Proc. of the "Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016)"
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Proc. of the "Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016)"
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Sordo, Guido ; Iannacci, J. ; Schmid, Ulrich | Study on the Effectiveness of Different Electrode Geometries for Sputtered Aluminium Nitride-based MEMS Energy Harvesters | Konferenzbeitrag Inproceedings | 2016 |