Microsystems Technology in Germany 2018 / Mikrosystemtechnik in Deutschland 2018
Book title Buchtitel
Microsystems Technology in Germany 2018 / Mikrosystemtechnik in Deutschland 2018
Publisher Herausgeber
trias Consult
Place of publishing Erscheinungsort
Berlin
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Fischeneder, Martin ; Oposich, Martin ; Schneider, Michael ; Schmid, Ulrich | Active Q-factor Control of Piezoelectric MEMS Cantilevers for High Speed AFM Applications in Vacuum | Buchbeitrag Book Contribution | 2018 |