Transducers 2023 : The 22nd International Conference on Solid-State Electronics, Actuators and Microsystems

Book title Buchtitel

ISBN

978-4-88686-435-2

Publisher Herausgeber

IEEJ

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		Preview	Author(s)	Title	Type	Issue Date
	1		Platz, Daniel ; Stixenberger, Marco ; Loch Gesing, Andre ; Ignat, Ioan ; Kähler, Hendrik ; Schmid, Ulrich	Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region	Inproceedings Konferenzbeitrag	4-Apr-2023