Proceedings of SPIE Optical Microlithography
Book title Buchtitel
Proceedings of SPIE Optical Microlithography
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Kirchauer, Heinrich ; Selberherr, Siegfried | A Three-Dimensional Photolithography Simulator Including Rigorous Nonplanar Exposure Simulation for Off-Axis Illumination | Konferenzbeitrag Inproceedings | 1998 |