Smart Sensors, Actuators, and MEMS III (Proceedings Volume)
Book title Buchtitel
Smart Sensors, Actuators, and MEMS III (Proceedings Volume)
Publisher Herausgeber
SPIE
Place of publishing Erscheinungsort
6589
Results 1-1 of 1 (Search time: 0.001 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Schmid, Ulrich | LTCC: a fascinating technology platform for miniaturized devices | Konferenzbeitrag Inproceedings | 2007 |