Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Book title Buchtitel
Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Editor Herausgeber_in
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Kaltenbacher, Manfred ; Köck, H. ; Jungwirth, M. | Simulation environment for MEMS sensors and actuators | Konferenzbeitrag Inproceedings | 2011 |