Faber, T., Filipovic, L., & Koster, L. J. A. (2024). The Hot Phonon Bottleneck Effect in Metal Halide Perovskites. Journal of Physical Chemistry Letters, 15, 12601–12607. https://doi.org/10.1021/acs.jpclett.4c03133 ( reposiTUm)

Shao, H., Reiter, T., Chen, R., Li, J., Hu, Z., Wei, Y., Li, L., & Filipovic, L. (2024). Loading Effect during SiGe/Si Stack Selective Isotropic Etching for Gate-All-Around Transistors. ACS Applied Electronic Materials, 6(11), 8124–8133. https://doi.org/10.1021/acsaelm.4c01462 ( reposiTUm)

Hu, Z., Li, J., Chen, R., Shang, D., Wei, Y., Wang, Z., Li, L., & Filipovic, L. (2024). A Two-Step Dry Etching Model for Non-Uniform Etching Profile in Gate-All-Around Field-Effect Transistor Manufacturing. Small, 20(51), Article 2405574. https://doi.org/10.1002/smll.202405574 ( reposiTUm)

Reiter, T., Aguinsky, L. F., Souza Berti Rodrigues, F., Weinbub, J., Hössinger, A., & Filipovic, L. (2024). Modeling the Impact of Incomplete Conformality During Atomic Layer Processing. Solid-State Electronics, 211, Article 108816. https://doi.org/10.1016/j.sse.2023.108816 ( reposiTUm)

Zarate-Galvez, S., Garcia-Barrientos, A., Lastras-Martinez, L. F., Cardenas-Juarez, M., Macias-Velasquez, S., Filipovic, L., & Arce-Casas, A. (2023). Optimization of Doping Concentration to Obtain High Internal Quantum Efficiency and Wavelength Stability in An InGaN/GaN Blue Light-Emitting Diode. ECS Journal of Solid State Science and Technology, 12(7), Article 076014. https://doi.org/10.1149/2162-8777/ace7c4 ( reposiTUm)

Bobinac, J., Reiter, T., Piso, J., Klemenschits, X., Baumgartner, O., Stanojevic, Z., Strof, G., Karner, M., & Filipovic, L. (2023). Effect of Mask Geometry Variation on Plasma Etching Profiles. Micromachines, 14(3), Article 665. https://doi.org/10.3390/mi14030665 ( reposiTUm)

Faber, T., Filipovic, L., & Koster, L. J. A. (2023). The Role of Thermalization in the Cooling Dynamics of Hot Carrier Solar Cells. Solar RRL, 7(13), 1–9. https://doi.org/10.1002/solr.202300140 ( reposiTUm)

Garcia-Barrientos, A., Nikolova, N., Filipovic, L., Gutierez-D., E. A., Serrano, V., Macias-Velasquez, S., & Zarate-Galvez, S. (2023). Numerical simulations of space charge waves amplification using negative differential conductance in strained Si/SiGe at 4.2 K. Crystals, 13(9), Article 1398. https://doi.org/10.3390/cryst13091398 ( reposiTUm)

Filipovic, L. (2024). Merging Reactor and Feature Scales for Plasma Etch Modeling. In IEEE NANO 2024 Book of Abstracts (pp. 120–120). ( reposiTUm)

Filipovic, L., & Reiter, T. (2024). Multi-Scale Model for High Aspect Ratio TiN Etching in a Cl₂/Ar Inductively Coupled Plasma. In SICT 2024, Plasma Tech 2024 and Tribology 2024 Joint International Conferences: Book of Abstracts (pp. 67–67). ( reposiTUm)

Filipovic, L. (2024). Modeling and simulation of ALD in a level set framework. In EFDS: Program Booklet: ALD for Industry (pp. 24–24). ( reposiTUm)

Gull, J., Filipovic, L., & Kosina, H. (2024). Electron-Electron Scattering in Non-Parabolic Transport Models. In 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 1–4). https://doi.org/10.1109/SISPAD62626.2024.10733120 ( reposiTUm)

Filipovic, L. (2024). Efficient Multi-Scale Modeling of Semiconductor Device Fabrication. In The 5th International Congress on Advanced Materials Sciences and Engineering: Abstract Book (pp. 40–40). https://doi.org/10.34726/8759 ( reposiTUm)

Bamer, B., Leroch, S., Hossinger, A., & Filipovic, L. (2024). Cluster-Based Semi-Empirical Model for Dopant Activation in Silicon Carbide. In 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 1–4). https://doi.org/10.1109/SISPAD62626.2024.10732978 ( reposiTUm)

Reiter, T., Toifl, A., Kong, S. W., Hoessinger, A., & Filipovic, L. (2024). Impact of Ion Energy and Yield in Oblique Ion Beam Etching Process for Blazed Gratings. In 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 1–4). https://doi.org/10.1109/SISPAD62626.2024.10733316 ( reposiTUm)

Bamer, B., Hoessinger, A., & Filipovic, L. (2024). Cluster-based model for dopant activation in SiC. In MESS24: Microelectronic Systems Symposium (pp. 47–47). http://hdl.handle.net/20.500.12708/212125 ( reposiTUm)

Bamer, B., Leroch, S., Hoessinger, A., & Filipovic, L. (2024). Cluster-based multivariate spline model for dopant activation in SiC. In AMaSiS 2024: Applied Mathematics and Simulation for Semiconductor Devices (pp. 20–20). http://hdl.handle.net/20.500.12708/212126 ( reposiTUm)

Lamprecht, D., Capin, M., Benzer, A., Längle, M., Mangler, C., Kotakoski, J., & Filipovic, L. (2024). Room temperature gas sensing based on substitutional atom doped MoS₂. In XXXVIth International Winterschool on Electronic Properties of Novel Materials: Molecular Nanostructures: Program (pp. 31–31). http://hdl.handle.net/20.500.12708/212512 ( reposiTUm)

Stella, R., Leroch, S., Hössinger, A., Waldhör, D., & Filipovic, L. (2024). Atomistic Study of 4H-SiC Using Ab Initio and Machine Learning Techniques. In PRiME 2024 October 6, 2024 - October 11, 2024 Honolulu, USA. PRiME 2024, Honolulu, HI, United States of America (the). https://doi.org/10.1149/MA2024-02201801mtgabs ( reposiTUm)

Leroch, S., Stella, R., Hössinger, A., & Filipovic, L. (2024). MD Simulation of Epitaxial Recrystallization and Defect Structure of Al-Implanted 4H-SiC. In 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 1–4). https://doi.org/10.1109/SISPAD62626.2024.10733052 ( reposiTUm)

Filipovic, L., Reiter, T., Piso, J., & Kostal, R. (2024). Equipment-Informed Machine Learning-Assisted Feature-Scale Plasma Etching Model. In 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 1–4). https://doi.org/10.1109/SISPAD62626.2024.10733099 ( reposiTUm)

Filipovic, L., Bamer, B., Leroch, S., Reiter, T., Stella, R., & Hoessinger, A. (2024). Multi-Scale Process TCAD for Advanced Semiconductor Fabrication. In MESS24: Microelectronic Systems Symposium (pp. 37–37). http://hdl.handle.net/20.500.12708/212137 ( reposiTUm)

Filipovic, L., Bobinac, J., Piso, J., & Reiter, T. (2023). Physics-Informed Compact Model for SF6/O2 Plasma Etching. In 2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 73–76). IEEE. https://doi.org/10.23919/SISPAD57422.2023.10319479 ( reposiTUm)

Reiter, T., & Filipovic, L. (2023). Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs. In S. Y. Yurish (Ed.), Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT ’2023)) (pp. 67–72). https://doi.org/10.13140/RG.2.2.13265.71524 ( reposiTUm)

Filipovic, L., & Lacerda de Orio, R. (2023). Electromigration Reliability of Buried Power Rails in Vertically Stacked Devices. In 2023 IEEE International Integrated Reliability Workshop (IIRW) (pp. 1–6). IEEE. https://doi.org/10.1109/IIRW59383.2023.10477689 ( reposiTUm)

Filipovic, L., Reiter, T., Klemenschits, X., Leroch, S., Stella, R., Baumgartner, O., & Hössinger, A. (2023). Process Simulation in Micro- and Nano-Electronics. In Book of abstracts of the International Workshop on Computational Nanotechnology 2023 (pp. 38–39). http://hdl.handle.net/20.500.12708/189406 ( reposiTUm)

Leroch, S., Stella, R., Hössinger, A., & Filipovic, L. (2023). Molecular Dynamics Study of Al Implantation in 4H-SiC. In 2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 185–188). IEEE. https://doi.org/10.23919/SISPAD57422.2023.10319554 ( reposiTUm)