FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts

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		Preview	Author(s)	Title	Type	Issue Date
	1		Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Haviland, David B ; Platz, Daniel ; Schmid, Ulrich	Vacuum gap electromechanical devices with integrated piezoelectric actuator	Inproceedings Konferenzbeitrag	Jun-2023