IEEE-NEMS 2014

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IEEE-NEMS 2014
 

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Date Issued:  [2000 TO 2024]
Author:  Laur, Reiner

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1Glacer, Christoph ; Dehé, Alfons ; Tumpold, David ; Laur, Reiner Silicon Microspeaker with out-of-plane DisplacementKonferenzbeitrag Inproceedings2014