2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

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Publisher Herausgeber

IEEE

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		Preview	Author(s)	Title	Type	Issue Date
	1		Meschtscherjakov, Alexander ; Kluckner, Patrizia ; Pöhr, Florian ; Reitberger, Wolfgang	Ambient persuasion in the factory: The case of the Operator Guide	Konferenzbeitrag Inproceedings	2011