Proceedings Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors

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		Preview	Author(s)	Title	Type	Issue Date
	1		Khalil, N. ; Faricelli, John ; Huang, C.-L. ; Selberherr, Siegfried	Two-Dimensional Dopant Profiling of Submicron MOSFETs Using Nonlinear Least Squares Inverse Modeling	Konferenzbeitrag Inproceedings	1995