Characterization and Metrology for ULSI Technology 2005
Book title Buchtitel
Characterization and Metrology for ULSI Technology 2005
Publisher Herausgeber
AIP Conf. Proc. 788
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Powell, C.J. ; Smekal, Werner ; Werner, Wolfgang S.M. | A new NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA): Application to Angle-Resolved Photoelectron Spectroscopy of HfO2, ZrO2, HfSiO4 and ZrSiO4 Films on Silicon | Konferenzbeitrag Inproceedings | 2005 |