Simulation of Semiconductor Devices and Processes

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Simulation of Semiconductor Devices and Processes

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PreviewAuthor(s)TitleTypeIssue Date
1Strasser, E. ; Selberherr, S. A General Simulation Method for Etching and Deposition ProcessesKonferenzbeitrag Inproceedings1993
2Kosina, H. ; Harrer, M. ; Vogl, P. ; Selberherr, S. A Monte Carlo Transport Model Based on Spherical Harmonics Expansion of the Valence BandsKonferenzbeitrag Inproceedings1995
3Rieger, G. ; Halama, S. ; Selberherr, S. A Programmable Tool for Interactive Wafer-State Level Data ProcessingKonferenzbeitrag Inproceedings1995
4Schrom, G. ; Selberherr, S. ; Unterleitner, F. ; Trontelj, J. ; Kunc, V. Analysis of a CMOS-Compatible Vertical Bipolar TransistorKonferenzbeitrag Inproceedings1993
5Burenkov, A. ; Bohmayr, W. ; Lorenz, J. ; Ryssel, H. ; Selberherr, S. Analytical Model for Phosphorus Large Angle Tilted ImplantationKonferenzbeitrag Inproceedings1995
6Hackel, M. ; Kosina, H. ; Selberherr, S. Electron Transport in Silicon Dioxide at Intermediate and High Electric FieldsKonferenzbeitrag Inproceedings1993
7Deutschmann, R. ; Fischer, C. ; Sala, C. ; Selberherr, S. Evaluation of Effective Device Parameters by Comparison of Measured and Simulated C-V Characteristics for Conventional and Pseudomorphic HEMTsKonferenzbeitrag Inproceedings1993
8Mlekus, R. ; Ledl, Ch. ; Strasser, E. ; Selberherr, S. Polygonal Geometry Reconstruction after Cellular Etching or Deposition SimulationKonferenzbeitrag Inproceedings1995
9Heinreichsberger, O. ; Thurner, M. ; Selberherr, S. Practical Use of a Hierarchical Linear Solver Concept for 3D MOS Device SimulationKonferenzbeitrag Inproceedings1993
10Pichler, Ch. ; Selberherr, S. Process Flow Representation within the VISTA FrameworkKonferenzbeitrag Inproceedings1993
11Bohmayr, W. ; Burenkov, A. ; Lorenz, J. ; Ryssel, H. ; Selberherr, S. Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion ImplantationKonferenzbeitrag Inproceedings1995
12Pichler, Ch. ; Khalil, N. ; Schrom, G. ; Selberherr, S. TCAD Optimization Based on Task-Level Framework ServicesKonferenzbeitrag Inproceedings1995
13Mukai, M. ; Tatsumi, T. ; Nakauchi, N. ; Kobayashi, T. ; Koyama, K. ; Komatsu, Y. ; Bauer, R. ; Rieger, G. ; Selberherr, S. The Simulation System for Three-Dimensional Capacitance and Current Density Calculation with a User Friendly GUIKonferenzbeitrag Inproceedings1995
14Leitner, E. ; Selberherr, S. Three-Dimensional Grid Adaptation Using a Mixed-Element Decomposition MethodKonferenzbeitrag Inproceedings1995
15Rottinger, M. ; Simlinger, T. ; Selberherr, S. Two-Dimensional Transient Simulation of Charge-Coupled Devices Using MINIMOS NTKonferenzbeitrag Inproceedings1995