rate of sputter-deposited alumina thin films. Surface and Coatings Technology, 203(19), 2830–2834. https://doi.org/10.1016/j.surfcoat.2008.12.030 ( reposiTUm)

Bittner, A., & Schmid, U. (2009). The porosification of fired LTCC substrates by applying a wet chemical etching procedure. Journal of the European Ceramic Society, 29(1), 99–104. https://doi.org/10.1016/j.jeurceramsoc.2008.05.030 ( reposiTUm)

Grosser, M., & Schmid, U. (2009). The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films. Thin Solid Films, 517(16), 4493–4496. https://doi.org/10.1016/j.tsf.2008.12.009 ( reposiTUm)

Bittner, A., Bohnenberger, T., Engel, R., Seidel, H., & Schmid, U. (2009). Morphological and Electrical Properties of Silver Thin Films Sputter Deposited on LTCC Substrates. Journal of Microelectronics and Electronic Packaging, 5(4), 169–173. http://hdl.handle.net/20.500.12708/166413 ( reposiTUm)

Adamovic, N., Giouroudi, I., Matovic, J., Djinovic, Z., & Schmid, U. (2009). Microactuators for Fluidic Applications: Principles, Devices and Systems. Journal of Microelectronics and Electronic Packaging, 6(4), 250–264. http://hdl.handle.net/20.500.12708/167529 ( reposiTUm)

Stehle, A., Georgiev, G., Ziegler, V., Schönlinner, B., Prechtel, U., Seidel, H., & Schmid, U. (2009). Glass Cap Packaged High Isolating Ka-Band RF-MEMS Switch. Plus, 3, 638–641. http://hdl.handle.net/20.500.12708/167588 ( reposiTUm)

Schmid, U., & Krötz, G. (2008). Monitoring the Hydraulic Conditions in Automotive Injection Systems Using Robust Flow Sensors. Sensor Letters, 6(5), 771–777. http://hdl.handle.net/20.500.12708/170608 ( reposiTUm)

Schmid, U., Schmitt-Landsiedel, D., & Krötz, G. (2008). Evaluation of Electron Beam Welding Technique for the Integration of Robust Sensor Elements into High-Pressure Automotive Systems. Microsystem Technologies, 14(8), 1193–1203. https://doi.org/10.1007/s00542-008-0645-9 ( reposiTUm)

Hernando-Garcia, J., Sànchez-Rojas, J. L., S. Gonzalez-Castilla, Iborra, E., Ababneh, A., & Schmid, U. (2008). Simulation and Laser Vibrometry Characterization of Piezoelectric AIN Thin Films. Journal of Applied Physics, 104(5), 053502. https://doi.org/10.1063/1.2957081 ( reposiTUm)

Schmid, U., & Seidel, H. (2008). Effect of High Temperature Annealing on the Electrical Performance of Titanium/Platinum Thin Films. Thin Solid Films, 516(6), 898–906. https://doi.org/10.1016/j.tsf.2007.04.128 ( reposiTUm)

Soldera, F., Burdiles, G., Schmid, U., Seidel, H., & Mücklich, F. (2008). Investigation of the Interaction between Electrical Discharges and Low Resistivity Silicon Substrates. Applied Surface Science, 254(7), 2150–2157. https://doi.org/10.1016/j.apsusc.2007.08.087 ( reposiTUm)

Ababneh, A., Kreher, H., & Schmid, U. (2008). Etching Behaviour of Sputter-Deposited Aluminium Nitride Thin Films in H3P04 and KOH Solutions. Microsystem Technologies, 14(4–5), 567–573. https://doi.org/10.1007/s00542-007-0450-x ( reposiTUm)

Schmid, U., Ababneh, A., Seidel, H., Wagner, R., & Bauer, K. (2008). Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic Substrates. Microsystem Technologies, 14(4–5), 483–490. https://doi.org/10.1007/s00542-007-0434-x ( reposiTUm)

Schmid, U. (2008). The Impact of Thermal Annealing and Adhesion Film Thickness on the Resistivity and the Agglomeration Behaviour of Titanium/Platinum Thin Films. Journal of Applied Physics, 103(5), 054902. https://doi.org/10.1063/1.2838229 ( reposiTUm)

Kulygin, A., Gergen, M., Schmid, U., & Seidel, H. (2008). Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical Approach. Microsystem Technologies, 14(4–5), 517–525. https://doi.org/10.1007/s00542-007-0442-x ( reposiTUm)

Schmid, U., Krötz, G., & Schmitt-Landsiedel, D. (2008). A Volumetric Flow Sensor for Automotive Injection Systems. Journal of Micromechanics and Microengineering, 18(4), 045006. https://doi.org/10.1088/0960-1317/18/4/045006 ( reposiTUm)

Stehle, A., Siegel, C., Ziegler, V., Schönlinner, B., Prechtel, U., Seidel, H., & Schmid, U. (2007). High-power handling capability of low complexity RF-MEMS switch in Ku-band. Electronics Letters, 43(24), 1367–1368. https://doi.org/10.1049/el:20072827 ( reposiTUm)

Schmid, U., Seidel, H., Mueller, G., & Becker, Th. (2006). Theoretical Considerations on the Design of a Miniaturised Paramagnetic Oxygen Sensor. Sensors and Actuators B: Chemical, 116(1–2), 213–220. https://doi.org/10.1016/j.snb.2005.11.080 ( reposiTUm)

Schmid, U., & Seidel, H. (2006). Enhanced Stability of Ti/Pt Micro-Heaters Using a-SiC:H Passivation Layers. Sensors and Actuators A: Physical, 130–131, 194–201. https://doi.org/10.1016/j.sna.2005.12.038 ( reposiTUm)

Schmid, U., & Seidel, H. (2006). Influence ofThermal Annealing on the Resistivity of Titanium/Platinum Thin Films. Journal of Vacuum Science and Technology A, 24(6), 2139–2146. https://doi.org/10.1116/1.2359739 ( reposiTUm)

Günthner, S., Egretzberger, M., Kugi, A., Kapser, K., Hartmann, B., Schmid, U., & Seidel, H. (2006). Compensation of Parasitic Effects for a Silicon Tuning Fork Gyroscope. IEEE Sensors Journal, 6(3), 596–604. https://doi.org/10.1109/jsen.2006.874451 ( reposiTUm)

Schmid, U., & Seidel, H. (2005). Effect of Substrate Properties and Thermal Annealing on the Resistivity of Molybdenum Thin Films. Thin Solid Films, 489(1–2), 310–319. https://doi.org/10.1016/j.tsf.2005.05.003 ( reposiTUm)

Dannheim, H., Schmid, U., & Roosen, A. (2004). Lifetime Prediction for Mechanically Stressed Low Temperature Co-fired Ceramics. Journal of the European Ceramic Society, 24(8), 2187–2192. https://doi.org/10.1016/j.jeurceramsoc.2003.07.010 ( reposiTUm)

Schmid, U. (2003). Theoretical and Experimental Investigations of a Novel Hot Film Anemometer for High Pressure Automotive Applications. IEEE Sensors Journal, 3(2), 229–240. https://doi.org/10.1109/jsen.2003.812623 ( reposiTUm)

Schmid, U. (2002). A Robust Flow Sensor for High Pressure Automotive Applications. SENSORS AND ACTUATORS A-PHYSICAL, 97–98, 253–263. https://doi.org/10.1016/s0924-4247(01)00869-x ( reposiTUm)

Schmid, U., Hoffmann, R., & Krötz, G. (2001). A Micromachined High Pressure Stable Mass Flow Sensor for Common-Rail Injection Systems. Technisches Messen, 68(5), 208. https://doi.org/10.1524/teme.2001.68.5.208 ( reposiTUm)

Schmid, U., Sheppard, S. T., & Wondrak, W. (2000). High Temperature Performance of NMOS Integrated Inverters and Ring Oscillators in 6HSiC. IEEE Transactions on Electron Devices, 47(4), 687–691. https://doi.org/10.1109/16.830980 ( reposiTUm)

Schmid, U., Sheppard, S. T., Wondrak, W., & Niemann, E. (1999). Electrical characterization of 6H-SiC enhancement-mode MOSFETs at high temperatures. Materials Science and Engineering: B, 61–62, 493–496. https://doi.org/10.1016/s0921-5107(98)00460-7 ( reposiTUm)

Schmid, U., Sheppard, S. T., & Wondrak, W. (1999). Circular and linear enhancement-mode 6H-SiC MOSFETs for high temperature applications. Journal of Electronic Materials, 28(3), 148–153. https://doi.org/10.1007/s11664-999-0005-2 ( reposiTUm)

Schmid, U., Getto, R., Sheppard, S. T., & Wondrak, W. (1999). Temperature behavior of specific contact resistance and resistivity on nitrogen implanted 6H-SiC with titanium silicide ohmic contacts. Journal of Applied Physics, 85(5), 2681–2686. https://doi.org/10.1063/1.369628 ( reposiTUm)

Lades, M., Berz, D., Schmid, U., Sheppard, S. T., Kaminski, N., Wondrak, W., & Wachutka, G. (1999). Numerical Simulation of Implanted Top-Gate 6H-SiC JFET Characteristics. Materials Science and Engineering: B, 61–62, 415–418. https://doi.org/10.1016/s0921-5107(98)00545-5 ( reposiTUm)

Beiträge in Tagungsbänden

Schneider, M., Mortada, M., Mayrhofer, D., Kaltenbacher, M., & Schmid, U. (2024). Directivity and distance dependence of generated pressure field of bistable PMUTs. In Abstract Book Eurosensors XXXVI (pp. 307–308). https://doi.org/10.5162/EUROSENSORSXXXVI/PT4.193 ( reposiTUm)

Moll, P., Pfusterschmied, G., & Schmid, U. (2024). Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition. In IEEE Xplore (Ed.), Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 606–609). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439413 ( reposiTUm)

Kwon, M., Schlögl, M., Platz, D., & Schmid, U. (2024). OT4.72 - Design Considerations for GHz SAW Resonators in High Strain Sensing. In Abstract Book Eurosensors XXXVI (pp. 67–68). https://doi.org/10.5162/EUROSENSORSXXXVI/OT4.72 ( reposiTUm)

Huber, D., Platz, D., Gesing, A. L., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024). Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators. In Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 915–918). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439421 ( reposiTUm)

Gesing, A. L., Huber, D., Steinmüller-Neth, D., Pfusterschmied, G., Platz, D., & Schmid, U. (2024). Modeling polycrystalline diamond MEMS resonators. In 19th International Workshop on Nanomechanical Sensing (pp. 114–114). ( reposiTUm)

Platz, D., Loch Gesing, A., & Schmid, U. (2024). Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic Environments. In S. Schmid (Ed.), 19th International Workshop on Nanomechanical Sensing (pp. 13–13). ( reposiTUm)

Schneider, M., & Schmid, U. (2024). How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonators. In S. Schmid (Ed.), 19th International Workshop on Nanomechanical Sensing (pp. 112–112). ( reposiTUm)

Zarepakzad, S., Esfahani, M. N., Tasdemir, Dr. Z., Schneider, M., Schmid, U., Leblebici, Y., & Alaca, B. E. (2024). Transverse Vibration of Silicon Nanowires: Surface Properties. In S. Schmid (Ed.), 19th International Workshop on Nanomechanical Sensing (pp. 109–109). http://hdl.handle.net/20.500.12708/210182 ( reposiTUm)

Schneider, M., & Schmid, U. (2023). Impact of bandwidth and number of measurement points on Q-factor measurement precision in piezoelectric MEMS resonators. In MikroSystemTechnik Kongress 2023 (pp. 681–685). VDE Verlag. ( reposiTUm)

Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2023). Continuous Monitoring of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Sensors. In Tagungsband MikroSystemTechnik Kongress 2023 (pp. 810–813). VDE Verlag. ( reposiTUm)

Platz, D., Stixenberger, M., Loch Gesing, A., Ignat, I., Kähler, H., & Schmid, U. (2023). Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region. In Transducers 2023 : The 22nd International Conference on Solid-State Electronics, Actuators and Microsystems (pp. 1762–1765). IEEJ. ( reposiTUm)

Nanjappan, C., Pfusterschmied, G., & Schmid, U. (2023). Electrical Characterization of the SiO₂/4H-SiC Interface. In Sensor and Measurement Science International (SMSI 2023) (pp. 235–236). https://doi.org/10.5162/SMSI2023/D5.3 ( reposiTUm)

Platz, D., Loch Gesing, A., & Schmid, U. (2023). Fluid-Structure Interaction of MEMS Resonators. In SMSI 2023 Conference – Sensor and Measurement Science International (pp. 181–182). https://doi.org/10.5162/SMSI2023/C6.1 ( reposiTUm)

Moll, P., Pfusterschmied, G., & Schmid, U. (2023). Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 590–593). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052144 ( reposiTUm)

Gesing, A. L., Tran, T., Platz, D., & Schmid, U. (2023). Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and Liquids. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 1072–1075). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052411 ( reposiTUm)

Platz, D., Fabian, J., Samm, E., Mortada, M., Schneider, M., & Schmid, U. (2023). Exploiting Parametric Instability in Bistable MEMS Actuators. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 530–533). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052469 ( reposiTUm)

Platz, D., Loch Gesing, A., Ignat, I., Demattio, D., & Schmid, U. (2023). Non-slender MEMS resonators for advanced AFM applications. In 9th Multifrequency AFM Conference - Book of Abstract (pp. 26–26). http://hdl.handle.net/20.500.12708/191663 ( reposiTUm)

Ignat, I., Arvidsson, E., Roos, A., Scarano, E., Haviland, D. B., Platz, D., & Schmid, U. (2023). Vacuum gap electromechanical devices with integrated piezoelectric actuator. In FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts (pp. 106–106). http://hdl.handle.net/20.500.12708/192876 ( reposiTUm)

Ignat, I., Arvidsson, E., Roos, A., Scarano, E., Haviland, D., Platz, D., & Schmid, U. (2023). Nanosized Vacuum Gap Electromechanical Devices with Integrated Piezoelectric Actuator. In MikroSystemTechnik Kongress 2023 (pp. 413–416). VDE. http://hdl.handle.net/20.500.12708/193110 ( reposiTUm)

Dubek, K., Schneidhofer, C., Dörr, N., & Schmid, U. (2023). Robust Sensor System for Condition Monitoring of Lubricated Rail Vehicle Components. In Sensor and Measurement Science International (SMSI 2023) (pp. 102–103). https://doi.org/10.5162/SMSI2023/B3.2 ( reposiTUm)

Schneider, M., Kößl, B., Alasatri, S., Magnet, I. A. M., & Schmid, U. (2023). Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems Resonators. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 471–474). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052396 ( reposiTUm)

Hinkov, B., David, M., Pilat, F., Schwaighofer, A., Marschick, G., Arigliani, E., Souza, P. L., Doganlar Ismail C., Gsodam, X., Dabrowska, A., Wacht, D., Sistani, M., Nazzari, D., Disnan, D., Detz, H., Andrews, A. M., Schmid, U., Weber, W. M., Schwarz, B., … Strasser, G. (2023). On-chip liquid sensing using mid-IR plasmonics. In Optica Sensing Congress 2023 (AIS, FTS, HISE, Sensors, ES) (p. EW3E.3). Optica Publishing Group. https://doi.org/10.1364/ES.2023.EW3E.3 ( reposiTUm)

Hinkov, B., David, M., Pilat, F., Schwaighofer, A., Marschick, G., Arigliani, E., Lustoza de Souza, P., Doganlar Ismail C., Gsodam, X., Dabrowska, A., Wacht, D., Sistani, M., Nazzari, D., Disnan, D., Detz, H., Andrews, A. M., Schmid, U., Weber, W. M., Schwarz, B., … Strasser, G. (2023). On-chip Liquid Sensing using Mid-IR Plasmonics. In Optica Sensing Congress 2023 (AIS, FTS, HISE, Sensors, ES). Optics and Photonics for Sensing the Environment 2023, München, Germany. Optica Publishing Group. https://doi.org/10.1364/ES.2023.EW3E.3 ( reposiTUm)

Loch Gesing, A., Tran, T., Platz, D., & Schmid, U. (2023). Efficiently modelling the fluid-structure interaction of micro-plate- resonators with viscous fluids using modal basis functions. In MikroSystemTechnik Kongress 2023 (pp. 98–102). VDE Verlag. http://hdl.handle.net/20.500.12708/193108 ( reposiTUm)

Schneider, M., Santasusagna, J., Magnet, I. A. M., & Schmid, U. (2022). Ex vivo Blood Viscosity Monitoring with Piezoelectric MEMS Resonators. In 2022 IEEE Sensors (pp. 1–4). IEEE. https://doi.org/10.1109/SENSORS52175.2022.9967277 ( reposiTUm)

Gesing, A. L., Platz, D., & Schmid, U. (2021). Reducing thermal noise in atomic force microscopy with intermodal coupling. In 2021 International Scanning Probe Microscopy (ISPM) + Scanning Probe Microscopy on Soft & Polymeric Materials (SPMonSPM) (p. 114). http://hdl.handle.net/20.500.12708/77669 ( reposiTUm)

Aguinsky, L. F., Wachter, G., Scharinger, A., Rodrigues, F., Toifl, A., Trupke, M., Schmid, U., Hössinger, A., & Weinbub, J. (2021). Feature-Scale Modeling of Low-Bias SF₆ Plasma Etching of Si. In 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) (pp. 1–4). IEEE. https://doi.org/10.1109/eurosoi-ulis53016.2021.9560685 ( reposiTUm)

Hoang, H. T., David, M., Disnan, D., Doganlar, I. C., Detz, H., Schmid, U., Strasser, G., & Hinkov, B. (2021). Modelling, fabrication and characterization of low-density polyethylene based plasmonic waveguides for mid-IR photonic networks. In Gemeinsame Jahrestagung in Innsbruck (p. 55). http://hdl.handle.net/20.500.12708/77458 ( reposiTUm)

Platz, D., Gesing, A., & Schmid, U. (2021). B6.4 Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids. In SMSI 2021 - Sensors and Instrumentation. SMSI 2021 - Sensor and Measurement Science International Digital Conference, online, Unknown. VDE. https://doi.org/10.5162/smsi2021/b6.4 ( reposiTUm)

Gesing, A. L., Platz, D., & Schmid, U. (2021). Quality Factors of MEMS Plate Modes in Fluids. In Mikrosystemtechnik-Kongress 2021 (p. 4). VDE-Verlag. http://hdl.handle.net/20.500.12708/77668 ( reposiTUm)

Moll, P., Pfusterschmied, G., Schneide, M., Dorfmeister, M., & Schmid, U. (2021). Piezoelectric Switching of Bistable MEMS Membranes in Fluids. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), online, Unknown. IEEE. https://doi.org/10.1109/mems51782.2021.9375163 ( reposiTUm)

Ignat, I., Schuster, B., Hafner, J., Kwon, M., Platz, D., & Schmid, U. (2021). Mechanical cooling of AFM cantilevers. In Mikrosystemtechnik-Kongress 2021 (p. 4). VDE-Verlag. http://hdl.handle.net/20.500.12708/77667 ( reposiTUm)

Hafner, J., Benaglia, S., Teuschel, M., Platz, D., Schneider, M., Garcia, R., & Schmid, U. (2020). Multi-scale characterisation of a semi-crystalline polymer reveals hidden ferroelectricity above the Curie transiton. In 8th Multifrequency AFM conference, Book of Abstracts (p. 107). http://hdl.handle.net/20.500.12708/77284 ( reposiTUm)

Platz, D., Gesing, A. L., & Schmid, U. (2020). Modeling the Fluid-Structure Interaction of Non-conventional Vibrational Modes for MEMS Fluid Sensing. In SMSI 2020 Conference - Sensor and Measurement Science International (pp. 109–110). VDE. https://doi.org/10.5162/SMSI2020/B2.5 ( reposiTUm)

Platz, D., Gesing, A. L., & Schmid, U. (2020). Modelling Vibrational Modes Plates in Fluids for Applications in High-Speed Atomic Force Microscopy. In 8th Multifrequency AFM conference, Book of Abstracts (p. 33). http://hdl.handle.net/20.500.12708/77286 ( reposiTUm)

Hafner, J., Canena, D., Platz, D., Schneider, M., Hinterdorfer, P., & Schmid, U. (2020). Scanning Probes with High Resonance Frequency and Low Stiffness for High-speed AFM Applications in Liquid Environments. In 8th Multifrequency AFM conference, Book of Abstracts (p. 28). http://hdl.handle.net/20.500.12708/77285 ( reposiTUm)

Patocka, F., Schlögl, M., Schneider, M., Schneidhofer, C., Dörr, N., & Schmid, U. (2019). MEMS Sensor for Monitoring the Degradation of Lubricating Oils. In 7th European Conference on Tribology (Ecotrib 2019) - Book of Abstracts (pp. 138–139). http://hdl.handle.net/20.500.12708/77033 ( reposiTUm)

Hrdy, R., Prasek, J., Fillner, P., Vancik, S., Hubalek, J., & Schmid, U. (2019). Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications. In 42nd International Spring Seminar on Electronics Technology (pp. 183–184). http://hdl.handle.net/20.500.12708/77021 ( reposiTUm)

Prasek, J., Houska, D., Hrdy, R., Hubalek, J., & Schmid, U. (2019). Optimization of Deep Reactive Ion Etching Process for on Chip Energy Storage. In 42nd International Spring Seminar on Electronics Technology (pp. 175–176). http://hdl.handle.net/20.500.12708/77022 ( reposiTUm)

Gesing, A. L., Platz, D., & Schmid, U. (2019). Modeling non-conventional vibrational modes of micro-resonators in viscous fluids. In International Conference on Nonlinear Solid Mechanics (p. 1). http://hdl.handle.net/20.500.12708/77023 ( reposiTUm)

Platz, D., Forchheimer, D., Schmid, U., Sader, J. E., & Haviland, D. B. (2019). Reconstructing Nonlinear Interactions in Micro- and Nanosystems with the Numerical Kernel Estimate Method. In International Conference on Nonlinear Solid Mechanics (p. 1). http://hdl.handle.net/20.500.12708/77024 ( reposiTUm)

Hafner, J., Berger, C., Platz, D., & Schmid, U. (2019). Plates as Probes for Atomic Force Microscopy in Liquid Environments. In XXI. Linz Winter Workshop 2019 (p. 1). http://hdl.handle.net/20.500.12708/77035 ( reposiTUm)

Schmid, U., Hajian, A., & Bittner, A. (2019). Wet chemical Etching as an Effective Technique for the Local Permittivity Reduction of LTCC Substrates. In 15th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2019) (p. 1). IMAPS. http://hdl.handle.net/20.500.12708/77019 ( reposiTUm)

Schmid, U., & Schneider, M. (2019). Aluminium Nitride based Piezoelectric MEMS: From Material Aspects to Low Power Devices. In 46th International Conference on Metallurgical Coatings and Thin Films (p. 1). http://hdl.handle.net/20.500.12708/77018 ( reposiTUm)

Schmid, U., & Schneider, M. (2019). Advanced Aluminium Nitride Thin Films for Piezoelectric MEMS. In Surfcoat Korea 2019 - Book of Abstracts (p. 31). http://hdl.handle.net/20.500.12708/77020 ( reposiTUm)

Schneider, M., Weißenbach, J., & Schmid, U. (2019). Einfluss von Substrattemperatur und Bias-Spannung auf die Eigenschaften von gesputterten AlN Dünnfilmen für BAWs. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 60–63). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76945 ( reposiTUm)

Platz, D., Gesing, A. L., & Schmid, U. (2019). Modellierung der Fluiddämpfung unkonventioneller Schwingungsmoden in MEMS-Resonatoren - Modelling fluid damping of non-conventional vibrational modes in MEMS resonators. In MikroSystemTechnik Kongress 2019 - Proceedings (pp. 278–281). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76946 ( reposiTUm)

Pfusterschmied, G., Weinmann, C., Schneider, M., Hospodka, M., Mirwald, J., Hofko, B., & Schmid, U. (2019). Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2019 - Proceedings (pp. 320–323). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76947 ( reposiTUm)

Pfusterschmied, G., Weinmann, C., Hospodka, M., Hofko, B., Schneider, M., & Schmid, U. (2019). Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (the Republic of). IEEE. https://doi.org/10.1109/memsys.2019.8870897 ( reposiTUm)

Dorfmeister, M., Schneider, M., & Schmid, U. (2019). A Bistable Ultrasonic Mems Device With An Integrated Piezoelectric Scandium-Aln Thin Film Actuator For Switching. In 20th International Conference on Solid State Sensors and Actuators (Transducers 19) (pp. 853–856). IEEE. http://hdl.handle.net/20.500.12708/76944 ( reposiTUm)

Schmid, U., & Schneider, M. (2019). High Performance Piezoelectric AlN MEMS Resonators for Liquid Sensing and Beyond - The Potential of PiezoMEMS. In 20th International Conference on Solid State Sensors and Actuators (Transducers 19) (pp. 653–654). IEEE. http://hdl.handle.net/20.500.12708/76943 ( reposiTUm)

Leitgeb, M., Zellner, C., Dorfmeister, M., Schneider, M., & Schmid, U. (2018). Buckling Porous SiC Membranes. In Proceedings - Eurosensors 2018, Graz (pp. 1–4). MDPI. http://hdl.handle.net/20.500.12708/76503 ( reposiTUm)

Patocka, F., Schneider, M., Schneidhofer, C., Dörr, N., & Schmid, U. (2018). Novel MEMS Sensor for Real-time Lubricant Condition Monitoring. In ÖTG-Symposium 2018 (pp. 115–122). ÖTG. http://hdl.handle.net/20.500.12708/76495 ( reposiTUm)

Dorfmeister, M., Kössl, B., Schneider, M., & Schmid, U. (2018). A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130912 ( reposiTUm)

Hafner, J., Teuschel, M., Schrattenholzer, J., Schneider, M., & Schmid, U. (2018). Optimized Batch Process for Organic MEMS Devices. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130904 ( reposiTUm)

Patocka, F., Schlögl, M., Schneider, M., & Schmid, U. (2018). Novel MEMS Sensor for Detecting Magnetic Particles in Liquids. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130868 ( reposiTUm)

Platz, D., Pfusterschmied, G., & Schmid, U. (2018). Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130896 ( reposiTUm)

Kluge, M., Kiziroglou, M. E., Yeatman, E. M., Schmid, U., Schupke, D., & Becker, T. (2018). Dynamic Thermoelectric Energy Harvesting in Aircraft. In PSMA Inaugural International Energy Harvesting Workshop (EnerHarv 2018) (p. 1). http://hdl.handle.net/20.500.12708/76538 ( reposiTUm)

Brehl, M., Cicconi, M. R., Veber, A., Hajian, A., Schmid, U., & De Ligny, D. (2018). Structural investigation of glasses in the BaO-B2O3-SiO2 system with coupled Raman/Brillouin spectroscopy. In Program (pp. 396–397). http://hdl.handle.net/20.500.12708/76537 ( reposiTUm)

Hajian, A., Müftüoglu, D., Schneider, M., & Schmid, U. (2018). Investigating the Effect of Etching Parameters on the Porosification of LTCC with Sodium Hydroxide. In Electroceramics XVI (p. 174). http://hdl.handle.net/20.500.12708/76505 ( reposiTUm)

Schneider, M., & Schmid, U. (2018). Piezoelectric MEMS Devices: from Material Aspects to Low-Power Applications. In Nano Research & Applications (pp. 41–42). Scitechnol Biosoft Pvt. Ltd. http://hdl.handle.net/20.500.12708/76533 ( reposiTUm)

Schneider, M., & Schmid, U. (2018). Substrate Temperature and Bias Voltage Dependent Properties of Sputtered AlN Thin Films for BAW Applications. In 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). The 18th IEEE International Conferene on Nanotechnology (ieee nano 2018), Cork, Ireland. IEEE. https://doi.org/10.1109/nano.2018.8626332 ( reposiTUm)

Schmid, U., & Schneider, M. (2018). Piezoelectric MEMS: Materials, Devices and Applications. In 16th International Conference on Plasma Surface Engineering (PSE 2018) (p. 1). http://hdl.handle.net/20.500.12708/76532 ( reposiTUm)

Platz, D., Pfusterschmied, G., & Schmid, U. (2018). Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes. In Proceedings of the Euromech Colloquium 603 (pp. 38–40). Universidade do Porto, Reitoria. http://hdl.handle.net/20.500.12708/76535 ( reposiTUm)

Hajian, A., Stöger-Pollach, M., Schneider, M., Homolka, H., Müftüoglu, D., & Schmid, U. (2018). Effect of sintering temperature on porosification behavior of fired LTCC substrates. In Abstract Book (p. 144). http://hdl.handle.net/20.500.12708/76506 ( reposiTUm)

Trupke, M., Salter, C., Reisenbauer, S., Vasconcelos, R., Wachter, G., Buczak, K., Angerer, A., Schmiedmayer, H.-J., Aumayr, F., Schmid, U., Walther, P., Munro, W. J., & Nemoto, K. (2017). Large-scale quantum technology based on luminescent centers in crystals. In Proceedings 62th IEEE International Electron Devices Meeting (IEDM) (pp. 348–351). Institute of Electrical and Electronics Engineers, Inc. http://hdl.handle.net/20.500.12708/44904 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Steindl, W., Bittner, A., Schneider, M., & Schmid, U. (2017). Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 183–186). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/75974 ( reposiTUm)

Schmid, U., & Schneider, M. (2017). Piezoelectric Microsystems: Material Aspects, Devices and Applications. In Selected Papers from the 4th International Electronic Conference on Sensors and Applications. 4th International Electronic Conference on Sensors and Applications (ECSA 2017), Online, Unknown. MDPI. https://doi.org/10.3390/ecsa-4-04934 ( reposiTUm)

Dorfmeister, M., Pfister, R., Schneider, M., & Schmid, U. (2017). Analytische Modellierung von kreisförmigen, bistabilen Membranen mit unterschiedlichen, geometrischen Abmessungen. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 727–730). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/75964 ( reposiTUm)

Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., & Schmid, U. (2017). Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 11). SPIE. http://hdl.handle.net/20.500.12708/76044 ( reposiTUm)

Kiziroglou, M. E., Becker, T., Yeatman, E. M., Schmid, U., & Evans, J. (2017). Comparison of methods for static charge energy harvesting on aircraft. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 6). SPIE. http://hdl.handle.net/20.500.12708/76042 ( reposiTUm)

Ruiz-Díez, V., Toledo, J., Hernando-Garcia, J., Pfusterschmied, G., & Schmid, U. (2017). Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 9). SPIE. http://hdl.handle.net/20.500.12708/76043 ( reposiTUm)

Gillinger, M., Knobloch, T., Schneider, M., & Schmid, U. (2017). Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040341 ( reposiTUm)

Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2017). Porous Silicon Carbide for MEMS. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040297 ( reposiTUm)

Camarda, A., Tartagni, M., Sordo, G., Iannacci, J., Schneider, M., Schmid, U., & Romani, A. (2017). Smoothing The Way Towards Miniaturized MEMS AlN-based Piezoelectric Transformers. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE. http://hdl.handle.net/20.500.12708/76039 ( reposiTUm)

Schneider, M., DeMiguel-Ramos, M., Flewitt, A. J., Iborra, E., & Schmid, U. (2017). Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040305 ( reposiTUm)

Toledo, J., Ruiz-Díez, V., Sànchez-Rojas, J. L., Pfusterschmied, G., Schneider, M., & Schmid, U. (2017). Wine Fermentation Sensor Based on Piezoelectric Resonators. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE. http://hdl.handle.net/20.500.12708/76040 ( reposiTUm)

Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2017). Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. In Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017. Eurosensors 2017, Paris, France. MDPI. https://doi.org/10.3390/proceedings1040380 ( reposiTUm)

Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2017). FT-IR analysis of high temperature annealing effects in a-SiC:H thin films. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 6). SPIE. http://hdl.handle.net/20.500.12708/76045 ( reposiTUm)

Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2017). Aktive Q-Faktor Regelung von piezoelektrischen MEMS Cantilevern für High Speed AFM Anwendungen in Vakuum. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 112–115). VDE Verlag GMBH. http://hdl.handle.net/20.500.12708/76021 ( reposiTUm)

Toth, F., Dorfmeister, M., Schneider, M., Schmid, U., & Kaltenbacher, M. (2017). Non-linear analysis of a pre-stressed piezoelectric multi-layer plate. In VIII ECCOMAS Thematic Conference on Smart Structures and Materials SMART2017 (pp. 1307–1315). http://hdl.handle.net/20.500.12708/67635 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Weinmann, C., Schneider, M., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2017). Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties. In IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017 (pp. 1013–1016). IEEE. http://hdl.handle.net/20.500.12708/76019 ( reposiTUm)

Mayrhofer, P., Rehlendt, C., Bittner, A., Schneider, M., & Schmid, U. (2016). Scandium Aluminium Nitride for MEMS Applications. In nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems. nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz, Austria. http://hdl.handle.net/20.500.12708/75196 ( reposiTUm)

Voglhuber-Brunnmaier, T., Reichel, E. K., Jakoby, B., Beigelbeck, R., Mayrhofer, P., & Schmid, U. (2016). Fast method for the calculation of surface bending on circular multilayered piezoelectric structures. In Proceedings of the IEEE Sensors 2016 (p. 3). IEEE. http://hdl.handle.net/20.500.12708/75543 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2016). 3D Billboards without Glasses. In Proceedings of the 23rd International Display Workshops in conjunction with Asia Display 2016 (p. 61). http://hdl.handle.net/20.500.12708/75491 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Julien-Wallsee, F. S., Leeb, W., & Schmid, U. (2016). Software Beam Combiner for Ultra-compact RGB Laser Light Modules with MEMS Mirrors. In Imaging and Applied Optics 2016. Applied Industrial Optics Conference 2016, Heidelberg, D, EU. https://doi.org/10.1364/aio.2016.aiw3b.3 ( reposiTUm)

Iannacci, J., Sordo, G., Schneider, M., Schmid, U., Camarda, A., & Romani, A. (2016). A Novel Toggle-Type MEMS Vibration Energy Harvester for Internet of Things Applications. In Proceedings of the IEEE Sensors 2016 (p. 3). IEEE. http://hdl.handle.net/20.500.12708/75542 ( reposiTUm)

Sordo, G., Iannacci, J., & Schmid, U. (2016). Study on the Effectiveness of Different Electrode Geometries for Sputtered Aluminium Nitride-based MEMS Energy Harvesters. In Proc. of the “Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016).” Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016), Budapest, Ungarn, EU. http://hdl.handle.net/20.500.12708/75486 ( reposiTUm)

Leitgeb, M., Zellner, C., Schneider, M., & Schmid, U. (2016). Metal assisted Chemical Etching of Monocystalline Silicon Carbide. In nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems. nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz, Austria. http://hdl.handle.net/20.500.12708/75487 ( reposiTUm)

Frischmuth, T., Klein, A., Schneider, M., Grille, T., & Schmid, U. (2016). Fracture analysis of a-SiC:H membranes after thermal annealing. In Proceedings of the Eurosensors 2016 (pp. 1164–1167). Procedia Engineering / Elsevier. http://hdl.handle.net/20.500.12708/75485 ( reposiTUm)

Klein, A., Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2016). Einfluss der Schichtdicke auf das mechanische Verhalten und die Bruchstabilität von a-SiC:H Membranen. In OVE Schriftenreihe (p. 20). Schriftenreihe OVE. http://hdl.handle.net/20.500.12708/75489 ( reposiTUm)

Mayrhofer, P., Rehlendt, C., Bittner, A., & Schmid, U. (2016). Scandium Aluminium Nitrid für MEMS Anwendungen---Poster. In OVE Schriftenreihe (p. 23). Schriftenreihe OVE. http://hdl.handle.net/20.500.12708/75490 ( reposiTUm)

Zarfl, C., Schmid, P., & Schmid, U. (2016). A Novel Miniaturised Sensor for Combined Static and Dynamic Pressure Measurements in Harsh Environments. In Procedia Engineering (pp. 782–785). Procedia Engineering / Elsevier. https://doi.org/10.1016/j.proeng.2016.11.255 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2016). Improved Piezoelectric Coefficients in Ultra-thin Aluminum Nitride Thin Films. In The 3rd International Conference on Nanogenerators and Piezotronics (NGPT 2016) (p. 39). UniversItalia Roma. http://hdl.handle.net/20.500.12708/75488 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Toledo, J., Steindl, W., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators. In Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016) (p. 2). IEEE. http://hdl.handle.net/20.500.12708/75481 ( reposiTUm)

Mayrhofer, P. M., Wistrela, E., Schneider, M., Bittner, A., & Schmid, U. (2016). Precise Determination of d 33 and d 31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to Sc x Al 1-x N. In Procedia Engineering (pp. 876–879). Procedia Engineering / Elsevier. https://doi.org/10.1016/j.proeng.2016.11.295 ( reposiTUm)

Jandak, M., Neuzil, T., Schneider, M., & Schmid, U. (2016). Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators. In Procedia Engineering (pp. 929–932). Procedia Engineering / Elsevier. https://doi.org/10.1016/j.proeng.2016.11.308 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Julien-Wallsee, F. S., Leeb, W., & Schmid, U. (2015). The billboard of the future: A large-scale glasses-free 3D display. In Proceedings of the 15th International Meeting on Information Display (p. 545). http://hdl.handle.net/20.500.12708/75097 ( reposiTUm)

Steinhäußer, F., Sandulache, G., Hansal, W., Bittner, A., & Schmid, U. (2015). Silver Metallization on Porosified LTCC Desposited by Pulse Plating Technique. In Proceedings: IMAPS/ACerS 11th International CICMT Conference and Exhibition 2015 (pp. 112–115). IMAPS. http://hdl.handle.net/20.500.12708/74961 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Wistrela, E., Steindl, W., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 969–972). IEEE. http://hdl.handle.net/20.500.12708/74966 ( reposiTUm)

Sordo, G., Serra, E., Schmid, U., & Iannacci, J. (2015). Optimization Method for Designing Multimodal Piezoelectric MEMS Energy Harvesters. In Proc. of SPIE Vol. 9517-9520 (p. 8). SPIE. http://hdl.handle.net/20.500.12708/74982 ( reposiTUm)

Mayrhofer, P., Bittner, A., & Schmid, U. (2015). High Temperature Stability of ScxAl1-xN (x= 0.27) Thin Films. In Proc. of SPIE Vol. 9517-9520 (p. 7). SPIE. http://hdl.handle.net/20.500.12708/74981 ( reposiTUm)

Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Steindl, W., Schmid, U., & Sànchez-Rojas, J. L. (2015). Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 436–439). IEEE. http://hdl.handle.net/20.500.12708/74962 ( reposiTUm)

Talai, A., Mann, S., Steinhäußer, F., Schmid, U., Weigel, R., Bittner, A., & Koelpin, A. (2015). A Semi Double-Ridged quasi TE-Waveguide based Microwave Bulk Material Characterization System. In Proceedings of the IEEE MTT-S International Microwave Symposium 2015. IEEE MTT-S International Microwave Symposium 2015, Phoenix, Arizona, USA, Non-EU. IEEE. http://hdl.handle.net/20.500.12708/74967 ( reposiTUm)

Sordo, G., Iannacci, J., Serra, E., Bonaldi, M., Borrielli, A. L., Schneider, M., & Schmid, U. (2015). Study on the performance of tailored spring elements for piezoelectric MEMS energy harvesters. In 2015 XVIII AISEM Annual Conference. 2015 XVIII AISEM Annual Conference, Trento, Italy, EU. IEEE. http://hdl.handle.net/20.500.12708/74968 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2015). Input-shaped actuation of electromagnetic MEMS mirrors. In Proc. of SPIE Vol. 9517-9520 (p. 7). SPIE. http://hdl.handle.net/20.500.12708/74983 ( reposiTUm)

Pfusterschmied, G., Kucera, M., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes. In MEMS 2015 (pp. 718–721). IEEE. http://hdl.handle.net/20.500.12708/74986 ( reposiTUm)

Talai, A., Bittner, A., Steinhäußer, F., Schmid, U., Weigel, R., & Koelpin, A. (2015). Poröses LTCC als Substratmaterial für Höchstfrequenzradarsensoren. In Proceedings MikroSystemTechnik Kongress 2015 (pp. 396–399). VDE Verlag GmbH, Berlin. http://hdl.handle.net/20.500.12708/74987 ( reposiTUm)

Bittner, A., Steinhäußer, F., Talai, A., Koelpin, A., Weigel, R., Rittweg, T., Schwanke, D., Sandulache, G., Hansal, W., & Schmid, U. (2015). Modellierung nasschemischer Porosizierverfahren auf LTCC für elektromagnetische Hochfrequenz-Feldsimulation. In Proceedings MikroSystemTechnik Kongress 2015 (pp. 258–261). VDE Verlag GmbH, Berlin. http://hdl.handle.net/20.500.12708/74988 ( reposiTUm)

Reitterer, J., Fidler, F., Hambeck, C., Saint Julien-Wallsee, F., Najda, S., Perlin, P., Stanczyk, S., Czernecki, R., McDougall, S. D., Meredith, W., Vickers, G., Landles, K., & Schmid, U. (2015). Integrated RGB laser light module for autostereoscopic outdoor displays. In Proc. of SPIE: Components and Packaging for Laser Systems - 2015 (p. 8). SPIE. http://hdl.handle.net/20.500.12708/74989 ( reposiTUm)

Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU. http://hdl.handle.net/20.500.12708/74921 ( reposiTUm)

Ruiz-Díez, V., Toledo, J., Manzaneque, T., Hernando-Garcia, J., Kucera, M., Schmid, U., & Sànchez-Rojas, J. L. (2015). Modelling And Characterization Of The Roof Tile-Shaped Modes Of Aln-Based Cantilever Resonators In Liquid Media. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU. http://hdl.handle.net/20.500.12708/74922 ( reposiTUm)

Wistrela, E., Bittner, A., & Schmid, U. (2015). Impact of Titan Layer and Silicon Substrate Properties on the Microstructure of c-axis Oriented AlN Thin Films. In Proc. of SPIE Vol. 9517-9520 (p. 7). SPIE. http://hdl.handle.net/20.500.12708/74971 ( reposiTUm)

Iannacci, J., Sordo, G., Serra, E., Kucera, M., & Schmid, U. (2015). Experimental Verification of a Novel MEMS Multi-Modal Vibration Energy Harvester for Ultra-Low Power Remote Sensing Nodes. In Proc. of SPIE Vol. 9517-9520 (p. 10). SPIE. http://hdl.handle.net/20.500.12708/74970 ( reposiTUm)

Ruiz, D., Donoso, A., Bellido, J. C., Kucera, M., Schmid, U., & Sànchez-Rojas, J. L. (2015). Optimal Design of Piezoelectric Microtransducers for Static Response. In Proc. of SPIE Vol. 9517-9520 (p. 10). SPIE. http://hdl.handle.net/20.500.12708/74969 ( reposiTUm)

Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Out-of-plane Piezoelectric Microresonator and Oscillator Circuit for Monitoring Engine Oil Contamination with Diesel. In Proc. of SPIE Vol. 9517-9520 (p. 9). SPIE. http://hdl.handle.net/20.500.12708/74972 ( reposiTUm)

Mayrhofer, P., Wistrela, E., Kucera, M., Bittner, A., & Schmid, U. (2015). Fabrication and Characterisation of ScAlN-based Piezoelectric MEMS Cantilevers. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 2144–2147). IEEE. http://hdl.handle.net/20.500.12708/74964 ( reposiTUm)

Frischmuth, T., Maurer, D., Schneider, M., Grille, T., & Schmid, U. (2015). IMPACT OF SUBSTRATE TEMPERATURE AND INDUCTIVELY COUPLED PLASMA POWER ON a-SiC:H THIN FILM PROPERTIES. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU. http://hdl.handle.net/20.500.12708/74920 ( reposiTUm)

Stöber, L., Konrath, J. P., Haberl, V., Schneider, M., & Schmid, U. (2015). High Temperature Behaviour of Sputter Deposited Molybdenum Nitride Thin Films. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU. http://hdl.handle.net/20.500.12708/74919 ( reposiTUm)

Iannacci, J., & Schmid, U. (2015). A Novel MEMS-Based Piezoelectric Multi-Modal Vibration Energy Harvester Concept to Power Autonomous Remote Sensing Nodes for Internet of Things (IoT) Applications. In IEEE Sensors 2015. IEEE Sensors 2015, Valencia, Spanien, EU. IEEE. http://hdl.handle.net/20.500.12708/74923 ( reposiTUm)

Stöber, L., Schneider, M., & Schmid, U. (2015). Impact of Contact Material Deposition Technique on the Properties of Ti/4H-SiC Schottky Structures. In ICSCRM 2015 - 16th International Conference on Silicon Carbide and Related Materials (pp. 569–572). http://hdl.handle.net/20.500.12708/74924 ( reposiTUm)

Frischmuth, T., Schneider, M., Maurer, D., Grille, T., & Schmid, U. (2015). Impact of thermal treatment on the residual stress and Young’s modulus of thin a-SiC:H membranes applying bulge testing. In Proceedings of Eurosensors XXIX (pp. 752–755). Procedia Engineering. http://hdl.handle.net/20.500.12708/74926 ( reposiTUm)

Bohnenberger, T., & Schmid, U. (2015). Thin CNT-based Films Deposited with the Layer-by-Layer Technique for Supercapacitor Applications. In Procedia Engineering (pp. 1037–1041). Procedia Engineering. https://doi.org/10.1016/j.proeng.2015.08.717 ( reposiTUm)

Elefsiniotis, A., Kokorakis, N., Becker, Th., & Schmid, U. (2015). A Novel High-temperature Aircraft-specific Energy Harvester Using PCMs and State of the art TEGs. In Materials Today: Proceedings (pp. 814–822). Elsevier. https://doi.org/10.1016/j.matpr.2015.05.105 ( reposiTUm)

Kiziroglou, M. E., Elefsiniotis, A., Kokorakis, N., Wright, S. W., Toh, T. T., Mitcheson, P. D., Schmid, U., Becker, T., & Yeatman, E. M. (2015). Scaling of dynamic thermoelectric harvesting devices in the 1-100 cm3 range. In Proc. of SPIE Vol. 9517-9520 (p. 8). SPIE. http://hdl.handle.net/20.500.12708/74984 ( reposiTUm)

Gillinger, M., Schneider, M., Bittner, A., Nicolay, P., & Schmid, U. (2015). High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films. In Proc. of SPIE Vol. 9517-9520 (p. 8). SPIE. http://hdl.handle.net/20.500.12708/74985 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2015). Calibration Method for Synchronizing the Viewing Zones of a Large-scale Autostereoscopic Multi-view Laser Display. In Proc. of SPIE Vol. 9517-9520 (p. 6). SPIE. http://hdl.handle.net/20.500.12708/74845 ( reposiTUm)

Schmid, P., Zarfl, C., Balogh, G., & Schmid, U. (2014). Gauge Factor of Titanium/Platinum Thin Films up to 350°C. In Procedia Engineering (pp. 172–175). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.611 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Riel, T., Hambeck, C., Julien-Wallsee, F. S., Leeb, W., & Schmid, U. (2014). Laser Light Module with Integrated MEMS Mirror for Autostereoscopic Outdoor Displays. In Procedia Engineering (pp. 1541–1544). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.593 ( reposiTUm)

Frischmuth, T., Schneider, M., Grille, T., & Schmid, U. (2014). Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films. In Procedia Engineering (pp. 128–131). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.543 ( reposiTUm)

Beigelbeck, R., Stifter, M., Schneider, M., Keplinger, F., Schmid, U., Voglhuber-Brunnmaier, T., & Jakoby, B. (2014). Rigorous Analytical Analysis of Resonant Euler-Bernoulli Beams with Constant Thickness and Polynomial Width. In 2014 IEEE Ultrasonics Symposium Proceedings (pp. 2095–2099). IEEE. http://hdl.handle.net/20.500.12708/74311 ( reposiTUm)

Iannacci, J., Serra, E., Sordo, G., Bonaldi, M., Borielli, A., Schmid, U., Bittner, A., Schneider, M., Kuenzig, T., Schrag, G., Pandraud, G., & Sarro, P. M. (2014). MEMS Based Multi Modal Vibration Energy Harvesters for Ultra Low Power Autonomous Remote and Distributed Sensing. In Proceedings of the 14th Mechatronics Forum International Conference (pp. 1–8). http://hdl.handle.net/20.500.12708/74314 ( reposiTUm)

Talai, A., Steinhäußer, F., Bittner, A., Schmid, U., Weigel, R., & Kölpin, K. (2014). A Permittivity Characterization Method by Detuned Ring-Resonators for Bulk Materials up to 110 GHz. In Proceedings of the 44th European Microwave Conference (pp. 124–127). IEEE. http://hdl.handle.net/20.500.12708/74315 ( reposiTUm)

Talai, A., Steinhäußer, F., Bittner, A., Schmid, U., Weigel, R., & Kölpin, K. (2014). A Simplified Equivalent Model for Microwave Characteristics of Porosified LTCC. In XXXI General Assembly and Scientific Symposium of the International Union of Radio Science (pp. 1–4). International Union of Radio Science. http://hdl.handle.net/20.500.12708/74313 ( reposiTUm)

Manzaneque, T., Ruiz-Diez, V., Hernando-Garcia, J., Wistrela, E., Kucera, M., Schmid, U., & Luis Sanchez-Rojas, J. (2014). Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuit. In IEEE SENSORS 2014 Proceedings. IEEE Sensors 2014, Valencia, Spanien, EU. IEEE. https://doi.org/10.1109/icsens.2014.6984978 ( reposiTUm)

Talai, A., Weigel, R., Kölpin, K., Steinhäußer, F., Bittner, A., & Schmid, U. (2014). The Influence by Trapezoidal Conductor Shapes on Ring-Resonator Based Material Characterization up to 110 GHz. In IEEE Conference on Numerical Electromagnetic Modeling and Optimization for RF, Microwave and Terahertz Applications 2014 (pp. 1–4). IEEE. http://hdl.handle.net/20.500.12708/74318 ( reposiTUm)

Talai, A., Steinhäußer, F., Gmeiner, B., Wegener, M., Bittner, A., Schmid, U., Roosen, A., Weigel, R., & Kölpin, K. (2014). Electromagnetic Analysis of Conductor Track Surface Roughnesses from 1 GHz to 110 GHz. In Proceedings of the 2014 International Conference on Electromagnetics in Advanced Applications (ICEAA) (pp. 415–418). IEEE. http://hdl.handle.net/20.500.12708/74317 ( reposiTUm)

Mayrhofer, P. M., Euchner, H., Bittner, A., & Schmid, U. (2014). Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN. In Procedia Engineering (pp. 112–115). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.396 ( reposiTUm)

Schneider, M., Bittner, A., Schmid, P., & Schmid, U. (2014). Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS Cantilevers. In Procedia Engineering (pp. 1493–1496). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.581 ( reposiTUm)

Bittner, A., Prewein, F., & Schmid, U. (2014). Impact of Patterning Technique on the Long Term Stability of Ag Thin Films. In Procedia Engineering (pp. 116–119). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.397 ( reposiTUm)

Zarfl, C., Schmid, P., Balogh, G., & Schmid, U. (2014). TiAlN Thin Films as High Temperature Strain Gauges. In Procedia Engineering (pp. 136–139). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.578 ( reposiTUm)

Ruiz-Díez, V., Hernando-Garcia, J., Kucera, M., Ababneh, A., Schmid, U., Seidel, H., & Sànchez-Rojas, J. L. (2014). Modelling Of Out-Of-Plane And In-Plane Modes Of Microplates In Liquid Media. In MME 2014 - 25th Micromechanics and Microsystems Europe workshop (pp. 1–4). http://hdl.handle.net/20.500.12708/74309 ( reposiTUm)

Stöber, L., Konrath, J. P., Schneider, M., & Schmid, U. (2014). Usability of Molybdenum and Molybdenum Nitride Thin Films for Microsystem Applications. In MME 2014 - 25th Micromechanics and Microsystems Europe workshop (pp. 1–4). http://hdl.handle.net/20.500.12708/74310 ( reposiTUm)

Frischmuth, T., Dergez, D., Stübegger, M., Hedenig, U., Grille, T., & Schmid, U. (2014). Influence of High Temperature Annealings on a-SiC:H Thin Film Properties. In Smart Systems Integration (pp. 475–478). Apprimus Verlag, Aachen. http://hdl.handle.net/20.500.12708/74316 ( reposiTUm)

Beigelbeck, R., Schneider, M., Stifter, M., Voglhuber-Brunnmaier, T., Jakoby, B., Schmid, U., & Keplinger, F. (2014). Novel exact closed-form solutions for the resonant frequencies and mode-shapes of Euler-Bernoulli beams with constant thickness and polynomial width. In Tagungsband - 64. Jahrestagung der ÖPG. 64. Jahrestagung der Österreichischen Physikalischen Gesellschaft, Pöllau, Steiermark, Austria. http://hdl.handle.net/20.500.12708/74447 ( reposiTUm)

Dergez, D., Bittner, A., Schalko, J., & Schmid, U. (2014). Low-stress and Long-term Stable a-SiNx:H Films Deposited by ICP-PECVD. In Procedia Engineering (pp. 100–103). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.392 ( reposiTUm)

Steinhäußer, F., Sandulache, G., Fahrner, W., Hansal, W., Bittner, A., & Schmid, U. (2014). Thermal Conductivity Measurements with Galvanic Metallization Lines on Porosified LTCC Applying the 3-Omega Technique. In Procedia Engineering (pp. 104–107). Elsevier. https://doi.org/10.1016/j.proeng.2014.11.393 ( reposiTUm)

Reitterer, J., Fidler, F., Julien-Wallsee, F. S., Barth, M., Eberhardt, W., Keßler, U., Kück, H., & Schmid, U. (2013). Analysis of thermal vias in molded interconnect devices. In Proceedings of SPIE Vol. 8763. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73692 ( reposiTUm)

Manzaneque, T., Ruiz-Díez, V., Hernando-Garcia, J., Wistrela, E., Kucera, M., Bittner, A., Schmid, U., & Sànchez-Rojas, J. L. (2013). Oscillator Circuit Based On Piezoelectric Bending Micro-Resonator Operated In Liquid Media. In Proceedings. 24th Micromechanics and Microsystems Europe Conference - MME 2013, Espoo, Finland, EU. http://hdl.handle.net/20.500.12708/73691 ( reposiTUm)

Elefsiniotis, A., Kokorakis, N., Becker, T., & Schmid, U. (2013). Performance Of A Low Temperature Energy Harvesting Device For Powering Wireless Sensor Nodes In Aircrafts Applications. In Transducers 2013 - Proceedings (pp. 2276–2279). IEEE. http://hdl.handle.net/20.500.12708/73689 ( reposiTUm)

Backes, A., Walkoun, P., Patocka, F., & Schmid, U. (2013). Generation Of A Porous Device Layer On Soi Substrates. In Transducers 2013 - Proceedings (pp. 1048–1050). IEEE. http://hdl.handle.net/20.500.12708/73688 ( reposiTUm)

Talai, A., Steinhäußer, F., Gmeiner, B., Bittner, A., Rüde, U., Schmid, U., Weigel, R., & Koelpin, A. (2013). Electromagnetic Analysis of Fringed Microstrip Lines on Porosified LTCC. In Proceedings of the International Conference on Electromagnetics in Advanced Applications (ICEAA) 2013 (pp. 1189–1192). IEEE. http://hdl.handle.net/20.500.12708/73690 ( reposiTUm)

Thangaraj, K., Elefsiniotis, A., Aslam, S., Becker, T., Schmid, U., Lees, J., Featherston, C. A., & Pullin, R. (2013). Hybrid energy storage system for wireless sensor node powered by aircraft specific thermoelectric energy harvesting. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. https://doi.org/10.1117/12.2017691 ( reposiTUm)

Ababneh, A., Al-Omari, A. N., Qiu, H. C., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Bittner, A., Schmid, U., & Seidel, H. (2013). Pressure Dependence of the Quality Factor of Piezoelectrically driven AlN/Si-Microcantilevers. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73694 ( reposiTUm)

Lavchiev, V., Kristament, C., Brandstetter, M., Ramer, G., Lendl, B., Hedenig, U., Grille, T., Irsigler, P., & Jakoby, B. (2013). Mid-infrared rib waveguide absorption sensors based on Si. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS VI. SPIE. https://doi.org/10.1117/12.2017273 ( reposiTUm)

Reitterer, J., Fidler, F., Saint Julien-Wallsee, F., Schmid, G., Gartner, W., Leeb, W., & Schmid, U. (2013). Large-scale autostereoscopic outdoor display. In Proc. SPIE 8648, Stereoscopic Displays and Applications XXIV (pp. 1–9). http://hdl.handle.net/20.500.12708/73401 ( reposiTUm)

Kucera, M., Hofbauer, F., Manzaneque, T., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2013). Quality Factor Enhancement for Resonant MEMS Applying an Analogue Feedback Circuit Driven by a Lock-in Amplifier. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73710 ( reposiTUm)

Elefsiniotis, A., Kokorakis, N., Becker, T., & Schmid, U. (2013). Design and Material Aspects for Thermoelectric Energy Harvesting Devices in Aircrafts. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73712 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2013). Investigation on the Dielectric Behavior of Aluminum Nitride Thin Films at Different Temperatures Applying a Time-zero Approach. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73711 ( reposiTUm)

Talai, A., Gmeiner, B., Steinhäußer, F., Bittner, A., Rüde, U., Schmid, U., & Koelpin, A. (2013). Electromagnetic Field Analysis with Advanced Structural Modeling of Microstrips on Porosified LTCC. In Proceedings of the 43rd European Microwave Conference (pp. 440–443). http://hdl.handle.net/20.500.12708/73737 ( reposiTUm)

Talai, A., Steinhäußer, F., Schmid, U., Weigel, R., Bittner, A., & Koelpin, A. (2013). A Finite 3D Field Simulation Method for Permittivity Gradient Implementation of Porosification Processes in LTCC. In International Microwave Symposium 2013. IMS 2013 - International Microwave Symposium 2013, Seattle, U.S.A., Non-EU. IEEE. http://hdl.handle.net/20.500.12708/73738 ( reposiTUm)

Ruiz-Díez, V., Manzaneque, T., Hernando-Garcia, J., Ababneh, A., Kucera, M., Al-Omari, A. N., Bittner, A., Schmid, U., Seidel, H., & Sànchez-Rojas, J. L. (2013). Contour And Flexure-Actuated In-Plane Modes Of Aln-Based Piezoelectric Vibrating Mems. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73713 ( reposiTUm)

Dow, A. B. A., Lin, H., Popov, C., Schmid, U., & Kherani, N. P. (2013). On controlling EBL parameters for nanoelectromechanical resonators fabricated on insulating/semiconducting structures. In 2013 IEEE 5th International Nanoelectronics Conference (INEC). 2013 IEEE 5th International Nanoelectronics Conference (INEC), Resorts World Sentosa, Singapore, Non-EU. IEEE. https://doi.org/10.1109/inec.2013.6466035 ( reposiTUm)

Dow, A. B. A., Lin, H., Popov, C., Schmid, U., & Kherani, N. P. (2013). High frequency SAW nanotransducer utilizing ultrananocrystalline diamond/ A1N bimorph architecture. In 2013 IEEE 5th International Nanoelectronics Conference (INEC). 2013 IEEE 5th International Nanoelectronics Conference (INEC), Resorts World Sentosa, Singapore, Non-EU. IEEE. https://doi.org/10.1109/inec.2013.6466047 ( reposiTUm)

Steinhäußer, F., Talai, A., Koelpin, A., Weigel, R., Bittner, A., & Schmid, U. (2013). Einfluss der Materialverteilung in porosizierter LTCC auf die effektive Permittivität durch finite 3D Feld-Simulation. In Proceedings MikroSystemTechnik Kongress 2013 (pp. 860–863). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/73725 ( reposiTUm)

Kucera, M., Wistrela, E., Hofbauer, F., Bittner, A., & Schmid, U. (2013). Sensitivitätssteigerung von piezoelektrischen, resonant angetriebenen Mikrosensoren durch digitale Q-Faktorverstärkung. In Proceedings MikroSystemTechnik Kongress 2013 (pp. 249–252). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/73723 ( reposiTUm)

Alamin Dow, A. B., Schmid, U., & Kherani, N. P. (2013). Advanced Modelling of AlN-based Micromachined Energy Harvesters Driven by -Emitting Radioisotopes. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73709 ( reposiTUm)

Alamin Dow, A. B., Bittner, A., Schmid, U., & Kherani, N. P. (2013). Design, Fabrication and Characterization of a Micromachined Piezoelectric Energy Harvester Excited by Ambient Vibrations. In Proceedings of SPIE. SPIE Microtechnologies 2013, Grenoble, France, EU. http://hdl.handle.net/20.500.12708/73708 ( reposiTUm)

Bittner, A., Backes, A., & Schmid, U. (2013). Elektromigrationsverhalten von Silberdünnfilmen auf LTCC. In Proceedings MikroSystemTechnik Kongress 2013 (pp. 729–732). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/73728 ( reposiTUm)

Kirsch, C., Feili, D., Schmid, U., Balck, A., Leester-Schaedel, M., Büttgenbach, S., & Seidel, H. (2013). Untersuchung des Bucklingeffektes an mittels gesputtertem Wolfram vorgespannten Siliziummembranen für Mikroaktorikanwendungen. In Proceedings MikroSystemTechnik Kongress 2013 (pp. 492–495). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/73727 ( reposiTUm)

Backes, A., Patocka, F., Walkoun, P., & Schmid, U. (2013). Poröses Silizium auf SOI Substraten. In Proceedings MikroSystemTechnik Kongress 2013 (pp. 630–633). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/73729 ( reposiTUm)

Kucera, M., Manzaneque, T., Sànchez-Rojas, J. L., Dörr, N., Bittner, A., & Schmid, U. (2013). Q-factor amplification and parasitic effect compensation using a self-actuated piezoelectric AlN MEMS resonator for viscosity measurements. In WTC 2013 - 5th World Tribology Congress. WTC 2013 - 5th World Tribology Congress, Turin, Italien, EU. http://hdl.handle.net/20.500.12708/73730 ( reposiTUm)

Adamovic, N., Backes, A., & Schmid, U. (2013). Reduction of light losses in standard silicon solar modules by using specially designed optical elements. In 10th International Conference on Nanosciences @ Nanotechnologies (NN13) - Abstract Book. 10th International Conference on Nanosciences @ Nanotechnologies (NN13), Thessaloniki, Greece, EU. http://hdl.handle.net/20.500.12708/73947 ( reposiTUm)

Backes, A., Adamovic, N., & Schmid, U. (2013). New Light Management Concepts for standard Si solar cells fabricated by Embossing of Polycarbonate Front & Back sheets. In EU PVSEC 2013 - Conference Procedings (pp. 3096–3098). http://hdl.handle.net/20.500.12708/73949 ( reposiTUm)

Schneider, M., Bittner, A., Schmid, U., Beigelbeck, R., Schalko, J., & Stifter, M. (2012). Experimentelle Verifikation eines verbesserten Bulge-Test Modells zur elastomechanischen Charakterisierung von runden Aluminiumnitrid- und Siliziumnitridmembranen. In ME Tagung 2012 (pp. 56–60). Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik. http://hdl.handle.net/20.500.12708/73344 ( reposiTUm)

Kucera, M., Manzaneque, T., Sànchez-Rojas, J. L., Bittner, A., & Schmid, U. (2012). Quality Factor Enhancement of a Self-Actuated Piezoelectric MEMS Cantilever using Lock-in Driven Feedback Loop. In ME Tagung 2012 (pp. 166–171). Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik. http://hdl.handle.net/20.500.12708/73343 ( reposiTUm)

Alamin Dow, A. B., Kherani, N. P., Popov, C., Ahmed, A., & Schmid, U. (2012). Nanocrystalline Diomond/AlN Structures for High Efficient SAW Nano-Resonators. In International Symposium on Applications of Ferroelectrics (ISAF) - 2012. International Symposium on Applications of Ferroelectrics (ISAF) - 2012, Aveiro, P, EU. IEEE. http://hdl.handle.net/20.500.12708/73035 ( reposiTUm)

Kucera, M., Manzaneque, T., Sànchez-Rojas, J. L., Bittner, A., & Schmid, U. (2012). Lock-in Driven Quality Factor Enhancement with Parasitic Effect Compensation of a Self- Actuated Piezoelectric MEMS Cantilever. In Proceedings IEEE Ultrasonics Symposium. IEEE Ultrasonics Symposium, New York City, NY, USA, Non-EU. IEEE. http://hdl.handle.net/20.500.12708/73036 ( reposiTUm)

Haas, T., Zeilmann, C., Schmid, U., & Bittner, A. (2012). Manufacturing Processes for Pressure Sensors Realized in LTCC. In Proceedings of the 13th Mechatronics Forum. 13th Mechatronics Forum, Linz, Austria. http://hdl.handle.net/20.500.12708/73037 ( reposiTUm)

Bittner, A., & Schmid, U. (2012). Impact of Metallization Properties on the High Frequency Performance of Coplanar Waveguides on LTCC. In Proceedings Electronic Devices and Systems (pp. 224–228). http://hdl.handle.net/20.500.12708/73038 ( reposiTUm)

Bittner, A., & Schmid, U. (2012). Modified Organic low-k Dielectric Layers on Fired LTCC Substrates. In Proceedings (pp. 394–399). http://hdl.handle.net/20.500.12708/73040 ( reposiTUm)

Alamin Dow, A. B., Ahmed, A., Bittner, A., Popov, C., Schmid, U., & Kherani, N. P. (2012). SAW Nano-Transducer Utilizing Ultra-Nanocrystalline Diamond/AlN Bi-Layer. In Proceedings IEEE Ultrasonics Symposium. IEEE Ultrasonics Symposium, New York City, NY, USA, Non-EU. IEEE. http://hdl.handle.net/20.500.12708/73041 ( reposiTUm)

Zeilmann, C., Haas, T., Backes, A., & Schmid, U. (2012). Micro Fluidic Mass Flow Sensor Concept for Functional Ceramic Circuits. In Proceedings (pp. 181–190). http://hdl.handle.net/20.500.12708/73039 ( reposiTUm)

Adamovic, N., Backes, A., & Schmid, U. (2012). Improved Light Management On Standard Silicon Solar Cells & Modules Using Hot Embossing Process. In Photovoltaik - Innovationen für den internationalen Wettbewerb (p. 1). http://hdl.handle.net/20.500.12708/73950 ( reposiTUm)

Makarczuk, T., Matin, T. R., Karman, S. B., Diah, S. Z. M., Davaji, B., Macqueen, M. O., Mueller, J., Schmid, U., & Gebeshuber, I. C. (2011). Biomimetic MEMS to assist, enhance and expand human sensory perceptions - A survey on state-of-the art developments. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V. SPIE. https://doi.org/10.1117/12.886554 ( reposiTUm)

Moscelli, N., Witarski, W., Van den Driesche, S., & Vellekoop, M. J. (2011). In incubator live cell imaging platform. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (p. 1). SPIE. https://doi.org/10.1117/12.886908 ( reposiTUm)

Van den Driesche, S., Haiden, C., Witarski, W., & Vellekoop, M. J. (2011). Mid-infrared CH2-stretch ratio sensor system for suspended mammalian cells. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (p. 1). SPIE. https://doi.org/10.1117/12.886446 ( reposiTUm)

Alamin Dow, A. B., Al-Rubaye, H., Koo, D., Schneider, M., Bittner, A., Schmid, U., & Kherani, N. P. (2011). Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.885861 ( reposiTUm)

Haas, T., Zeilmann, C., Bittner, A., & Schmid, U. (2011). Investigation on Micromachining Technologies for the Realization of LTCC Devices and Systems. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–6). SPIE. https://doi.org/10.1117/12.887603 ( reposiTUm)

Bohnenberger, T., Matovic, J., & Schmid, U. (2011). Thin Catalyst Layers Based on Carbon Nanotubes for PEM-Fuel Cell Applications. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.886868 ( reposiTUm)

Ruiz, D., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Gimzewski, J. K., & Sánchez-Rojas, J. L. (2011). Characterization of the first in-plane mode of AlN-actuated microcantilevers. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.886981 ( reposiTUm)

Bittner, A., Nagel, N., Seidel, H., & Schmid, U. (2011). The Impact of Substrate Properties on the Electromigration Resistance of Sputter-Deposited Cu Thin Films. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.886921 ( reposiTUm)

Oliver, M. J., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Olivares, J., Iborra, E., Pobedinskas, P., Haenen, K., & Sànchez-Rojas, J. L. (2011). Resonant Piezoelectric AlN-actuated Microcantilevers For Detection Of Antigen/Antibody Interactions. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–8). SPIE. https://doi.org/10.1117/12.887010 ( reposiTUm)

Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. In U. Schmid & J. L. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–8). https://doi.org/10.1117/12.886824 ( reposiTUm)

Bednar, N., Matovic, J., Atassi, I., Schmid, U., & Stojanovic, G. (2011). A Metallic Nanoparticles Generation Method for Conductive Inks. In Proceedings of the 16th International Symposium on Power Electronics (p. 5). http://hdl.handle.net/20.500.12708/72459 ( reposiTUm)

Balck, A., Leester-Schaedel, M., Kirsch, C., Schmid, U., Seidel, H., & Büttgenbach, S. (2011). Novel Energy-Saving Microvalve For Medical Applications. In 6th international Conference on Microtechnologies in Medicine and Biology (pp. 283–284). http://hdl.handle.net/20.500.12708/72657 ( reposiTUm)

Backes, A., Adamovic, N., Meinhardt, G., & Schmid, U. (2011). Optische Mikrostrukturen in Photovoltaik Modulen. In Mikrosystemtechnik Kongress 2011 - Proceedings (p. 4). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/72636 ( reposiTUm)

Backes, A., Adamovic, N., Meinhardt, G., & Schmid, U. (2011). Advanced concepts of the improved light management for solar cells and modules. In EU PVSEC Proceedings (pp. 3340–3344). WIP Wirtschaft und Infrastruktur GmbH & Co. https://doi.org/10.4229/26thEUPVSEC2011-4AV.1.14 ( reposiTUm)

Schmid, U., & Bittner, A. (2011). LTCC as Advanced Substrate Material for Miniaturized Devices and Systems. In Conference Proceedings (pp. 55–58). http://hdl.handle.net/20.500.12708/72655 ( reposiTUm)

Alamin Dow, A. B., Al-Rubaye, H., Schmid, U., & Kherani, N. P. (2011). Analysis and modeling of a bimorph AlN piezoelectric autonomous microgenerator stimulated by &#x03B2;-emitting radioisotopes. In 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials. 20th IEEE International Symposium on Applications of Ferroelectrics / International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials, Vancouver, Canada, Non-EU. IEEE Xplore. https://doi.org/10.1109/isaf.2011.6014134 ( reposiTUm)

Bohnenberger, T., Matovic, J., & Schmid, U. (2011). Comparison of Drop Deposition and Layer-by-layer Approach to Form Thin Carbon-nanotube-membranes as Catalyst Layer in Fuel Cells. In H. Kück, H. Reinecke, & S. Dimov (Eds.), Proceedings of the 8th International Conference on Multi-Material Micro Manufacture (pp. 234–237). Research Publishing. https://doi.org/10.3850/978-981-07-0319-6_213 ( reposiTUm)

Adamovic, N., Backes, A., Schmid, U., Meinhardt, G., Federzoni, L., & Bihr, J.-C. (2011). Reduction of Shading Losses in Solar PV Systems. In 8th International Conference on Nanosciences & Nanotechnologies- NN11 - Abstract Book (p. 234). http://hdl.handle.net/20.500.12708/72638 ( reposiTUm)

Alamin Dow, A. B., Al-Rubaye, H., Schmid, U., & Kherani, N. P. (2011). Modelling and Analysis of a MEMS Piezoelectric Energy Harvester Based on Random Vibrations. In Smart Systems Integration 2011 (SSI) - 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components (pp. 1–5). VDE Verlag Gmbh. http://hdl.handle.net/20.500.12708/72667 ( reposiTUm)

Bittner, A., & Schmid, U. (2011). Lokale Modifikation dielektrischer Eigenschaften von glaskeramischen Hochfrequenzsubstraten. In Mikrosystemtechnik Kongress 2011 - Proceedings (pp. 149–152). VDE VERLAG GMBH, Berlin und Offenbach, Bismarckstraße 33, 10625 Berlin. http://hdl.handle.net/20.500.12708/72669 ( reposiTUm)

Haas, T., Zeilmann, C., Backes, A., Schmid, U., & Bittner, A. (2011). Investigation of Innovative Cooling Concepts for Functional Ceramic Circuits. In 6th European Advanced Technology Workshop on Micropackaging and Thermal Management (p. 1). http://hdl.handle.net/20.500.12708/72671 ( reposiTUm)

Bittner, A., Backes, A., & Schmid, U. (2011). Impact of Crystal Orientation on the Electromigration Resistance and Long Term Stability of Sputtered Ag Thin Films on LTCC. In Smart Systems Integration 2011 (SSI) - 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components (pp. 1–6). VDE Verlag Gmbh. http://hdl.handle.net/20.500.12708/72668 ( reposiTUm)

Samson, D., Becker, T., & Schmid, U. (2011). Thermoelectric Energy Harvesting in Aircraft for Wireless Sensors. In Proceedings of the ARGE Sensorik PhD-Summit 2011 (pp. 29–37). http://hdl.handle.net/20.500.12708/72670 ( reposiTUm)

Sen, S., Schneidhofer, C., Dörr, N., & Vellekoop, M. J. (2011). Evaluation of sensor arrays for engine oils using artificial oil alteration. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 80662C-1-80662C – 7). SPIE. https://doi.org/10.1117/12.886761 ( reposiTUm)

Haas, T., Zeilmann, C., Backes, A., Bittner, A., & Schmid, U. (2010). Design and Evaluation of an Active Cooling Concept For Functional Ceramic Circuits. In Abstracts (pp. 80–83). http://hdl.handle.net/20.500.12708/71827 ( reposiTUm)

Sökmen, Ü., Waag, A., Ababneh, A., Seidel, H., Schmid, U., & Peiner, E. (2010). AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE. In Abstracts (pp. 45–48). VDE Verlag. http://hdl.handle.net/20.500.12708/71826 ( reposiTUm)

Adamovic, N., Matovic, J., Zivanov, L., & Schmid, U. (2010). Nanofluidic Proton Conductive Structure: Design And Characterization. In New Trends in Integrated Microsystems and Components (pp. 47–55). University of Novs Sad, Faculty of Technical Science. http://hdl.handle.net/20.500.12708/71798 ( reposiTUm)

Samson, D., Kluge, M., Becker, T., & Schmid, U. (2010). Optimization of a Heat Storage Device for an Aircraft Specific Thermoelectric Power Generator. In Proceedings. 8#^{th} European Conference on Thermoelectrics (ECT 2010), Como, I, EU. http://hdl.handle.net/20.500.12708/71830 ( reposiTUm)

Samson, D., Kluge, M., Becker, T., Otterpohl, T., & Schmid, U. (2010). Energieautonomer Funknetzwerkknoten für Luftfahrzeuge. In Proceedings of the ME 2010. Informationstagung Mikroelektronik ME10, Wien, Österreich, Austria. http://hdl.handle.net/20.500.12708/71828 ( reposiTUm)

Bittner, A., & Schmid, U. (2010). Permittivity of LTCC Substrates Porousified With a Wet Chemical Etching Process. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 327–330). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.114 ( reposiTUm)

Manzaneque, T., Hernando-García, J., Ababneh, A., Seidel, H., Sökmen, Ü., Peiner, E., Schmid, U., & Sánchez-Rojas, J. L. (2010). Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1494–1497). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.400 ( reposiTUm)

Fricke, S., Friedberger, A., Seidel, H., & Schmid, U. (2010). Micromachined Pressure Sensor Based on Sapphire for High Temperature Applications. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1396–1400). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.376 ( reposiTUm)

Samson, D., Kluge, M., Becker, T., & Schmid, U. (2010). Energy Harvesting for Autonomous Wireless Sensor Nodes in Aircraft. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1160–1163). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.317 ( reposiTUm)

Matovic, J., Adamovic, N., Jakšić, Z., & Schmid, U. (2010). Field effect transistor based on protons as charge carriers. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1368–1371). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.369 ( reposiTUm)

Klein, S., Thilmont, S., Ziegler, V., Prechtel, U., Schmid, U., & Seidel, H. (2009). High Temperature Stable Rf Mems Switch Based On Tungsten-Titanium. In Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 09) (pp. 1409–1412). IEEE. http://hdl.handle.net/20.500.12708/71216 ( reposiTUm)

Catrin, R., Gachot, C., Marchand, G., Schmid, U., & Mücklich, F. (2009). Selective wet chemical etching of metallic thin films designed by Laser Interference Metallurgy (LIMET). In Proceedings of SPIE. SPIE Europe: Microtechnologies for the New Millennium, Dresden, Deutschland, EU. Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71229 ( reposiTUm)

Grosser, M., & Schmid, U. (2009). Influence of Back Pressure and Plasma Power on Grain Size, Phase Composition and Resistivity of Tantalum Thin Films. In Proceedings of SPIE (p. 8). Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71231 ( reposiTUm)

Bolzmacher, C., Bauer, K., Schmid, U., Hafez, M., & Seidel, H. (2009). Robust Superelastic, Metallic Amplification Unit for Piezoelectric Microactuators. In Proceedings of SPIE. SPIE Europe: Microtechnologies for the New Millennium, Dresden, Deutschland, EU. Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71227 ( reposiTUm)

Ababneh, A., Marchand, G., Seidel, H., Hernando-Garcia, J., Sànchez-Rojas, J. L., Sökmen, Ü., Peiner, E., & Schmid, U. (2009). Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS Applications. In Proceedings of SPIE. SPIE Europe: Microtechnologies for the New Millennium, Dresden, Deutschland, EU. Society of Photo-Optical Instrumentation Engineers (SPIE). http://hdl.handle.net/20.500.12708/71221 ( reposiTUm)

Bittner, A., Seidel, H., Kautenburger, R., Roosen, A., & Schmid, U. (2009). Investigation on the Porosification Behaviour of Fired LTCC Substrates. In Proceedings of IMAPS/ACerS 2009 (pp. 238–244). IMAPS. http://hdl.handle.net/20.500.12708/71220 ( reposiTUm)

Matovic, J., Adamovic, N., Schmid, U., & Jaksic, Z. (2009). Nanomembranes - a link between MEMS and NEMS. In Mikrosystemtechnik Kongress 2009 - Proceedings. Mikrosystemtechnik Kongress 2009, Berlin, D, EU. VDE Verlag. http://hdl.handle.net/20.500.12708/71157 ( reposiTUm)

Gachot, C., Hans, M., Catrin, R., Schmid, U., & Mücklich, F. (2009). Tuned Wettability of Material Surfaces for tribological Applications in miniaturized Systems by Laser Interference Metallurgy. In Proceedings of SPIE (p. 9). Society of Photo-Optical Instrumentation Engineers (SPIE). http://hdl.handle.net/20.500.12708/71218 ( reposiTUm)

Sànchez-Rojas, J. L., Hernando-Garcia, J., Donoso, A., Bellido, J. C., Gutiérrez, L. M., Ababneh, A., Seidel, H., & Schmid, U. (2009). Piezoelectric Modal Sensors/actuators Based On Microplates Applying Surface Electrode Patterning. In Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 09) (pp. 2346–2349). IEEE. http://hdl.handle.net/20.500.12708/71217 ( reposiTUm)

Stehle, A., Georgiev, G., Ziegler, V., Schoenlinner, B., Prechtel, U., Schmid, U., & Seidel, H. (2009). Broadband Single-Pole Multithrow RF-MEMS Switches for Ka-Band. In 2009 German Microwave Conference. German Microwave Conference 2009, München, D, EU. IEEE. https://doi.org/10.1109/gemic.2009.4815911 ( reposiTUm)

Bienert, C., Roosen, A., Grosser, M., Ziegler, V., & Schmid, U. (2009). Electrical and Mechanical Characterization of Low Temperature Co-fired Ceramics for High Temperature Sensor Applications. In Proceedings of SPIE. SPIE Europe: Microtechnologies for the New Millennium, Dresden, Deutschland, EU. Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71233 ( reposiTUm)

Bittner, A., Klein, S., Seidel, H., & Schmid, U. (2009). Reliability of Ag Thin Films Sputter Deposited on Silicon and Ceramic Based Substrates. In Proceedings of SPIE (p. 7). Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71232 ( reposiTUm)

Bittner, A., Klein, S., Seidel, H., Schwanke, D., & Schmid, U. (2009). Einfluss der Abscheideparameter auf die Mikrostruktur von Silberdünnfilmen auf LTCC. In Mikrosystemtechnik Kongress 2009 - Proceedings. Mikrosystemtechnik Kongress 2009, Berlin, D, EU. VDE Verlag. http://hdl.handle.net/20.500.12708/71236 ( reposiTUm)

Sökmen, Ü., Peiner, E., Waag, A., Ababneh, A., Seidel, H., & Schmid, U. (2009). AlN on Solicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE. In Smart Systems Integration 2009 Proceedings (pp. 528–531). AKA Verlag, Heidelberg. http://hdl.handle.net/20.500.12708/71234 ( reposiTUm)

Ababneh, A., Schmid, U., Hernando-Garcia, J., Sànchez-Rojas, J. L., & Seidel, H. (2009). Ermittlung der piezoelektrischen Koeffizienten von AlN-Dünnfilmen mit unterschiedlicher Kristallorientierung. In Mikrosystemtechnik Kongress 2009 - Proceedings. Mikrosystemtechnik Kongress 2009, Berlin, D, EU. VDE Verlag. http://hdl.handle.net/20.500.12708/71235 ( reposiTUm)

Klein, S., Comtesse, C., Bittner, A., Seidel, H., Ziegler, V., Prechtel, U., & Schmid, U. (2009). RF MEMS Switches Based on an Alloy of Aluminum-Silicon-Copper. In Proceedings of SPIE (p. 8). Society of Photo-Optical Instrumentation Engineers (SPIE). http://hdl.handle.net/20.500.12708/71222 ( reposiTUm)

Hernando-Garcia, J., Sànchez-Rojas, J. L., Ababneh, A., Seidel, H., Sökmen, Ü., Peiner, E., & Schmid, U. (2009). Characterization and simulation of high quality AlN-actuated resonant suspended beams. In Proceedings of SPIE (p. 9). Society of Photo-Optical Instrumentation Engineers (SPIE). http://hdl.handle.net/20.500.12708/71223 ( reposiTUm)

Ziegler, V., Stehle, A., Georgiev, G., Schönlinner, B., Prechtel, U., Seidel, H., & Schmid, U. (2009). SP48T Module Architecture and RF-MEMS Multi-Throw Switches for a Multi-beam Antenna Measurement Set-Up at K- and Ka-Band. In Proceedings of the 39th European Microwave Conference 2009 (pp. 1128–1131). http://hdl.handle.net/20.500.12708/71244 ( reposiTUm)

Sökmen, Ü., Stranz, A., Waag, A., Ababneh, A., Seidel, H., Schmid, U., & Peiner, E. (2009). Realization of AlN Sputter-Deposited Silicon Cantilever Resonators for Mass Sensing. In MME 2009 (pp. 150–153). LAAS-CNS. http://hdl.handle.net/20.500.12708/71243 ( reposiTUm)

Grosser, M., Seidel, H., & Schmid, U. (2009). Einfluss der Sputterparameter auf Morphologie, Phasenbildung und elektrische Eigenschaften von dünnen Tantalschichten. In Mikrosystemtechnik Kongress 2009 - Proceedings. Mikrosystemtechnik Kongress 2009, Berlin, D, EU. VDE Verlag. http://hdl.handle.net/20.500.12708/71239 ( reposiTUm)

Klein, S., Bittner, A., Schmid, U., & Seidel, H. (2009). CMOS kompatible RF MEMS Schalter. In Mikrosystemtechnik Kongress 2009 - Proceedings (p. 4). VDE Verlag. http://hdl.handle.net/20.500.12708/71237 ( reposiTUm)

Manzaneque, T., Hernando-Garcia, J., Rodríguez-Aragón, L., Ababneh, A., Seidel, H., Schmid, U., & Sànchez-Rojas, J. L. (2009). Analysis of the Quality Factor of Piezoelectric-Actuated Micro- Resonators. In Proceedings of SPIE (p. 11). Society of Photo-Optical Instrumentation Engineers (SPIE. http://hdl.handle.net/20.500.12708/71226 ( reposiTUm)

Oliver, M. J., Hernando-Garcia, J., Olivares, J., Clement, M., Ababneh, A., Schmid, U., & Sànchez-Rojas, J. L. (2009). Sputtered polycrystalline AlN as a platform for biofunctionalized devices. In Proceedings of SPIE (p. 10). Society of Photo-Optical Instrumentation Engineers (SPIE). http://hdl.handle.net/20.500.12708/71224 ( reposiTUm)

Schmid, U., & Sànchez-Rojas, J. L. (2008). Piezoelectric Properties of Sputtered AIN Thin Films and Their Applications. In Advances in Science and Technology. CIMTEC, International Cermics Congress and Forum on New Materials, Acireale, Sicily, Italy, EU. https://doi.org/10.4028/www.scientific.net/ast.54 ( reposiTUm)

Beiträge in Büchern

Fischeneder, M., Oposich, M., Schneider, M., & Schmid, U. (2018). Active Q-factor Control of Piezoelectric MEMS Cantilevers for High Speed AFM Applications in Vacuum. In Microsystems Technology in Germany 2018 / Mikrosystemtechnik in Deutschland 2018 (pp. 36–37). trias Consult. http://hdl.handle.net/20.500.12708/29940 ( reposiTUm)

Talai, A., Kölpin, K., Bittner, A., Steinhäußer, F., & Schmid, U. (2018). Porösizierte Glaskeramik-Substrate für die Radarsensorik. In T. Tillle (Ed.), Automobil-Sensorik 2 (pp. 55–75). Springer-Verlag, Berlin-Heidelberg. https://doi.org/10.1007/978-3-662-56310-6_3 ( reposiTUm)

Schneider, M., Bittner, A., Kucera, M., & Schmid, U. (2016). Piezoelektrische MEMS Sensoren zur Viskositäts- und Dichtebestimmung von technischen Flüssigkeiten. In Tille Thomas (Ed.), Automobil-Sensorik (pp. 353–372). Springer-Verlag, Berlin-Heidelberg. https://doi.org/10.1007/978-3-662-48944-4_17 ( reposiTUm)

Balck, A., Kirsch, C., Schmid, U., Seidel, H., Leester-Schädel, M., & Büttgenbach, S. (2011). Bistable Microvalve for Biomedical Usage. In S. Büttgenbach, A. Burisch, & J. Hesselbach (Eds.), Design and Manufacturing of Active Microsystems (pp. 375–392). Springer. https://doi.org/10.1007/978-3-642-12903-2_21 ( reposiTUm)

Schmid, U., & Grosser, M. (2009). Room-temperature resistivity of Ti/Pt thin films on LTCC/glass substrates upon high temperature annealing. In Chemical Mineralogy, Smelting and Metallization (pp. 315–332). Nova Science Publishers. http://hdl.handle.net/20.500.12708/26634 ( reposiTUm)

Bücher

Schmid, U., & Schneider, M. (Eds.). (2018). Piezoelectric MEMS. MDPI. http://hdl.handle.net/20.500.12708/24537 ( reposiTUm)

Schmid, U., Sànchez-Rojas, J. L., & Leester-Schaedel, M. (Eds.). (2011). Volume 8066 Smart Sensors, Actuators, and MEMS V. SPIE Digital Library. http://hdl.handle.net/20.500.12708/23402 ( reposiTUm)

Schmid, U., Cané, C., & Shea, H. (Eds.). (2009). Microtechnologies for the New Millennium 2009 - Volume 7362. SPIE. http://hdl.handle.net/20.500.12708/23034 ( reposiTUm)

Präsentationen

Schneider, M., & Schmid, U. (2024, June 7). Material Aspects and Unconventional Device Concepts for PiezoMEMS [Keynote Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208519 ( reposiTUm)

Parmar, P. M., Leitgeb, M., Yadav, M. K., Zellner, C., Wedl, G., Pfusterschmied, G., & Schmid, U. (2024). High-temperature adhesive bonding of 4H-SiC substrates [Conference Presentation]. ICSCRM 2024: INTERNATIONAL CONFERENCE ON SILICON CARBIDE AND RELATED MATERIALS 2024, Raleigh, United States of America (the). http://hdl.handle.net/20.500.12708/208520 ( reposiTUm)

Yang, T., Perazzi, M., Leitgeb, M., Zellner, C., Pfusterschmied, G., & Schmid, U. (2024, September). K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation [Conference Presentation]. ICSCRM 2024: International Conference on Silicon Carbide and Related Materials, Raleigh, United States of America (the). http://hdl.handle.net/20.500.12708/208598 ( reposiTUm)

Mortada, M., Schmid, U., & Schneider, M. (2024, September). K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and Vacuum [Conference Presentation]. MNE2024 - 50 th InternatIonal Micro and Nano EngIneerIng Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208611 ( reposiTUm)

Muringakodan, S., Schmid, U., & Schneider, M. (2024, September). STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES [Conference Presentation]. MNE 2024 - 50th International conference on Micro and Nano Engineering, Montpellier, France. http://hdl.handle.net/20.500.12708/208774 ( reposiTUm)

Rahnemaihaghighi, N., Schmid, U., & Schneider, M. (2024, September). LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMS [Conference Presentation]. MNE 2024 - 50th InternatIonal Micro and Nano EngIneerIng Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208773 ( reposiTUm)

Keerthi, K., Schmid, U., & Schneider, M. (2024, September). IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM [Conference Presentation]. MNE 2024 - 50th International Micro and Nano Engineering Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208778 ( reposiTUm)

Huber, D., Platz, D., Loch Gesing, A., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024, June). Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators [Poster Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208948 ( reposiTUm)

Ermilova, E., Klapetek, P., Pfusterschmied, G., Nanjappan, C., Schmid, U., & Hertwig, A. (2024, May 29). On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics [Conference Presentation]. EMRS Spring Meeting 2024 - ALTECH 2024, Strasbourg, France. http://hdl.handle.net/20.500.12708/208807 ( reposiTUm)

Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024, June). A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling [Poster Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208947 ( reposiTUm)

Platz, D., Stixenberger, M., Loch Gesing, A., Ignat, I., Kähler, H., & Schmid, U. (2024, June). Anchor Losses in MEMS Plate Resonators of Finite Width [Conference Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/209032 ( reposiTUm)

Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., & Schmid, U. (2023, September 13). Real-time tracking of the dynamic viscosity of bitumen with piezoelectric MEMS resonators [Conference Presentation]. Eurosensors XXXIV, Lecce, Italy. ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Disnan, D., Marschick, G., Hoang, H. T., Wacht, D., Ramer, G., Detz, H., Lendl, B., Schmid, U., Strasser, G., Schwarz, B., & Hinkov, B. (2023, July 20). Low loss polyethylene-loaded plasmonic waveguides for mid-infrared photonic integrated circuits [Poster Presentation]. International Nano-Optoelectronics Workshop (iNOW) 2023, Würzburg, Germany. ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Disnan, D., Marschick, G., Hoang, H. T., Wacht, D., Ramer, G., Detz, H., Schmid, U., Lendl, B., Strasser, G., Schwarz, B., & Hinkov, B. (2023, July 24). Polyethylene-loaded plasmonic waveguides for mid-IR photonic integrated circuits [Poster Presentation]. International Nano-Optoelectronics Workshop (iNOW) 2023, Würzburg, Germany. ( reposiTUm)

Perazzi, M., Leitgeb, M., Pfusterschmied, G., Vengattoor Raghu, A., Schmid, U., Zellner, C., Schwarz, S., Hahn, R., & Kirnbauer, A. (2023, September). High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils [Poster Presentation]. ICSCRM2023 - International Conference on Silicon Carbide and Related Materials, Sorrento, Italy. http://hdl.handle.net/20.500.12708/193349 ( reposiTUm)

Veronesi, S., Aureliano, A. M., Vlamidis, Y., POMPEI, E., Pfusterschmied, G., Leitgeb, M., Schmid, U., & Heun, S. (2023, September 4). Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications [Conference Presentation]. CMD30 FisMat 2023, Milan, Italy. http://hdl.handle.net/20.500.12708/192293 ( reposiTUm)

Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2023, September 21). A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer [Poster Presentation]. ICSCRM 2023 . International Conference on Silicon Carbide and Related Materials, Sorrento, Italy. http://hdl.handle.net/20.500.12708/192311 ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Marschick, G., Disnan, D., Hoang, H. T., Detz, H., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2022, September 0). Low-loss polyethylene-based plasmonics for mid-infrared photonic integrated circuits [Conference Presentation]. 71. Jahrestagung der Österreichischen Physikalischen Gesellschaft (ÖPG) 2022, Leoben, Austria. ( reposiTUm)

Schmid, U., Schneider, M., Leitgeb, M., & Pfusterschmied, G. (2022). SiC Process Technologies for MEMS [Conference Presentation]. MNE 2022 - Eurosensors, Leuven, Belgium. ( reposiTUm)

Hajian, A., Liu Zhifu, Smetaczek, S., Konegger, T., Zellner, C., Limbeck, A., & Schmid, U. (2022). Wet Chemical Etching of CaO-SiO₂-B₂O₃ Ternary System as Crystallizing Glass in an LTCC System [Conference Presentation]. CICMT 2022 - Ceramic Interconnect and Ceramic Microsystems Technologies, Wien, Austria. ( reposiTUm)

Fleckl, G., Pfusterschmied, G., & Schmid, U. (2022). Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiC [Conference Presentation]. 2022 MRS Fall Meeting, Boston, United States of America (the). ( reposiTUm)

Hofko, B., Grothe, H., Schmid, U., Alasatri, S., Hofer, K., Koyun, A. N., Mirwald, J., Schneider, M., & Werkovits, S. (2022, June 8). Christian Doppler Labor für Chemo-Mechanische Analyse von bituminösen Stoffen [Presentation]. 2 Jahres Evaluierungsevent des Christian Doppler Labors für Chemo-Mechanische Analyse von bituminösen Stoffen, Wien, Austria. ( reposiTUm)

Loch Gesing, A., Platz, D., & Schmid, U. (2022). Modeling Non-conventional Vibrational Modes of Micro-plates in Viscous Fluids [Conference Presentation]. ENOC 2020 - 10th European Nonlinear Dynamics Conference, Lyon, France. ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Marschick, G., Disnan, D., Hoang Thi Anh, D., Detz, H., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2022, July 7). Low loss polyethylene-loaded plasmonic waveguides for the mid-infrared [Conference Presentation]. The 8-th edition of the workshop on plasmonics and its applications, Turin, Italy. http://hdl.handle.net/20.500.12708/78091 ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Disnan, D., Marschick, G., Hoang, H. T., Wacht, D., Ramer, G., Detz, H., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2022, August 25). Polyethylene-loaded plasmonic waveguides for mid-infrared photonic integrated circuits [Poster Presentation]. International Quantum Cascade School and Workshop 2022 (IQCLSW), Zürich, Monte Verita, Switzerland. ( reposiTUm)

Arigliani, E., David, M., Lardschneider, A., Marschick, G., Disnan, D., Wacht, D., Hoang, H. T., Detz, H., Ramer, G., Lendl, B., Schmid, U., Strasser, G., & Hinkov, B. (2022, July 7). Loss compensation in novel Polyethylene-metal plasmonics for Mid-Infrared photonic integration [Conference Presentation]. International workshop on Plasmonics (Plasmonica 2022), Turin, Italy. ( reposiTUm)

David, M., Arigliani, E., Dabrowska, A., Lardschneider, A., Sistani, M., Nazzari, D., Disnan, D., Doganlar, I. C., Hoang, H. T., Marschick, G., Detz, H., Schmid, U., Lendl, B., Weber, W. M., Strasser, G., & Hinkov, B. (2022). Low Loss Mid-infrared Plasmonic Waveguides: Extending the Limits of Noble Metals [Poster Presentation]. 2022 MRS Fall Meeting & Exhibit, Boston, United States of America (the). http://hdl.handle.net/20.500.12708/153225 ( reposiTUm)

Hajian, A., Artemenko, A., Kromka, A., Bechtold, F., & Schmid, U. (2021). Fundamental Studies on Crystallization Behaviour and Surface Characteristics of LTCC Substrate Materials. IMAPS Herbstkonferenz 2021, München, Germany. http://hdl.handle.net/20.500.12708/91391 ( reposiTUm)

Platz, D., Gesing, A. L., Hafner, J., Forchheimer, D., Berger, C., Morgenbesser, M., Haviland, D. B., & Schmid, U. (2020). Understanding and utilizing complex interactions in dynamic atomic force microscopy. Seminar Weber Group - MPI Polymer Research Mainz, Mainz, Germany. http://hdl.handle.net/20.500.12708/91322 ( reposiTUm)

Schmid, U., Hafner, J., Pfusterschmied, G., Platz, D., & Schneider, M. (2020). High Performance Piezoelectric MEMS Resonators in Fluids. XXII. Linz Winter Workshop 2020, Linz, Austria. http://hdl.handle.net/20.500.12708/91321 ( reposiTUm)

Schneider, M., Mayrhofer, P., Gillinger, M., Pfusterschmied, G., & Schmid, U. (2017). Piezoelectric MEMS: Material Aspects and Devices. AMA Conferences 2017 - SENSOR 2017 and IRS² 201, Nürnberg, Germany. http://hdl.handle.net/20.500.12708/90848 ( reposiTUm)

Toth, F., Dorfmeister, M., Schmid, U., Kaltenbacher, M., & Schneider, M. (2017). Non-Linear Dynamics of a Circular Piezoelectric Multi-Layer Plate. 13th International Workshop on Direct and Inverse Problems in Piezoelectricity, Kassel, Germany. http://hdl.handle.net/20.500.12708/94666 ( reposiTUm)

Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2017). High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing of Liquid Properties. Internatinal Conference on Small Science (ICSS), San Sebastian, Spain. http://hdl.handle.net/20.500.12708/91003 ( reposiTUm)

Reitterer, J., Fidler, F., Schmid, G., Hambeck, C., Saint Julien-Wallsee, F., Leeb, W., & Schmid, U. (2015). 3D laser display. Science and Applications of Laser Technology, Mauterndorf, Austria. http://hdl.handle.net/20.500.12708/90605 ( reposiTUm)

Soldner, T., Abele, H., Konrad, G., Märkisch, B., Schmid, U., & Theroine, C. (2015). A cold neutron beam facility for Particle Physics at the ESS. 2nd Status Meeting - DFG Priority Programme 1491, Wildbad Kreuth, Germany, EU. http://hdl.handle.net/20.500.12708/132493 ( reposiTUm)

Reitterer, J., Fidler, F., Julien-Wallsee, F. S., Schmid, G., Leeb, W., & Schmid, U. (2014). MEMS-based light module for autostereoscopic outdoor displays. MESS14 Microelectronic Systems Symposium, Vienna, Austria. http://hdl.handle.net/20.500.12708/90414 ( reposiTUm)

Mayrhofer, P., Bittner, A., & Schmid, U. (2014). Piezoelectric Constant Determination of ScxAl1-xN via a Combination of Laser Doppler Vibrometry and FEM Simulation: Circular test structures. Piezoworkshop 2014, Wien, Austria. http://hdl.handle.net/20.500.12708/90416 ( reposiTUm)

Schneider, M., Bittner, A., & Schmid, U. (2014). Characterization of the Mechanical and Piezoelectric Properties of Aluminium Nitride Thin Films at Varying Film Thickness. Piezoworkshop 2014, Wien, Austria. http://hdl.handle.net/20.500.12708/90415 ( reposiTUm)

Derntl, C., Schalko, J., Schneider, M., Bittner, A., Schmid, U., Schmiedmayer, H.-J., & Trupke, M. (2013). Arrays of open, independently tunable microcavities for quantum emitters. Artificial Atoms: From Quantum Physics to Applications, Budapest, Hungary, EU. http://hdl.handle.net/20.500.12708/130479 ( reposiTUm)

Haas, T., Schmid, U., & Zeilmann, C. (2012). Investigation of Pressure Sensor Concepts for Functional Ceramic Circuits. 10th International Symposium on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE), Dresden, EU. http://hdl.handle.net/20.500.12708/89850 ( reposiTUm)

Bittner, A., Nagel, N., Seidel, H., & Schmid, U. (2011). The Impact of Substrate Properties on the Electromigration Resistance of Sputter-Deposited Cu Thin Films. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89764 ( reposiTUm)

Alamin Dow, A. B., Al-Rubaye, H., Koo, D., Schneider, M., Bittner, A., Schmid, U., & Kherani, N. P. (2011). Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89757 ( reposiTUm)

Ruiz, D., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., & Gimzewski, J. K. (2011). Characterization of the first in-plane mode of AlN-actuated microcantilevers. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89761 ( reposiTUm)

Oliver, M. J., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Olivares, J., Iborra, E., Pobedinskas, P., Haenen, K., & Sànchez-Rojas, J. L. (2011). Resonant Piezoelectric AlN-actuated Microcantilevers For Detection Of Antigen/Antibody Interactions. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89762 ( reposiTUm)

Schalko, J., Beigelbeck, R., Stifter, M., Schneider, M., Bittner, A., & Schmid, U. (2011). Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89763 ( reposiTUm)

Bohnenberger, T., Matovic, J., & Schmid, U. (2011). Thin Catalyst Layers Based on Carbon Nanotubes for PEM-Fuel Cell Applications. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89758 ( reposiTUm)

Haas, T., Zeilmann, C., Bittner, A., & Schmid, U. (2011). Investigation on Micromachining Technologies for the Realization of LTCC Devices and Systems. Smart Sensors, Actuators, and MEMS V, Prag, EU. http://hdl.handle.net/20.500.12708/89759 ( reposiTUm)

Bohnenberger, T., Matovic, J., & Schmid, U. (2010). Carbon Nanotubes as Thin Catalyst Layer in PEM-Fuel Cell. 3rd Conference Nanosensors for Industrial Applications - NANOSENS 2010, Vienna, Austria. http://hdl.handle.net/20.500.12708/89431 ( reposiTUm)

Schmid, U. (2009). Robust MEMS Devices for Automotive and Airborne Applications. Brno University of Technology, Austria. http://hdl.handle.net/20.500.12708/89152 ( reposiTUm)

Schmid, U. (2009). Robuste Mikrosysteme für automobile und luftfahrtbezogene Anwendungen. Physikkolloquium, Institut für Physik, Johannes-Kepler-Universität Linz, Linz, Austria, Austria. http://hdl.handle.net/20.500.12708/89146 ( reposiTUm)

Schmid, U. (2009). Robuste Mikrosysteme für automobile und luftfahrtbezogene Anwendungen. Seminar Institut für Allgemeine Physik (IAP), TU Wien, Austria. http://hdl.handle.net/20.500.12708/127111 ( reposiTUm)

Berichte

Alasatri, S., Grothe, H., Gruber, M. R., Hofko, B., Mirwald, J., Primerano, K., Schmid, U., Schneider, M., Stüwe, S., & Werkovits, S. (2024). Chemo-mechanische Toolbox. https://doi.org/10.48436/ckn4z-mn226 ( reposiTUm)

Alasatri, S., Grothe, H., Gruber, M. R., Hofko, B., Mirwald, J., Primerano, K., Schmid, U., Schneider, M., Stüwe, S., & Werkovits, S. (2024). Chemo-mechanical Toolbox. https://doi.org/10.48436/bp12g-8vp13 ( reposiTUm)

Hofko, B., Grothe, H., Schmid, U., Alasatri, S., Hofer, K., Koyun, A. N., Mirwald, J., Schneider, M., & Werkovits, S. (2022). Christian Doppler Laboratory for Chemo-Mechanical Analysis of Bitminous Materials. http://hdl.handle.net/20.500.12708/153714 ( reposiTUm)

Preprints

Derntl, R., Schneider, M., Schalko, J., Bittner, A., Schmiedmayer, H.-J., Schmid, U., & Trupke, M. (2014). Arrays of open, independently tunable microcavities. arXiv. http://hdl.handle.net/20.500.12708/156447 ( reposiTUm)