Proceedings of the IEEE Sensors 2011

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Proceedings of the IEEE Sensors 2011
 

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1Hortschitz, Wilfried ; Kohl, Franz ; Sachse, Matthias ; Stifter, Michael ; Sauter, Thilo ; Steiner, Harald ; Schalko, Johannes ; Jachimowicz, Artur ; Keplinger, Franz Noise considerations on hybrid optical MEMS displacement sensorsKonferenzbeitrag Inproceedings2011