Proceedings of the 31st Workshop on Compound Semiconductor Devices and Inetrated Circuits

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Proceedings of the 31st Workshop on Compound Semiconductor Devices and Inetrated Circuits
 

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1Pozzovivo, Gianmauro ; Kuzmik, Jan ; Schrenk, Werner ; Carlin, Jean-François ; Gonschorek, Marcus ; Grandjean, Nicolas ; di Forte Poisson, Marie-Antoinette ; Delage, S.L. ; Strasser, Gottfried ; Pogany, Dionyz Optimization of the plasma etching in fabrication of InAlN/AlN/GaN HEMTsKonferenzbeitrag Inproceedings2007