Proc. of the "Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016)"

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		Preview	Author(s)	Title	Type	Issue Date
	1		Sordo, Guido ; Iannacci, J. ; Schmid, Ulrich	Study on the Effectiveness of Different Electrode Geometries for Sputtered Aluminium Nitride-based MEMS Energy Harvesters	Konferenzbeitrag Inproceedings	2016