Proceedings of the 14th Microscopy of Semiconducting Materials Conference
Book title Buchtitel
Proceedings of the 14th Microscopy of Semiconducting Materials Conference
Editor Herausgeber_in
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Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Kenda, Andreas ; Cerva, H. ; Pongratz, Peter ; Hierlemann, M. ; Liebmann, R. ; Cullis, A.G. ; Hutchison, J.L. | Strain measurements of ULSI devices using LACBED with TSUPREM modeled displacements | Konferenzbeitrag Inproceedings | 2005 |