Proceedings International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN)
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Proceedings International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN)
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Schrems, Martin ; Schrank, Clemens ; Siegert, Joerg ; Kraft, J. ; Teva, Jordi ; Selberherr, Siegfried | Metrology Requirements for Manufacturing 3D Integrated ICs | Konferenzbeitrag Inproceedings | 2013 |