MikroSystemTechnik Kongress 2023

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Book details Buch-Details

Book title Buchtitel
MikroSystemTechnik Kongress 2023
 
ISBN
978-3-8007-6203-3
 
Publisher Herausgeber
VDE
 

Publications Publikationen

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Subject:  nanosized

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PreviewAuthor(s)TitleTypeIssue Date
1Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Haviland, David ; Platz, Daniel ; Schmid, Ulrich Nanosized Vacuum Gap Electromechanical Devices with Integrated Piezoelectric ActuatorInproceedings Konferenzbeitrag Oct-2023