Proceedings of the BIT's 2nd Annual World Congress of Smart Materials 2016
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Proceedings of the BIT's 2nd Annual World Congress of Smart Materials 2016
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Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Filipovic, Lado ; Selberherr, Siegfried | Modeling the Deposition and Stress Generation in Thin Films for CMOS-Integrated Gas Sensors | Konferenzbeitrag Inproceedings | 2016 |