Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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Book details Buch-Details

Book title Buchtitel
Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
 
ISBN
979-8-3503-5792-9
 
Publisher Verlag
IEEE
 
DOI
10.1109/MEMS58180.2024
 

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PreviewAuthor(s)TitleTypeIssue Date
1Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply DepositionInproceedings Konferenzbeitrag Feb-2024
2Huber, Dominik ; Platz, Daniel ; Gesing, André L. ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems ResonatorsInproceedings Konferenzbeitrag 22-Feb-2024