Proceedings of the NIST Nanoelectonics Conference 2007, CP931, Frontiers of Characterization and Metrology for Nanoelectronics
Book title Buchtitel
Proceedings of the NIST Nanoelectonics Conference 2007, CP931, Frontiers of Characterization and Metrology for Nanoelectronics
Publisher Herausgeber
NIST Nanoelectonics Conference 2007
Date issued
Results 1-1 of 1 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Powell, C.J. ; Werner, Wolfgang S.M. ; Smekal, Werner | Distinguishability of N Composition Profiles In SiON Films On Si By Angle-Resolved X-ray Photoelectron Spectroscopy | Konferenzbeitrag Inproceedings | 2007 |