Proceedings of Eurosensors XXIX
Book title Buchtitel
Proceedings of Eurosensors XXIX
Publisher Herausgeber
Procedia Engineering
Place of publishing Erscheinungsort
Vol. 120
Series Schriftenreihe
Procedia Engineering
Subject
Date issued
Results 1-1 of 1 (Search time: 0.001 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Frischmuth, Tobias ; Schneider, Michael ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich | Impact of thermal treatment on the residual stress and Young's modulus of thin a-SiC:H membranes applying bulge testing | Konferenzbeitrag Inproceedings | 2015 |