Proceedings of SPIE Microtechnologies 2013
Book title Buchtitel
Proceedings of SPIE Microtechnologies 2013
Publisher Herausgeber
Smart Sensors, Actuators, and MEMS VI
Place of publishing Erscheinungsort
SPIE Vol. 8763, 876324, Grenoble
Date issued
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Tumpold, David ; Kaltenbacher, Manfred ; Glacer, Christoph ; Nawaz, Mohsin ; Dehé, Alfons | Modeling Methods of MEMS Micro-Speaker with Electrostatic Working Principle | Konferenzbeitrag Inproceedings  | 2013 |